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Phase Formation and High-Temperature Stability of Very Thin Co-Sputtered Ti-Al and Multilayered Ti/Al Films on Thermally Oxidized Si Substrates

Materials, 2020-04, Vol.13 (9), p.2039

2020

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Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

International Journal of Precision Engineering and Manufacturing-Green Technology, 2022, 9(1), , pp.43-57

2022

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Evaluation of Surface Cleaning Procedures for CTGS Substrates for SAW Technology with XPS

Materials, 2017-11, Vol.10 (12), p.1373

2017

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Mo-La2O3 Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices

Materials, 2019-08, Vol.12 (17), p.2651

2019

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Stress and Microstructure Evolution in Mo Thin Films without or with Cover Layers during Thermal-Cycling

Materials, 2020-09, Vol.13 (18), p.3926

2020

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Mechanical Properties of ZTO, ITO, and a-Si:H Multilayer Films for Flexible Thin Film Solar Cells

Materials, 2017-03, Vol.10 (3), p.245

2017

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The Influence of the Composition of Ru100−xAlx (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability

Materials, 2017-03, Vol.10 (3), p.277

2017

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Capability Study of Ti, Cr, W, Ta and Pt as Seed Layers for Electrodeposited Platinum Films on γ-Al₂O₃ for High Temperature and Harsh Environment Applications

Materials, 2017-01, Vol.10 (1), p.54-54

2017

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Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum

Materials, 2015-12, Vol.8 (12), p.8868-8876

2015

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Improving the oxidation resistance of RuAl thin films with Al2O3 or SiO2 cover layers

Journal of alloys and compounds, 2019-03, Vol.776, p.819-825

2019

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Pt-RuAl bilayers as a model system for Pt wire bonding of high-temperature RuAl electrodes

Journal of alloys and compounds, 2020-01, Vol.813, p.152107, Article 152107

2020

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Aluminum based high temperature thin film electrode system for wireless sensors

Journal of materials research and technology, 2023-09, Vol.26, p.1955-1961

2023

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Study of TiAl thin films on piezoelectric CTGS substrates as an alternative metallization system for high-temperature SAW devices

Journal of materials research and technology, 2021-05, Vol.12, p.2383-2395

2021

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Patterning and control of the nanostructure in plasma thin films with acoustic waves: mechanical vs. electrical polarization effects

Materials horizons, 2021-02, Vol.8 (2), p.515-524

2021

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The influence of barrier layers (SiO2, Al2O3, W) on the phase formation and stability of RuAl thin films on LGS and CTGS substrates for surface acoustic wave technology

Journal of alloys and compounds, 2016-12, Vol.688, p.228-240

2016

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TEM studies on the changes of the composition in LGS and CTGS substrates covered with a RuAl metallization and on the phase formation within the RuAl film after heat treatment at 600 and 800 °C

Journal of alloys and compounds, 2016-04, Vol.664, p.510-517

2016

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Pt-wire bonding optimization for electroplated Pt films on γ-Al2O3 for high temperature and harsh environment applications

Sensors and actuators. A. Physical., 2018-12, Vol.284, p.129-134

2018

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Thermomechanical and Creep Behaviors of Multilayered Metallization Systems Developed for High‐Temperature Surface Acoustic Wave Sensors

Advanced materials technologies, 2023-06, Vol.8 (11), p.n/a

2023

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Pt-wire bonding optimization for electroplated Pt films on γ-Al^sub 2^O^sub 3^ for high temperature and harsh environment applications

Sensors and actuators. A. Physical., 2018-12, Vol.284, p.129

2018

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TEM studies on the changes of the composition in LGS and CTGS substrates covered with a RuAl metallization and on the phase formation within the RuAl film after heat treatment at 600 and 800 degree C

Journal of alloys and compounds, 2016-04, Vol.664, p.510-517

2016

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Coevaporation and structuring of titanium–aluminum alloy thin films

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2017-11, Vol.35 (6)

2017

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Mo-La 2 O 3 Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices

Materials, 2019-08, Vol.12 (17)

2019

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The Influence of the Composition of Ru 100-x Al x (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability

Materials, 2017-03, Vol.10 (3)

2017

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Patterning and control of the nanostructure in plasma thin films with acoustic waves: mechanical electrical polarization effects

Materials horizons, 2021-02, Vol.8 (2), p.515-524

2021

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Mapping of residual strains around a shear band in bulk metallic glass by nanobeam X-ray diffraction

Acta materialia, 2016-06, Vol.111, p.187-193

2016

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Phase Formation and High-Temperature Stability of Very Thin Co-Sputtered Ti-Al and Multilayered Ti/Al Films on Thermally Oxidized Si Substrates

Towards Green 3D-Microfabrication of Bio-MEMS Devices Using ADEX Dry Film Photoresists

Evaluation of Surface Cleaning Procedures for CTGS Substrates for SAW Technology with XPS

Mo-La2O3 Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices

Stress and Microstructure Evolution in Mo Thin Films without or with Cover Layers during Thermal-Cycling

Mechanical Properties of ZTO, ITO, and a-Si:H Multilayer Films for Flexible Thin Film Solar Cells

The Influence of the Composition of Ru100−xAlx (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability

Capability Study of Ti, Cr, W, Ta and Pt as Seed Layers for Electrodeposited Platinum Films on γ-Al₂O₃ for High Temperature and Harsh Environment Applications

Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum

Improving the oxidation resistance of RuAl thin films with Al2O3 or SiO2 cover layers

Pt-RuAl bilayers as a model system for Pt wire bonding of high-temperature RuAl electrodes

Aluminum based high temperature thin film electrode system for wireless sensors

Study of TiAl thin films on piezoelectric CTGS substrates as an alternative metallization system for high-temperature SAW devices

Patterning and control of the nanostructure in plasma thin films with acoustic waves: mechanical vs. electrical polarization effects

The influence of barrier layers (SiO2, Al2O3, W) on the phase formation and stability of RuAl thin films on LGS and CTGS substrates for surface acoustic wave technology

TEM studies on the changes of the composition in LGS and CTGS substrates covered with a RuAl metallization and on the phase formation within the RuAl film after heat treatment at 600 and 800 °C

Pt-wire bonding optimization for electroplated Pt films on γ-Al2O3 for high temperature and harsh environment applications

Thermomechanical and Creep Behaviors of Multilayered Metallization Systems Developed for High‐Temperature Surface Acoustic Wave Sensors

Pt-wire bonding optimization for electroplated Pt films on γ-Al^sub 2^O^sub 3^ for high temperature and harsh environment applications

TEM studies on the changes of the composition in LGS and CTGS substrates covered with a RuAl metallization and on the phase formation within the RuAl film after heat treatment at 600 and 800 degree C

Coevaporation and structuring of titanium–aluminum alloy thin films

Mo-La 2 O 3 Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices

The Influence of the Composition of Ru 100-x Al x (x = 50, 55, 60, 67) Thin Films on Their Thermal Stability

Patterning and control of the nanostructure in plasma thin films with acoustic waves: mechanical electrical polarization effects

Mapping of residual strains around a shear band in bulk metallic glass by nanobeam X-ray diffraction

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