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Surface & coatings technology, 2016-05, Vol.293, p.10-15
2016
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Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2015-05, Vol.33 (3)
2015
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Journal of applied physics, 2014-06, Vol.115 (22)
2014
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Vacuum, 2018-04, Vol.150, p.216-221
2018
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Plasma sources science & technology, 2013-08, Vol.22 (4), p.45012-1-10
2013
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Vacuum, 2018-09, Vol.155, p.559-565
2018
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Direct measurement and modeling of the redirected ion flux in a high-powered pulsed-plasma magnetron
2015
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Journal of radioanalytical and nuclear chemistry, 2020-11, Vol.326 (2), p.1075-1079
2020
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Thema
- Physical Sciences
- Science & Technology
- Physics
- Physics, Applied
- Technology
- Materials Science
- Magnetic Fields
- Condensed Matter Physics
- Materials Science, Coatings & Films
- Deposition
- Efficiency
- Hipims
- Magnetic Field Configurations
- Magnetron Sputtering
- Magnetrons
- Materials Science, Multidisciplinary
- Power Supplies
- Surfaces And Interfaces
- Surfaces, Coatings And Films
- Applied Physics
Kollektion
Zeitschrift / Serie
- Journal Of Vacuum Science & Technology. A, Vacuum, Surfaces, And Films
- Vacuum
- Journal Of Applied Physics
- Journal Of Radioanalytical And Nuclear Chemistry
- Journal Of Vacuum Science & Technology A: Vacuum, Surfaces, And Films
- Plasma Sources Science & Technology
- Plasma Sources Science And Technology
- Surface & Coatings Technology
- Surface And Coatings Technology