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Multitechnique elemental depth profiling of InAlGaN and InAlN films

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-05, Vol.36 (3)

2018

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Solving the problem of gallium contamination problem in InAlN layers in close coupled showerhead reactors

Applied physics express, 2019-04, Vol.12 (4), p.45504

2019

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H2 based etching of GaN for re-grown gallium-free InAlN barriers giving very low 2DEG sheet resistance of 185 Ω/sq

Journal of crystal growth, 2022-06, Vol.588, p.126674, Article 126674

2022

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Avoiding Gallium Pollution in Close‐Coupled Showerhead Reactors, Alternative Process Routes

Physica status solidi. A, Applications and materials science, 2023-08, Vol.220 (16), p.n/a

2023

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Study of Ge-rich GeSbTe etching process with different halogen plasmas

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2019-05, Vol.37 (3)

2019

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Modification of Ge-rich GeSbTe surface during the patterning process of phase-change memories

Microelectronic engineering, 2020-01, Vol.221, p.111183, Article 111183

2020

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Surface and interface analysis, 2020-12, Vol.52 (12), p.i-i

2020

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Surface and interface analysis, 2020-12, Vol.52 (12)

2020

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Surface and interface analysis, 2020-12, Vol.52 (12), p.i-i

2020

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Nanolaminated FeCoB/FeCo and FeCoB/NiFe soft magnetic thin films with tailored magnetic properties deposited by magnetron sputtering

Journal of magnetism and magnetic materials, 2018-05, Vol.453, p.211-219

2018

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Accelerating the development of phase‐change random access memory with in‐fab plasma profiling time‐of‐flight mass spectrometry

Surface and interface analysis, 2020-12, Vol.52 (12), p.895-899

2020

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Germanium out diffusion in SiGe-based HfO2 gate stacks

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-07, Vol.36 (4)

2018

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Impact of growth conditions on AlN/GaN heterostructures with in-situ SiN capping layer

Journal of crystal growth, 2019-06, Vol.515, p.48-52

2019

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Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM

Materials science in semiconductor processing, 2017-11, Vol.71, p.433-440

2017

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Rapid, semi-quantitative depth profiling of ultra-thin films using plasma profiling time-of-flight mass spectrometry: AM: Advanced metrology

2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2017, p.285-288

2017

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Atomic Layer Deposition of HfAlO x for High-k Gate Dielectrics

Meeting abstracts (Electrochemical Society), 2023-12, Vol.MA2023-02 (29), p.1439-1439

2023

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Variation of cervical sagittal alignment parameters according to gender, pelvic incidence and age

European spine journal, 2022-05, Vol.31 (5), p.1228-1240

2022

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Surgical treatment of bone metastasis from osteophilic cancer. Results in 401 peripheral and spinal locations

Orthopaedics & traumatology, surgery & research, 2022-06, Vol.108 (4), p.103193-103193, Article 103193

2022

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Influence of preoperative biological parameters on postoperative complications and survival in spinal bone metastasis. A multicenter prospective study

Orthopaedics & traumatology, surgery & research, 2020-10, Vol.106 (6), p.1033-1038

2020

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Influence of an Auxiliary Facet System on Lumbar Spine Biomechanics

Spine (Philadelphia, Pa. 1976), 2011-04, Vol.36 (9), p.690-699

2011

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Prise en charge chirurgicale des métastases osseuses des cancers ostéophiles. Résultats d’une série de 401 localisations rachidiennes et périphériques

Revue de chirurgie orthopédique et traumatologique, 2022-06, Vol.108 (4), p.501-508

2022

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Influence des paramètres biologiques préopératoires sur la survenue de complications postopératoires et la survie des patients pris en charge pour une métastase rachidienne. Résultats d’une étude prospective multicentrique

Revue de chirurgie orthopédique et traumatologique, 2020-10, Vol.106 (6), p.600-605

2020

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Correlation between Detection of a Plasmid and High-Level Virulence of Vibrio nigripulchritudo, a Pathogen of the Shrimp Litopenaeus stylirostris

Applied and Environmental Microbiology, 2008-05, Vol.74 (10), p.3038-3047

2008

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Escapement of silver-phase European eels, Anguilla anguilla, determined from fishing activities in a Mediterranean lagoon (Or, France)

ICES journal of marine science, 2012-01, Vol.69 (1), p.30-33

2012

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Escapement of a silver-phase eel population, Anguilla anguilla, determined from fishery in a Mediterranean lagoon (Or, France)

ICES journal of marine science, 2012-01, Vol.69

2012

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Multitechnique elemental depth profiling of InAlGaN and InAlN films

Solving the problem of gallium contamination problem in InAlN layers in close coupled showerhead reactors

H2 based etching of GaN for re-grown gallium-free InAlN barriers giving very low 2DEG sheet resistance of 185 Ω/sq

Avoiding Gallium Pollution in Close‐Coupled Showerhead Reactors, Alternative Process Routes

Study of Ge-rich GeSbTe etching process with different halogen plasmas

Modification of Ge-rich GeSbTe surface during the patterning process of phase-change memories

Cover Image

Cover Image

Cover Image

Nanolaminated FeCoB/FeCo and FeCoB/NiFe soft magnetic thin films with tailored magnetic properties deposited by magnetron sputtering

Accelerating the development of phase‐change random access memory with in‐fab plasma profiling time‐of‐flight mass spectrometry

Germanium out diffusion in SiGe-based HfO2 gate stacks

Impact of growth conditions on AlN/GaN heterostructures with in-situ SiN capping layer

Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM

Rapid, semi-quantitative depth profiling of ultra-thin films using plasma profiling time-of-flight mass spectrometry: AM: Advanced metrology

Atomic Layer Deposition of HfAlO x for High-k Gate Dielectrics

Variation of cervical sagittal alignment parameters according to gender, pelvic incidence and age

Surgical treatment of bone metastasis from osteophilic cancer. Results in 401 peripheral and spinal locations

Influence of preoperative biological parameters on postoperative complications and survival in spinal bone metastasis. A multicenter prospective study

Influence of an Auxiliary Facet System on Lumbar Spine Biomechanics

Prise en charge chirurgicale des métastases osseuses des cancers ostéophiles. Résultats d’une série de 401 localisations rachidiennes et périphériques

Influence des paramètres biologiques préopératoires sur la survenue de complications postopératoires et la survie des patients pris en charge pour une métastase rachidienne. Résultats d’une étude prospective multicentrique

Correlation between Detection of a Plasmid and High-Level Virulence of Vibrio nigripulchritudo, a Pathogen of the Shrimp Litopenaeus stylirostris

Escapement of silver-phase European eels, Anguilla anguilla, determined from fishing activities in a Mediterranean lagoon (Or, France)

Escapement of a silver-phase eel population, Anguilla anguilla, determined from fishery in a Mediterranean lagoon (Or, France)

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