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Fundamental principles of optical lithography: the science of microfabrication

Mack, Chris

1st ed., 2008

Volltextzugriff (PDF)

Fifty Years of Moore's Law

IEEE transactions on semiconductor manufacturing, 2011-05, Vol.24 (2), p.202-207

Mack, Chris A

2011

Volltextzugriff (PDF)

Unbiased roughness measurements: Subtracting out SEM effects

Microelectronic engineering, 2018-04, Vol.190, p.33-37

2018

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Stochastic approach to modeling photoresist development

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2009-05, Vol.27 (3), p.1122-1128

Mack, Chris

2009

Volltextzugriff (PDF)

Investigation of microstructured milling tool for deferring tool wear

Wear, 2011-07, Vol.271 (9), p.2433-2437

2011

Volltextzugriff (PDF)

A detailed study of resonance-assisted evanescent interference lithography to create high aspect ratio, super-resolved structures

Optics express, 2013-06, Vol.21 (11), p.13710-13725

2013

Volltextzugriff (PDF)

Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters

Journal of Photopolymer Science and Technology, 2020/01/31, Vol.32(6), pp.779-790

2020

Volltextzugriff (PDF)

Utilizing Roughness Power Spectral Density Variables to Guide Resist Formulation and Understand Impact of Frequency Analysis through Process

Journal of Photopolymer Science and Technology, 2018/12/15, Vol.31(6), pp.679-687

2018

Volltextzugriff (PDF)

Unbiased roughness measurements: Subtracting out SEM effects, part 2

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-11, Vol.36 (6)

2018

Volltextzugriff (PDF)

A detailed study of resonance-assisted evanescent interference lithography to create high aspect ratio, super-resolved structures

Optics express, 2013-06, Vol.21 (11), p.13710

2013

Volltextzugriff (PDF)

Biases and uncertainties in the use of autocovariance and height–height covariance functions to characterize roughness

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2016-11, Vol.34 (6)

Mack, Chris A.

2016

Volltextzugriff (PDF)

Examination of the Impact of Airbags on Renal Injury Using a National Database

Journal of the American College of Surgeons, 2010-09, Vol.211 (3), p.355-360

2010

Volltextzugriff (PDF)

Determining the ultimate resolution of scanning electron microscope-based unbiased roughness measurements. I. Simulating noise

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2019-11, Vol.37 (6)

2019

Volltextzugriff (PDF)

Stochastic limitations to EUV lithography

2018 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), 2018, p.1-1

Mack, Chris A.

2018

Volltextzugriff (PDF)

e-beam metrology of thin resist for high NA EUVL

Japanese Journal of Applied Physics, 2023-06, Vol.62 (SG), p.SG0808

2023

Volltextzugriff (PDF)

Fifty Years of MooreE14s Law

IEEE transactions on semiconductor manufacturing, 2011-05, Vol.24 (2), p.202-207

Mack, Chris A

2011

Volltextzugriff (PDF)

Reducing proximity effects in optical lithography

Japanese Journal of Applied Physics, 1996-12, Vol.35 (12B), p.6379-6385

MACK, C. A

1996

Volltextzugriff (PDF)

Stochastic exposure kinetics of extreme ultraviolet photoresists: Trapping model

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2013-11, Vol.31 (6), p.6

2013

Volltextzugriff (PDF)

Electron beam lithography simulation for mask making

Microelectronic engineering, 1999, Vol.46 (1), p.283-286

Mack, Chris A.

1999

Volltextzugriff (PDF)

Data analysis for photolithography

Microelectronic engineering, 1999, Vol.46 (1), p.65-68

1999

Volltextzugriff (PDF)

Firearm safety counseling in primary care pediatrics: a randomized, controlled trial

Pediatrics (Evanston), 2000-07, Vol.106 (1 Pt 1), p.22

2000

Volltextzugriff (PDF)

Timing of Femur Fracture Fixation: Effect on Outcome in Patients with Thoracic and Head Injuries

The journal of trauma, 2002-02, Vol.52 (2), p.299-307

2002

Volltextzugriff (PDF)

326: Nationwide Validation of the American Association for the Surgery of Trauma (AAST) Grading for Renal Trauma

The Journal of urology, 2005-04, Vol.173 (4), p.90-90

2005

Volltextzugriff (PDF)

A role for focal adhesion kinase in vascular smooth muscle cell differentiation

Vascular pharmacology, 2006-09, Vol.45 (3), p.e103-e103

2006

Volltextzugriff (PDF)

Stochastic approach to modeling photoresist developmenta

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2009-05, Vol.27 (3), p.1122-1128

Mack, Chris

2009

Volltextzugriff (PDF)

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Fundamental principles of optical lithography: the science of microfabrication

Fifty Years of Moore's Law

Unbiased roughness measurements: Subtracting out SEM effects

Stochastic approach to modeling photoresist development

Investigation of microstructured milling tool for deferring tool wear

A detailed study of resonance-assisted evanescent interference lithography to create high aspect ratio, super-resolved structures

Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters

Utilizing Roughness Power Spectral Density Variables to Guide Resist Formulation and Understand Impact of Frequency Analysis through Process

Unbiased roughness measurements: Subtracting out SEM effects, part 2

A detailed study of resonance-assisted evanescent interference lithography to create high aspect ratio, super-resolved structures

Biases and uncertainties in the use of autocovariance and height–height covariance functions to characterize roughness

Examination of the Impact of Airbags on Renal Injury Using a National Database

Determining the ultimate resolution of scanning electron microscope-based unbiased roughness measurements. I. Simulating noise

Stochastic limitations to EUV lithography

e-beam metrology of thin resist for high NA EUVL

Fifty Years of MooreE14s Law

Reducing proximity effects in optical lithography

Stochastic exposure kinetics of extreme ultraviolet photoresists: Trapping model

Electron beam lithography simulation for mask making

Data analysis for photolithography

Firearm safety counseling in primary care pediatrics: a randomized, controlled trial

Timing of Femur Fracture Fixation: Effect on Outcome in Patients with Thoracic and Head Injuries

326: Nationwide Validation of the American Association for the Surgery of Trauma (AAST) Grading for Renal Trauma

A role for focal adhesion kinase in vascular smooth muscle cell differentiation

Stochastic approach to modeling photoresist developmenta

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