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Materials Informatics for Process and Material Co-Optimization

IEEE transactions on semiconductor manufacturing, 2019-11, Vol.32 (4), p.444-449

2019

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Phase control of heterogeneous HfxZr(1−x)O2 thin films by machine learning

Japanese Journal of Applied Physics, 2022-07, Vol.61 (SH), p.SH1009

2022

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Phase control of heterogeneous Hf x Zr (1−x) O 2 thin films by machine learning

Japanese Journal of Applied Physics, 2022-07, Vol.61 (SH), p.SH1009

2022

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Phase control of heterogeneous Hf x Zr(1−x)O2 thin films by machine learning

Japanese Journal of Applied Physics, 2022-06, Vol.61 (SH)

2022

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Vacancy-Type Defects Introduced by Gas Cluster Ion-Implantation on Si Studied by Monoenergetic Positron Beams

Japanese Journal of Applied Physics, 2012-11, Vol.51 (11), p.111801-111801-5

2012

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Vacancy-type defects in TiN/ZrO2/TiN capacitors probed by monoenergetic positron beams

Thin solid films, 2022-11, Vol.762, p.139557, Article 139557

2022

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Vacancy-Type Defects Introduced by Gas Cluster Ion-Implantation on Si Studied by Monoenergetic Positron Beams

Japanese Journal of Applied Physics, 2012-11, Vol.51 (11R), p.111801

2012

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Finite temperature effects on the structural stability of Si-doped HfO2 using first-principles calculations

Applied physics letters, 2023-06, Vol.122 (26)

2023

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Systematic search for stabilizing dopants in ZrO2 and HfO2 using first-principles calculations

IEEE transactions on semiconductor manufacturing, 2023-11, Vol.36 (4), p.1-1

2023

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Using an Optical Motion Sensor for Visualization and Analysis of Maintenance Work on Semiconductor Manufacturing Equipment

IEEE transactions on semiconductor manufacturing, 2017-11, Vol.30 (4), p.333-338

2017

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Observation and Elimination of Recoil Particles From Turbo Molecular Pumps

IEEE transactions on semiconductor manufacturing, 2015-08, Vol.28 (3), p.253-259

2015

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Materials Informatics for Process and Material Co-optimization

2018 International Symposium on Semiconductor Manufacturing (ISSM), 2018, p.1-3

2018

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Impact of Cation Vacancies on Leakage Current on TiN/ZrO2/TiN Capacitors Studied by Positron Annihilation

2022 International Symposium on Semiconductor Manufacturing (ISSM), 2022, p.1-4

2022

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Visualization technique of maintenance work with a motion capture sensor

2016 International Symposium on Semiconductor Manufacturing (ISSM), 2016, p.1-4

2016

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Technology to Watch and Control Particles in Vacuum Processing Equipment

Journal of the Vacuum Society of Japan, 2010, Vol.53(10), pp.561-567

2010

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New method of particle management by high-sensitivity ISPM

2011 e-Manufacturing & Design Collaboration Symposium & International Symposium on Semiconductor Manufacturing (eMDC & ISSM), 2011, p.1-11

2011

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Systematic Search for Stabilizing Dopants in ZrO2 and HfO2 Using First-Principles Calculations

2022 International Symposium on Semiconductor Manufacturing (ISSM), 2022, p.1-3

2022

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真空プロセス装置におけるパーティクル監視・制御技術

Journal of the Vacuum Society of Japan, 2010, Vol.53(10), pp.561-567

2010

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Minute-particle reduction by applying thermophoresis to semiconductor production equipment

2008 International Symposium on Semiconductor Manufacturing (ISSM), 2008, p.365-368

2008

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Global Drug Development Based on ICH-E5 Guideline

Yakubutsu dōtai = Xenobiotic metabolism and disposition, 2000, Vol.15 (4), p.381-385

MATSUI, Hidefumi

2000

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Contamination control of particles smaller than 40 nm by thermophoretic force

2007 International Symposium on Semiconductor Manufacturing, 2007, p.1-4

2007

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Using electrostatic repulsion to prevent adhesion of infinitesimal particles

2007 International Symposium on Semiconductor Manufacturing, 2007, p.1-4

2007

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Comments on guidance for clinical drug disposition tests from a viewpoint of drug development

Yakubutsu dōtai = Xenobiotic metabolism and disposition, 2000, Vol.15 (supplement), p.150-151

MATSUI, Hidefumi

2000

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Renal Tubular Mechanisms for Excretion of Cefpiramide (SM-1652) in Association with Its Long-Lasting Pharmacokinetic Properties

Journal of Pharmacobio-Dynamics, 1988, Vol.11(2), pp.67-73

1988

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Lactol Esters of Ampicillin

Chemical and Pharmaceutical Bulletin, 1976/01/25, Vol.24(1), pp.102-107

1976

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Materials Informatics for Process and Material Co-Optimization

Phase control of heterogeneous HfxZr(1−x)O2 thin films by machine learning

Phase control of heterogeneous Hf x Zr (1−x) O 2 thin films by machine learning

Phase control of heterogeneous Hf x Zr(1−x)O2 thin films by machine learning

Vacancy-Type Defects Introduced by Gas Cluster Ion-Implantation on Si Studied by Monoenergetic Positron Beams

Vacancy-type defects in TiN/ZrO2/TiN capacitors probed by monoenergetic positron beams

Vacancy-Type Defects Introduced by Gas Cluster Ion-Implantation on Si Studied by Monoenergetic Positron Beams

Finite temperature effects on the structural stability of Si-doped HfO2 using first-principles calculations

Systematic search for stabilizing dopants in ZrO2 and HfO2 using first-principles calculations

Using an Optical Motion Sensor for Visualization and Analysis of Maintenance Work on Semiconductor Manufacturing Equipment

Observation and Elimination of Recoil Particles From Turbo Molecular Pumps

Materials Informatics for Process and Material Co-optimization

Impact of Cation Vacancies on Leakage Current on TiN/ZrO2/TiN Capacitors Studied by Positron Annihilation

Visualization technique of maintenance work with a motion capture sensor

Technology to Watch and Control Particles in Vacuum Processing Equipment

New method of particle management by high-sensitivity ISPM

Systematic Search for Stabilizing Dopants in ZrO2 and HfO2 Using First-Principles Calculations

真空プロセス装置におけるパーティクル監視・制御技術

Minute-particle reduction by applying thermophoresis to semiconductor production equipment

Global Drug Development Based on ICH-E5 Guideline

Contamination control of particles smaller than 40 nm by thermophoretic force

Using electrostatic repulsion to prevent adhesion of infinitesimal particles

Comments on guidance for clinical drug disposition tests from a viewpoint of drug development

Renal Tubular Mechanisms for Excretion of Cefpiramide (SM-1652) in Association with Its Long-Lasting Pharmacokinetic Properties

Lactol Esters of Ampicillin

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