UB Paderborn / Katalog / Suche / in CDI

Sortiert nach

Einfacher Volltextzugriff von (fast) überall

Installieren Sie die LibKey Nomad-Browsererweiterung und erhalten Sie von vielen Webseiten einfachen Zugriff auf lizenzierte Volltexte oder Open Access Publikationen. Mehr erfahren...

Experimental Demonstration of an Electrostatic Orbital Angular Momentum Sorter for Electron Beams

Physical review letters, 2021-03, Vol.126 (9), p.094802-094802, Article 094802

2021

Volltextzugriff (PDF)

Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators

Sensors and actuators. A. Physical., 2016-03, Vol.239, p.90-101

2016

Volltextzugriff (PDF)

Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators

Semiconductor science and technology, 2016-06, Vol.31 (8), p.84001

2016

Volltextzugriff (PDF)

Phonon scattering enhancement in silicon nanolayers

Journal of materials science, 2013-04, Vol.48 (7), p.2779-2784

2013

Volltextzugriff (PDF)

Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators

Journal of microelectromechanical systems, 2020-02, Vol.29 (1), p.117-128

2020

Volltextzugriff (PDF)

Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer

Solid-state electronics, 2018-10, Vol.148, p.27-34

2018

Volltextzugriff (PDF)

Stress Fields Distribution and Simulation in 3C-SiC Resonators

Key engineering materials, 2024-08, Vol.984, p.41-45

2024

Volltextzugriff (PDF)

Fabrication of Wafer-Level Vacuum-Packaged 3C-SiC Resonant Microstructures Grown on and Silicon

Key engineering materials, 2024-08, Vol.984, p.29-33

2024

Volltextzugriff (PDF)

Fabrication of capacitive absolute pressure sensors by thin film vacuum encapsulation on SOI substrates

Journal of micromechanics and microengineering, 2016-09, Vol.26 (9), p.95018

2016

Volltextzugriff (PDF)

Nitridation of the SiO2/SiC Interface by N+ Implantation: Hall versus Field Effect Mobility in n-Channel Planar 4H-SiC MOSFETs

Materials science forum, 2010-04, Vol.645-648, p.491-494

2010

Volltextzugriff (PDF)

Correlation between Q-Factor and Residual Stress in Epitaxial 3C-SiC Double-Clamped Beam Resonators

Materials science forum, 2023-05, Vol.1089, p.57-61

2023

Volltextzugriff (PDF)

Residual Stress Measurement by Raman on Surface-Micromachined Monocrystalline 3C-SiC on Silicon on insulator

Materials science forum, 2022-05, Vol.1062, p.320-324

2022

Volltextzugriff (PDF)

Design and fabrication of high performance condenser microphone using C-slotted diaphragm

Microsystem technologies : sensors, actuators, systems integration, 2018-07, Vol.24 (7), p.3133-3140

2018

Volltextzugriff (PDF)

Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on and Silicon

Micromachines (Basel), 2021-09, Vol.12 (9), p.1072

2021

Volltextzugriff (PDF)

Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on 111> and 100> Silicon

Micromachines (Basel), 2021-09, Vol.12 (9), p.1072

2021

Volltextzugriff (PDF)

Autonomous robotic system for tunnel structural inspection and assessment

International journal of intelligent robotics and applications Online, 2018-03, Vol.2 (1), p.43-66

2018

Volltextzugriff (PDF)

Micro-Opto-Mechanical sensors for tactile width measurements of surface opening cracks in concrete

2017 IEEE SENSORS, 2017, p.1-3

2017

Volltextzugriff (PDF)

Hetero-Epitaxial Single Crystal 3C-SiC Opto-Mechanical Pressure Sensor

Materials science forum, 2015-06, Vol.821-823, p.902-905

2015

Volltextzugriff (PDF)

Sensitivity Enhancement in Vacuum Packaged Resonant MEMS Strain Sensors with On-Chip Strain Amplification Mechanism

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, p.1215-1218

2021

Volltextzugriff (PDF)

Epitaxial Growth, Mechanical, Electrical Properties of SiC/Si and SiC/Poli-Si

Materials science forum, 2012-05, Vol.717-720, p.897-900

2012

Volltextzugriff (PDF)

Development of Weighing Systems with Improved Dynamic Range Using High-Resolution Resonant MEMS Strain Sensors

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, p.1331-1334

2021

Volltextzugriff (PDF)

Large Strain Measurements by Vacuum-Packaged Mems Resonators Manufactured on Ultrathin Silicon Chips

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, p.2009-2012

2019

Volltextzugriff (PDF)

Design, modeling, and fabrication of crab-shape capacitive microphone using silicon-on-isolator wafer

Journal of micro/nanolithography, MEMS, and MOEMS, 2018-01, Vol.17 (1), p.1

2018

Volltextzugriff (PDF)

Design study of micromachined thermal emitters for NDIR gas sensing in the 9-12 μm wavelength range

2007 IEEE Sensors, 2007, p.181-184

2007

Volltextzugriff (PDF)

Acoustic Micro-Opto-Mechanical Transducers for Crack Width Measurement on Concrete Structures from Aerial Robots

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, p.893-896

2019

Volltextzugriff (PDF)

1 – 25 von 37

Suche als RSS-Feed

Suchergebnisse filtern

Filter anzeigen

Nur zeigen

Geprüft (Peer-Review)
(26)
Mit Volltextzugriff
(27)

Publikationsform

Sprache

Englisch
(36)

Erscheinungsjahr

n.n

Thema

Science & Technology
(22)
Technology
(16)
Engineering
(13)
Engineering, Electrical & Electronic
(12)
Physical Sciences
(10)
Instruments & Instrumentation
(8)
Mems
(8)
Physics
(7)
Silicon
(7)
Sensors
(6)
Microelectromechanical Systems
(5)
Nanoscience & Nanotechnology
(5)
Physics, Applied
(5)
Science & Technology - Other Topics
(5)
3c-Sic
(4)
Life Sciences & Biomedicine
(4)
Materials Science
(4)
Materials Science, Multidisciplinary
(4)
Micromechanical Devices
(4)
Resonators
(4)

15 weitere anzeigen...

Weniger anzeigen...

Zeitschrift / Serie

5 weitere anzeigen...

Weniger anzeigen...

Neu hinzugefügt

... seit 30 Tagen
(1)
... seit 90 Tagen
(3)

Menü

Weitere Dienste

Einstellungen

Experimental Demonstration of an Electrostatic Orbital Angular Momentum Sorter for Electron Beams

Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators

Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators

Phonon scattering enhancement in silicon nanolayers

Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators

Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer

Stress Fields Distribution and Simulation in 3C-SiC Resonators

Fabrication of Wafer-Level Vacuum-Packaged 3C-SiC Resonant Microstructures Grown on and Silicon

Fabrication of capacitive absolute pressure sensors by thin film vacuum encapsulation on SOI substrates

Nitridation of the SiO2/SiC Interface by N+ Implantation: Hall versus Field Effect Mobility in n-Channel Planar 4H-SiC MOSFETs

Correlation between Q-Factor and Residual Stress in Epitaxial 3C-SiC Double-Clamped Beam Resonators

Residual Stress Measurement by Raman on Surface-Micromachined Monocrystalline 3C-SiC on Silicon on insulator

Design and fabrication of high performance condenser microphone using C-slotted diaphragm

Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on and Silicon

Measurement of Residual Stress and Young’s Modulus on Micromachined Monocrystalline 3C-SiC Layers Grown on 111> and 100> Silicon

Autonomous robotic system for tunnel structural inspection and assessment

Micro-Opto-Mechanical sensors for tactile width measurements of surface opening cracks in concrete

Hetero-Epitaxial Single Crystal 3C-SiC Opto-Mechanical Pressure Sensor

Sensitivity Enhancement in Vacuum Packaged Resonant MEMS Strain Sensors with On-Chip Strain Amplification Mechanism

Epitaxial Growth, Mechanical, Electrical Properties of SiC/Si and SiC/Poli-Si

Development of Weighing Systems with Improved Dynamic Range Using High-Resolution Resonant MEMS Strain Sensors

Large Strain Measurements by Vacuum-Packaged Mems Resonators Manufactured on Ultrathin Silicon Chips

Design, modeling, and fabrication of crab-shape capacitive microphone using silicon-on-isolator wafer

Design study of micromachined thermal emitters for NDIR gas sensing in the 9-12 μm wavelength range

Acoustic Micro-Opto-Mechanical Transducers for Crack Width Measurement on Concrete Structures from Aerial Robots

Suchergebnisse filtern