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Sensors and actuators. A. Physical., 2020-05, Vol.306, p.111960, Article 111960
2020
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Surface & coatings technology, 2013-09, Vol.231, p.337-345
2013
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Journal of micromechanics and microengineering, 2020-05, Vol.30 (5), p.55006
2020
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Journal of micromechanics and microengineering, 2021-10, Vol.31 (10), p.105003
2021
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Journal of micromechanics and microengineering, 2023-07, Vol.33 (7), p.74001
2023
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IEEE sensors journal, 2012-12, Vol.12 (12), p.3301-3308
2012
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Journal of micromechanics and microengineering, 2020-12, Vol.30 (12), p.125009
2020
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2021 IEEE Sensors, 2021, p.1-4
2021
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2019 IEEE SENSORS, 2019, p.1-4
2019
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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, p.230-233
2021
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023, p.123-126
2023
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2012 IEEE Sensors, 2012, p.1-4
2012
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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), 2024, p.97-100
2024
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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, p.546-549
2020
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 2023, p.685-688
2023
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2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 2021, p.83-84
2021
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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015, p.1085-1088
2015
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2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022, p.523-526
2022
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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, p.845-848
2020
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2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019, p.767-770
2019
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2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018, p.1064-1067
2018
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2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019, p.775-778
2019
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2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017, p.1171-1174
2017
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2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, p.118-121
2020
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2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, p.1584-1587
2019
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