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Amorphous ternary rare-earth gate oxides for future integration in MOSFETs

Microelectronic engineering, 2009-07, Vol.86 (7), p.1646-1649

2009

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La-based ternary rare-earth oxides as alternative high- κ dielectrics

Microelectronic engineering, 2007-09, Vol.84 (9), p.1890-1893

2007

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Adjustable hydrogen atom incorporation into sputter deposited a-SiC

Thin solid films, 2006-10, Vol.515 (2), p.464-467

2006

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Aspects of the theoretical description of ballistic atomic mixing

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1985-01, Vol.7, p.684-693

Littmark, U.

1985

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Effects of annealing on the electrical and interfacial properties of amorphous lanthanum scandate high- κ films prepared by molecular beam deposition

Journal of applied physics, 2007-05, Vol.101 (10), p.104109-104109-5

2007

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Isotopic labeling study of oxygen diffusion in amorphous LaScO3 high-κ films on Si(100) and its effects on the electrical characteristics

Applied physics. A, Materials science & processing, 2009-08, Vol.96 (2), p.447-451

2009

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Isotopic labeling study of oxygen diffusion in amorphous LaScO3 high-k films on Si(100) and its effects on the electrical characteristics

Applied physics. A, Materials science & processing, 2009-08, Vol.96 (2), p.447-451

2009

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A simple and compact retarding field energy analyzer for the characterization of broad ion beams of low energy

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1991-06, Vol.58 (2), p.260-265

1991

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Isotopic labeling study of oxygen diffusion in amorphous LaSc03 high-κ films on Si(100) and its effects on the electrical characteristics

Applied physics. A, Materials science & processing, 2009, Vol.96 (2), p.447-451

2009

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Effects of annealing on the electrical and interfacial properties of amorphous lanthanum scandate high-{kappa} films prepared by molecular beam deposition

Journal of applied physics, 2007-05, Vol.101 (10)

2007

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Modelling of ballistic low energy ion solid interaction — conventional analytic theories versus computer simulations

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1994-05, Vol.90 (1), p.202-211

Littmark, Uffe

1994

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Depth profiling of the C/Si interface

Canadian journal of physics, 1993-11, Vol.71 (11-12), p.578-581

1993

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Momentum deposition by heavy-ion bombardment and an application to sputtering

Journal of physics. D, Applied physics, 1975-02, Vol.8 (3), p.241-245

1975

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Energy reflection coefficients for 5–10 keV He ions incident on Au, Ag and Cu

Journal of nuclear materials, 1978-09, Vol.76, p.359-364

1978

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Inversion of total cross sections for repulsive ion-atom scattering in the classical regime II

Physica, 1974-11, Vol.77 (3), p.619-622

Littmark, U.

1974

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Implantation profiles of low-energy helium in niobium and the blistering mechanism

Applied physics letters, 1975-08, Vol.27 (4), p.199-201

1975

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Carbon diffusion from a-C : H coatings into the bulk of the TEXTOR liner

Journal of nuclear materials, 1989-04, Vol.162, p.881-886

1989

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Characterization of films deposited by in-situ wall carbonization in TEXTOR

Journal of nuclear materials, 1987-02, Vol.145, p.651-654

1987

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Theoretical concepts ofion implementation,recoil implantation and ion bean mixing

Vacuum, 1991, Vol.42 (1), p.169-171

Littmark, U

1991

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Energy and dose dependence of ion beam mixing of Cu and W

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1986, Vol.18 (1-6), p.54-58

1986

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Thermal shock and thermal cycling behaviour of amorphous a-C:H films on molybdenum substrates

Journal of nuclear materials, 1988-07, Vol.155, p.273-277

1988

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Morphological effects induced by the formation of a Pt-adatom lattice gas on Pt(111)

Surface science, 1992, Vol.272 (1), p.204-210

1992

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Martensite transformation in antimony implanted stainless steel

Philosophical magazine. A, Physics of condensed matter. Defects and mechanical properties, 1982-05, Vol.45 (5), p.803-821

1982

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Influence of surface morphology on the angular distribution and total yield of copper sputtered by energetic argon ions

Applied physics letters, 1980-04, Vol.36 (7), p.531-533

1980

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Energy spectra of light ions backscattered from random solids

Applied Physics, 1978-07, Vol.16 (3), p.247-253

1978

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Amorphous ternary rare-earth gate oxides for future integration in MOSFETs

La-based ternary rare-earth oxides as alternative high- κ dielectrics

Adjustable hydrogen atom incorporation into sputter deposited a-SiC

Aspects of the theoretical description of ballistic atomic mixing

Effects of annealing on the electrical and interfacial properties of amorphous lanthanum scandate high- κ films prepared by molecular beam deposition

Isotopic labeling study of oxygen diffusion in amorphous LaScO3 high-κ films on Si(100) and its effects on the electrical characteristics

Isotopic labeling study of oxygen diffusion in amorphous LaScO3 high-k films on Si(100) and its effects on the electrical characteristics

A simple and compact retarding field energy analyzer for the characterization of broad ion beams of low energy

Isotopic labeling study of oxygen diffusion in amorphous LaSc03 high-κ films on Si(100) and its effects on the electrical characteristics

Effects of annealing on the electrical and interfacial properties of amorphous lanthanum scandate high-{kappa} films prepared by molecular beam deposition

Modelling of ballistic low energy ion solid interaction — conventional analytic theories versus computer simulations

Depth profiling of the C/Si interface

Momentum deposition by heavy-ion bombardment and an application to sputtering

Energy reflection coefficients for 5–10 keV He ions incident on Au, Ag and Cu

Inversion of total cross sections for repulsive ion-atom scattering in the classical regime II

Implantation profiles of low-energy helium in niobium and the blistering mechanism

Carbon diffusion from a-C : H coatings into the bulk of the TEXTOR liner

Characterization of films deposited by in-situ wall carbonization in TEXTOR

Theoretical concepts ofion implementation,recoil implantation and ion bean mixing

Energy and dose dependence of ion beam mixing of Cu and W

Thermal shock and thermal cycling behaviour of amorphous a-C:H films on molybdenum substrates

Morphological effects induced by the formation of a Pt-adatom lattice gas on Pt(111)

Martensite transformation in antimony implanted stainless steel

Influence of surface morphology on the angular distribution and total yield of copper sputtered by energetic argon ions

Energy spectra of light ions backscattered from random solids

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