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Tunable phase and electrical characteristics induced by Al content in Zr1−xAlxN films for temperature sensors with wide temperature range

Applied physics letters, 2024-10, Vol.125 (15)

2024

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NTC thin film temperature sensors for cryogenics region with high sensitivity and thermal stability

Applied physics letters, 2018-09, Vol.113 (13)

2018

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A Piezoelectric MEMS Speaker with a Combined Function of a Silent Alarm

Micromachines (Basel), 2023-03, Vol.14 (3), p.702

2023

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A flexible neural implant with ultrathin substrate for low-invasive brain–computer interface applications

Microsystems & nanoengineering, 2022-12, Vol.8 (1), p.133-133, Article 133

2022

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Chip-Scale Silicon Ring Resonators for Cryogenic Temperature Sensing

Journal of lightwave technology, 2020-10, Vol.38 (20), p.5768-5773

2020

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Stability of silicon resonator temperature sensors with the Pound-Drever-Hall technique

Optics letters, 2023-02, Vol.48 (4), p.924-927

2023

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CrOxNy Thin Film Temperature Sensors for High-Precision Cryogenic Measurement in Strong Magnetic Field

IEEE electron device letters, 2023-04, Vol.44 (4), p.658-661

2023

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CrO x N y Thin Film Temperature Sensors for High-Precision Cryogenic Measurement in Strong Magnetic Field

IEEE electron device letters, 2023-04, Vol.44 (4), p.658-661

2023

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Tunable phase and electrical characteristics induced by Al content in Zr1 − x Al x N films for temperature sensors with wide temperature range

Applied physics letters, 2024-10, Vol.125 (15)

2024

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Wide-range and ultra-low temperature thermometer based on a silicon resonator

Optics letters, 2024-11, Vol.49 (21), p.6101

2024

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Effect of Substrate Temperature on Temperature Sensitivity and Magnetoresistance of CrOxNy Thin Film Cryogenic Sensor

IEEE sensors journal, 2024-08, Vol.24 (16), p.25354-25359

2024

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The mechanism of phase transition induced by oxygen doping in zirconium nitride thin films

Journal of materials science, 2022-10, Vol.57 (39), p.18456-18467

2022

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A robust HD-sEMG sensor suitable for convenient acquisition of muscle activity in clinical post-stroke dysphagia

Journal of neural engineering, 2023-02, Vol.20 (1), p.16018

2023

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Fabrication and characterization of aluminum nitride polymer matrix composites with high thermal conductivity and low dielectric constant for electronic packaging

Materials science & engineering. B, Solid-state materials for advanced technology, 2012-06, Vol.177 (11), p.892-896

2012

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Tunable sensitivity of zirconium oxynitride thin-film temperature sensor modulated by film thickness

Journal of materials science. Materials in electronics, 2022-09, Vol.33 (26), p.20940-20952

2022

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High precision temperature measurement for cryogenic temperature sensors based on deep learning technology

Cryogenics (Guildford), 2024-06, Vol.140, p.103830, Article 103830

2024

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Effect of Substrate Temperature on Temperature Sensitivity and Magnetoresistance of CrO x N y Thin Film Cryogenic Sensor

IEEE sensors journal, 2024-08, Vol.24 (16), p.25354-25359

2024

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Chip-scale humidity sensor based on a silicon nanobeam cavity

Optics letters, 2019-11, Vol.44 (21), p.5322-5325

2019

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The electronics transport mechanism of grain and grain boundary in semiconductive hafnium oxynitride thin film

Journal of materials science, 2020-03, Vol.55 (7), p.2881-2890

2020

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Multifunctional Microelectrode for Low-Voltage Pulsed Field Ablation in Atrial Fibrillation

IEEE electron device letters, 2022-11, Vol.43 (11), p.1-1

2022

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Thin film resistance thermometer with simple package for cryogenic application

Cryogenics (Guildford), 2020-01, Vol.105, p.102997, Article 102997

2020

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An ultrathin low-invasive flexible probe for accurate neural stimulating

IEEE electron device letters, 2022-11, Vol.43 (11), p.1-1

2022

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The conduction process of grain and grain boundary in the semiconductive zirconium oxynitride thin film

Semiconductor science and technology, 2019-08, Vol.34 (8), p.85008

2019

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Development of a high throughput micro-heater array with controllable temperature for each heating unit

Microsystem technologies : sensors, actuators, systems integration, 2020-03, Vol.26 (3), p.787-792

2020

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A Super-Adhesive and Electromagnetically Shielded Flexible Chip-Selectable and Selectable Wearable HD-sEMG Sensor

IEEE sensors journal, 2024-05, Vol.24 (9), p.15187-15196

2024

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Tunable phase and electrical characteristics induced by Al content in Zr1−xAlxN films for temperature sensors with wide temperature range

NTC thin film temperature sensors for cryogenics region with high sensitivity and thermal stability

A Piezoelectric MEMS Speaker with a Combined Function of a Silent Alarm

A flexible neural implant with ultrathin substrate for low-invasive brain–computer interface applications

Chip-Scale Silicon Ring Resonators for Cryogenic Temperature Sensing

Stability of silicon resonator temperature sensors with the Pound-Drever-Hall technique

CrOxNy Thin Film Temperature Sensors for High-Precision Cryogenic Measurement in Strong Magnetic Field

CrO x N y Thin Film Temperature Sensors for High-Precision Cryogenic Measurement in Strong Magnetic Field

Tunable phase and electrical characteristics induced by Al content in Zr1 − x Al x N films for temperature sensors with wide temperature range

Wide-range and ultra-low temperature thermometer based on a silicon resonator

Effect of Substrate Temperature on Temperature Sensitivity and Magnetoresistance of CrOxNy Thin Film Cryogenic Sensor

The mechanism of phase transition induced by oxygen doping in zirconium nitride thin films

A robust HD-sEMG sensor suitable for convenient acquisition of muscle activity in clinical post-stroke dysphagia

Fabrication and characterization of aluminum nitride polymer matrix composites with high thermal conductivity and low dielectric constant for electronic packaging

Tunable sensitivity of zirconium oxynitride thin-film temperature sensor modulated by film thickness

High precision temperature measurement for cryogenic temperature sensors based on deep learning technology

Effect of Substrate Temperature on Temperature Sensitivity and Magnetoresistance of CrO x N y Thin Film Cryogenic Sensor

Chip-scale humidity sensor based on a silicon nanobeam cavity

The electronics transport mechanism of grain and grain boundary in semiconductive hafnium oxynitride thin film

Multifunctional Microelectrode for Low-Voltage Pulsed Field Ablation in Atrial Fibrillation

Thin film resistance thermometer with simple package for cryogenic application

An ultrathin low-invasive flexible probe for accurate neural stimulating

The conduction process of grain and grain boundary in the semiconductive zirconium oxynitride thin film

Development of a high throughput micro-heater array with controllable temperature for each heating unit

A Super-Adhesive and Electromagnetically Shielded Flexible Chip-Selectable and Selectable Wearable HD-sEMG Sensor

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