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Application of inverse problem algorithm for temperature uniformity in rapid thermal processing

Thin solid films, 2002, Vol.402 (1), p.280-289

2002

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Thermal uniformity of 12-in silicon wafer during rapid thermal processing by inverse heat transfer method

IEEE transactions on semiconductor manufacturing, 2000-11, Vol.13 (4), p.448-456

2000

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Thermal uniformity of 12-in silicon wafer in linearly ramped-temperature transient rapid thermal processing

IEEE transactions on semiconductor manufacturing, 2001-05, Vol.14 (2), p.143-151

2001

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Effect of diatomic islands on step morphological stability of a terrace edge in molecular beam epitaxy

Thin solid films, 1999-09, Vol.353 (1), p.174-181

1999

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Nonlinear diffusion-induced stresses in a long bar of square cross section

International journal of solids and structures, 1999, Vol.36 (2), p.269-284

1999

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Unsteady thermoelastic analysis of dislocation generation during Czochralski crystal growth

Journal of crystal growth, 1995-04, Vol.149 (1), p.147-152

1995

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On the nonlinear dynamic process in Czochralski crystal growth

Journal of crystal growth, 1995-02, Vol.147 (3), p.390-398

1995

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Effects of wall conduction and interface thermal resistance on the phase-change problem

International journal of heat and mass transfer, 1994, Vol.37 (13), p.1849-1855

1994

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Non-Fourier heat conduction with radiation in an absorbing, emitting, and isotropically scattering medium

Journal of quantitative spectroscopy & radiative transfer, 2002-06, Vol.73 (6), p.571-582

2002

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USING INVERSE MODELING TO ESTIMATE THE INCIDENT HEAT FLUX REQUIRED TO ACHIEVE TEMPERATURE UNIFORMITY ACROSS A CIRCULAR DISK

Microscale thermophysical engineering, 2000-10, Vol.4 (4), p.245-260

Chu, Senpuu Lin, Hsin-Sen

2000

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Erratum to “Effect of diatomic islands on step morphological stability of a terrace edge in molecular beam epitaxy” [Thin Solid Films 353 (1999) 174–181]

Thin solid films, 2000, Vol.359 (2), p.294-294

2000

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Nonlinear effect of self-induced electric field on diffusion-induced stresses

Journal of applied physics, 1995-12, Vol.78 (12), p.7035-7039

1995

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The nonlinear Czochralski growing process of crystals with variable thermal properties

International journal of heat and mass transfer, 1997, Vol.40 (2), p.447-459

1997

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Application of inverse problem algorithm for temperature uniformity in rapid thermal processing

Thermal uniformity of 12-in silicon wafer during rapid thermal processing by inverse heat transfer method

Thermal uniformity of 12-in silicon wafer in linearly ramped-temperature transient rapid thermal processing

Effect of diatomic islands on step morphological stability of a terrace edge in molecular beam epitaxy

Nonlinear diffusion-induced stresses in a long bar of square cross section

Unsteady thermoelastic analysis of dislocation generation during Czochralski crystal growth

On the nonlinear dynamic process in Czochralski crystal growth

Effects of wall conduction and interface thermal resistance on the phase-change problem

Non-Fourier heat conduction with radiation in an absorbing, emitting, and isotropically scattering medium

USING INVERSE MODELING TO ESTIMATE THE INCIDENT HEAT FLUX REQUIRED TO ACHIEVE TEMPERATURE UNIFORMITY ACROSS A CIRCULAR DISK

Erratum to “Effect of diatomic islands on step morphological stability of a terrace edge in molecular beam epitaxy” [Thin Solid Films 353 (1999) 174–181]

Nonlinear effect of self-induced electric field on diffusion-induced stresses

The nonlinear Czochralski growing process of crystals with variable thermal properties

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