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Effects of phosphoric acid stabilizer on copper and tantalum nitride CMP

Materials letters, 2003-11, Vol.57 (29), p.4601-4604

2003

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Agglomeration characteristic of particles in alumina slurry by addition of chemicals and milling process for Cu CMP

Materials science & engineering. B, Solid-state materials for advanced technology, 2005-04, Vol.118 (1), p.306-309

2005

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Electrochemical Patterning of Copper Using Microcontact Printing

Journal of the Electrochemical Society, 2004, Vol.151 (7), p.C455

2004

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H3PO4 addition to slurry for Cu and TaN CMP

Electronics letters, 2003-05, Vol.39 (9), p.718

2003

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Semi-abrasive free slurry with acid colloidal silica for copper chemical mechanical planarization

Journal of materials science. Materials in electronics, 2005-09, Vol.16 (9), p.629-632

2005

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Efficacy of sonic-powered toothbrushes for plaque removal in patients with peri-implant mucositis

Journal of periodontal & implant science, 2015, Vol.45 (2), p.56-61

2015

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Uniformity and Sheet Resistance of Flat Polysilicon by Experimental Approach

Journal of the Korean Physical Society, 2004, 45(3), , pp.630-632

2004

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STI 28nm pitch guided DSA to enable the 450mm tools qualification and transition

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2016, p.237-242

2016

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Efficacy of sonic-powered toothbrushes for plaque removal in patients with peri-implant mucositis

Journal of Periodontal & Implant Science, 2015, 45(2), , pp.56-61

2015

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Regular Paper : Roles of Phosphoric Acid in Slurry for Cu and TaN CMP

Transactions on electrical and electronic materials, 2003-04, Vol.4 (2), p.1

2003

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Chemical Mechanical Planarization Technology for Si Wafer Bonding

ECS transactions, 2010, Vol.33 (10), p.153-156

2010

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Roles of Phosphoric Acid in Slurry for Cu and TaN CMP

Transactions on Electrical and Electronic Materials, 2003, 4(2), , pp.1-4

2003

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H sub( 3)PO sub( 4) addition to slurry for Cu and TaN CMP

Electronics letters, 2003-05, Vol.39 (9), p.1-1

2003

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H^sub 3^PO^sub 4^ addition to slurry for Cu and TaN CMP

Electronics letters, 2003-05, Vol.39 (9), p.1

2003

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Roles of Phosphoric Acid in Slurry for Cu and TaN CMP

Transactions on electrical and electronic materials, 2003-04, Vol.4 (2), p.1-4

2003

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A Transparent Nanopatterned Chemiresistor: Visible‐Light Plasmonic Sensor for Trace‐Level NO2 Detection at Room Temperature

Small (Weinheim an der Bergstrasse, Germany), 2021-05, Vol.17 (20), p.n/a

2021

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Towards an efficient anode material for Li-ion batteries: understanding the conversion mechanism of nickel hydroxy chloride with Li- ions

Journal of materials chemistry. A, Materials for energy and sustainability, 2020-01, Vol.8 (4), p.1939-1946

2020

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Metal–Organic Framework-Derived Hollow Hierarchical Co3O4 Nanocages with Tunable Size and Morphology: Ultrasensitive and Highly Selective Detection of Methylbenzenes

ACS applied materials & interfaces, 2018-03, Vol.10 (10), p.8860-8868

2018

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2D metal-organic framework derived co-loading of Co3O4 and PdO nanocatalysts on In2O3 hollow spheres for tailored design of high-performance breath acetone sensors

Sensors and actuators. B, Chemical, 2020-12, Vol.325, p.128821, Article 128821

2020

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Machine learning-based discrimination of indoor pollutants using an oxide gas sensor array: High endurance against ambient humidity and temperature

Sensors and actuators. B, Chemical, 2022-08, Vol.364, p.131894, Article 131894

2022

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Visible light assisted NO2 sensing at room temperature by CdS nanoflake array

Sensors and actuators. B, Chemical, 2018-02, Vol.255, p.2963-2970

2018

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Metal oxide patterns of one-dimensional nanofibers: on-demand, direct-write fabrication, and application as a novel platform for gas detection

Journal of materials chemistry. A, Materials for energy and sustainability, 2019, Vol.7 (43), p.24919-24928

2019

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Pure and Pr-doped Ce4W9O33 with superior hydroxyl scavenging ability: humidity-independent oxide chemiresistors

Journal of materials chemistry. A, Materials for energy and sustainability, 2021-08, Vol.9 (30), p.16359-16369

2021

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One-dimensional In2O3 nanofibers patterned onto functionalized catalytic electrodes: A novel approach for selective xylene detection

Sensors and actuators. B, Chemical, 2023-05, Vol.382, p.133494, Article 133494

2023

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Selective dual detection of hydrogen sulfide and methyl mercaptan using CuO/CuFe2O4 nanopattern chemiresistors

Sensors and actuators. B, Chemical, 2021-12, Vol.348, p.130665, Article 130665

2021

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Effects of phosphoric acid stabilizer on copper and tantalum nitride CMP

Agglomeration characteristic of particles in alumina slurry by addition of chemicals and milling process for Cu CMP

Electrochemical Patterning of Copper Using Microcontact Printing

H3PO4 addition to slurry for Cu and TaN CMP

Semi-abrasive free slurry with acid colloidal silica for copper chemical mechanical planarization

Efficacy of sonic-powered toothbrushes for plaque removal in patients with peri-implant mucositis

Uniformity and Sheet Resistance of Flat Polysilicon by Experimental Approach

STI 28nm pitch guided DSA to enable the 450mm tools qualification and transition

Efficacy of sonic-powered toothbrushes for plaque removal in patients with peri-implant mucositis

Regular Paper : Roles of Phosphoric Acid in Slurry for Cu and TaN CMP

Chemical Mechanical Planarization Technology for Si Wafer Bonding

Roles of Phosphoric Acid in Slurry for Cu and TaN CMP

H sub( 3)PO sub( 4) addition to slurry for Cu and TaN CMP

H^sub 3^PO^sub 4^ addition to slurry for Cu and TaN CMP

Roles of Phosphoric Acid in Slurry for Cu and TaN CMP

A Transparent Nanopatterned Chemiresistor: Visible‐Light Plasmonic Sensor for Trace‐Level NO2 Detection at Room Temperature

Towards an efficient anode material for Li-ion batteries: understanding the conversion mechanism of nickel hydroxy chloride with Li- ions

Metal–Organic Framework-Derived Hollow Hierarchical Co3O4 Nanocages with Tunable Size and Morphology: Ultrasensitive and Highly Selective Detection of Methylbenzenes

2D metal-organic framework derived co-loading of Co3O4 and PdO nanocatalysts on In2O3 hollow spheres for tailored design of high-performance breath acetone sensors

Machine learning-based discrimination of indoor pollutants using an oxide gas sensor array: High endurance against ambient humidity and temperature

Visible light assisted NO2 sensing at room temperature by CdS nanoflake array

Metal oxide patterns of one-dimensional nanofibers: on-demand, direct-write fabrication, and application as a novel platform for gas detection

Pure and Pr-doped Ce4W9O33 with superior hydroxyl scavenging ability: humidity-independent oxide chemiresistors

One-dimensional In2O3 nanofibers patterned onto functionalized catalytic electrodes: A novel approach for selective xylene detection

Selective dual detection of hydrogen sulfide and methyl mercaptan using CuO/CuFe2O4 nanopattern chemiresistors

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