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Plasma doping for the fabrication of ultra-shallow junctions

Surface & coatings technology, 2002-07, Vol.156 (1), p.229-236

2002

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Species-specific long range interactions between receptor/ligand pairs

Biophysical journal, 1995-07, Vol.69 (1), p.66-73

1995

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Optimization of extension doping technology for roll-off suppression of industrial 0.1-um pMOSFETs

30th European Solid-State Device Research Conference, 2000, p.400-403

2000

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An attempt to detect stable N- ions from a sputter ion source and some implications of the results for the design of tandems for ultra-sensitive carbon analysis

Revue de physique appliquée, 1977-01, Vol.12 (10), p.1487-1492

1977

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Three-stage acceleration system for high energy implanter

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1985, Vol.6 (1), p.258-263

1985

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Tungsten contamination in BF/sub 2/ implants

Proceedings of 11th International Conference on Ion Implantation Technology, 1996, p.135-138

1996

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A Treiman-Yang test for the pole approximation in 6Li(p, pd) 4He at 19 MeV

Nuclear physics. A, 1973-12, Vol.216 (2), p.335-348

1973

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Implant dosimetry results for plasma doping

2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432), 2000, p.492-495

2000

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Direct comparison of electrical performance of 0.1-/spl mu/m pMOSFETs doped by plasma doping or low energy ion implantation

2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432), 2000, p.468-471

2000

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Plasma doping system for 200 and 300 mm wafers

2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432), 2000, p.472-475

2000

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Contamination control in a pulsed plasma doping tool

2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432), 2000, p.500-503

2000

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Energy dependence of the cross sections for the [formula omitted] and the [formula omitted] reactions

Nuclear physics. A, 1975-02, Vol.239 (2), p.260-270

1975

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Plasma doping as a tool for the fabrication of ultra-shallow junctions

Extended Abstracts of the First International Workshop on Junction Technology (IEEE Cat. No.00EX464), 2000, p.23-27

2000

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Quasi-free scattering in the 6Li(d, dd) 4He reaction at low bombarding energies

Nuclear physics. A, 1973-11, Vol.215 (2), p.221-231

1973

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Process Control Issues in the Varian E1000 High Current Implanter

Ion Implantation Technology - 92, 1993, p.587-591

1993

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Variation in Trace Metal Concentrations along Single Hairs as Measured by Proton-induced X-ray Emission Photometry

Nature (London), 1973-06, Vol.243 (5409), p.543-544

1973

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The use of sputter-induced emission spectroscopy for the analysis of hydrogen in solids

Nuclear instruments & methods, 1978-01, Vol.149 (1), p.523-527

1978

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Organic scintillator neutron detector efficiency

Nuclear instruments & methods, 1973-08, Vol.111 (2), p.251-252

1973

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Methods of Energy Control during Discharge of Large Electrostatic Accelerators

IEEE transactions on nuclear science, 1971-01, Vol.18 (3), p.130-131

1971

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Junction geometries to improve power output of incoherent light from GaAs diodes

1963 International Electron Devices Meeting, 1963, p.80-80

1963

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CW operation of GaAs injection lasers

Proceedings of the IEEE, 1964-01, Vol.52 (10), p.1257-1258

1964

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Techniques for trace element analysis: x‐ray fluorescence, x‐ray excitation with protons, and flame atomic absorption

Medical physics (Lancaster), 1974-03, Vol.1 (2), p.68-71

1974

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( 16O, np) and ( 16O, nα) reactions on some light nuclei

Nuclear instruments & methods, 1974-01, Vol.122, p.533-542

1974

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L -shell x-ray production cross sections of Pd, Ag, and Sn for incident proton energies in the range 3-12 MeV and oxygen ions in the range 15-40 MeV

Physical review. A, General physics, 1975-07, Vol.12 (1), p.52-56

1975

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Organic scintillator neutron detector efficiency: A comparison of experimental results with predictions

Nuclear instruments & methods, 1973-01, Vol.111 (2), p.251-252

1973

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Plasma doping for the fabrication of ultra-shallow junctions

Species-specific long range interactions between receptor/ligand pairs

Optimization of extension doping technology for roll-off suppression of industrial 0.1-um pMOSFETs

An attempt to detect stable N- ions from a sputter ion source and some implications of the results for the design of tandems for ultra-sensitive carbon analysis

Three-stage acceleration system for high energy implanter

Tungsten contamination in BF/sub 2/ implants

A Treiman-Yang test for the pole approximation in 6Li(p, pd) 4He at 19 MeV

Implant dosimetry results for plasma doping

Direct comparison of electrical performance of 0.1-/spl mu/m pMOSFETs doped by plasma doping or low energy ion implantation

Plasma doping system for 200 and 300 mm wafers

Contamination control in a pulsed plasma doping tool

Energy dependence of the cross sections for the [formula omitted] and the [formula omitted] reactions

Plasma doping as a tool for the fabrication of ultra-shallow junctions

Quasi-free scattering in the 6Li(d, dd) 4He reaction at low bombarding energies

Process Control Issues in the Varian E1000 High Current Implanter

Variation in Trace Metal Concentrations along Single Hairs as Measured by Proton-induced X-ray Emission Photometry

The use of sputter-induced emission spectroscopy for the analysis of hydrogen in solids

Organic scintillator neutron detector efficiency

Methods of Energy Control during Discharge of Large Electrostatic Accelerators

Junction geometries to improve power output of incoherent light from GaAs diodes

CW operation of GaAs injection lasers

Techniques for trace element analysis: x‐ray fluorescence, x‐ray excitation with protons, and flame atomic absorption

( 16O, np) and ( 16O, nα) reactions on some light nuclei

L -shell x-ray production cross sections of Pd, Ag, and Sn for incident proton energies in the range 3-12 MeV and oxygen ions in the range 15-40 MeV

Organic scintillator neutron detector efficiency: A comparison of experimental results with predictions

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