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CMP characteristics of quartz glass substrate by aggregated colloidal ceria slurry

Precision engineering, 2019-11, Vol.60, p.458-464

2019

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Characteristics and effectiveness of the face gear with transmission-error-controlled curve considering the path of contact (Effect of assembly and manufacturing errors on transmission error)

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2023, Vol.17(2), pp.JAMDSM0024-JAMDSM0024

2023

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Meshing mechanism considering various combinations of assembly and manufacturing errors on face gear using a transmission-error-controlled curve

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2023, Vol.17(6), pp.JAMDSM0068-JAMDSM0068

2023

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Influence of waveform components derived from the transmission error of a face gear pair on a fishing reel based on tactile sensibility

Precision engineering, 2018-01, Vol.51, p.232-243

2018

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In-process tool flank wear identification in face milling using Holm's contacts theory

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2023, Vol.17(5), pp.JAMDSM0060-JAMDSM0060

2023

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Proposal of a face gear which generates virtual high mesh frequency by addition of grooves on the tooth flank, and the investigation via vibration simulator and actual samples

Precision engineering, 2017-01, Vol.47, p.321-332

2017

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Development of a large-scale multi-extrusion FDM printer, and its challenges

International Journal of Lightweight Materials and Manufacture, 2023-06, Vol.6 (2), p.198-213

2023

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Characteristic of SiC Slurry in Ultra Precision Lapping of Sapphire Substrates

International journal of precision engineering and manufacturing, 2021-06, Vol.22 (6), p.1021-1029

2021

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In-process tool wear detection by measuring the slip of AC induction motor in intermittent cutting process

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2021, Vol.15(1), pp.JAMDSM0011-JAMDSM0011

2021

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Pitting failure of helical gears induced by trochoidal interference and multidirectional, interacting wear

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2020, Vol.14(4), pp.JAMDSM0060-JAMDSM0060

2020

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Validity of quantifying sensation of fishing reel using transmission error instead of sensory human evaluation for face gear design

Mechanical Engineering Journal, 2019, Vol.6(6), pp.19-00318-19-00318

2019

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Polishing Characteristics of MnO2 Polishing Slurry on the Si-face of SiC Wafer

International journal of precision engineering and manufacturing, 2018-12, Vol.19 (12), p.1773-1780

2018

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The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP)

ECS journal of solid state science and technology, 2017-01, Vol.6 (4), p.P105-P112

2017

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Evaluation of Handle Rotational Feeling in Fishing Reel by Coordinate Measurement and Gear Transmission Error Measurement

Applied mechanics and materials, 2017-09, Vol.870, p.185-190

2017

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Influence of Coating in Square End Mill Using In-Process Tool Wear Detection Based on Electrical Contact Resistance

International journal of automation technology, 2019-01, Vol.13 (1), p.125-132

2019

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A Novel Particle Sizing Method for Nano Abrasives in CMP Slurry by Using Fluorescent Nano Probe

International journal of automation technology, 2017-09, Vol.11 (5), p.754-760

2017

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Nanoparticle sizing for poly-dispersed particles using Nanoparticle chip

Transactions of the JSME (in Japanese), 2020, Vol.86(892), pp.20-00220-20-00220

2020

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半導体プラナリゼーションCMP技術の展望

精密工学会誌, 2018/03/05, Vol.84(3), pp.213-216

黒河, 周平

2018

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Machinability of SMART Forging Process Materials in Intermittent Cutting: 2nd Report : Machinability in Normal Cutting Region and Selection of Optimum Cutting Condition

E3S Web of Conferences, 2019, Vol.95, p.1001

2019

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Surface Morphology Evolution Induced by Multiple Femtosecond Laser Ablation on 4H-SiC Substrate and Its Application to CMP

ECS journal of solid state science and technology, 2017, Vol.6 (12), p.P853-P861

2017

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Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate

International journal of automation technology, 2018-03, Vol.12 (2), p.187-198

2018

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Whole outline scanning measurement of internal gear by using CNC gear measuring machine

MATEC Web of Conferences, 2019, Vol.287, p.8001

2019

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A high quality surface finish grinding process to produce total reflection mirror for x-ray fluorescence analysis

International Journal of Extreme Manufacturing, 2020-03, Vol.2 (1), p.15101

2020

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In-Process Tool Wear Detection of Uncoated Square End Mill Based on Electrical Contact Resistance

International journal of automation technology, 2016-09, Vol.10 (5), p.767-772

2016

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Derivation of Path of Contact and Tooth Flank Modification by Minimizing Transmission Error on Face Gear

Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2012, Vol.6(1), pp.15-22

2012

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CMP characteristics of quartz glass substrate by aggregated colloidal ceria slurry

Characteristics and effectiveness of the face gear with transmission-error-controlled curve considering the path of contact (Effect of assembly and manufacturing errors on transmission error)

Meshing mechanism considering various combinations of assembly and manufacturing errors on face gear using a transmission-error-controlled curve

Influence of waveform components derived from the transmission error of a face gear pair on a fishing reel based on tactile sensibility

In-process tool flank wear identification in face milling using Holm's contacts theory

Proposal of a face gear which generates virtual high mesh frequency by addition of grooves on the tooth flank, and the investigation via vibration simulator and actual samples

Development of a large-scale multi-extrusion FDM printer, and its challenges

Characteristic of SiC Slurry in Ultra Precision Lapping of Sapphire Substrates

In-process tool wear detection by measuring the slip of AC induction motor in intermittent cutting process

Pitting failure of helical gears induced by trochoidal interference and multidirectional, interacting wear

Validity of quantifying sensation of fishing reel using transmission error instead of sensory human evaluation for face gear design

Polishing Characteristics of MnO2 Polishing Slurry on the Si-face of SiC Wafer

The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP)

Evaluation of Handle Rotational Feeling in Fishing Reel by Coordinate Measurement and Gear Transmission Error Measurement

Influence of Coating in Square End Mill Using In-Process Tool Wear Detection Based on Electrical Contact Resistance

A Novel Particle Sizing Method for Nano Abrasives in CMP Slurry by Using Fluorescent Nano Probe

Nanoparticle sizing for poly-dispersed particles using Nanoparticle chip

半導体プラナリゼーションCMP技術の展望

Machinability of SMART Forging Process Materials in Intermittent Cutting: 2nd Report : Machinability in Normal Cutting Region and Selection of Optimum Cutting Condition

Surface Morphology Evolution Induced by Multiple Femtosecond Laser Ablation on 4H-SiC Substrate and Its Application to CMP

Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate

Whole outline scanning measurement of internal gear by using CNC gear measuring machine

A high quality surface finish grinding process to produce total reflection mirror for x-ray fluorescence analysis

In-Process Tool Wear Detection of Uncoated Square End Mill Based on Electrical Contact Resistance

Derivation of Path of Contact and Tooth Flank Modification by Minimizing Transmission Error on Face Gear

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