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Plasma Parameters in the Reactor with Simultaneous Magnetron Discharge and Inductive Radio-Frequency Discharge in the Presence of External Magnetic Field

Journal of communications technology & electronics, 2018-04, Vol.63 (4), p.374-380

2018

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Low-pressure radio-frequency inductive discharge and possibilities of optimizing inductive plasma sources

Physics Uspekhi, 2008-05, Vol.51 (5), p.493-512

Kral'kina, E A

2008

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Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Field

Plasma physics reports, 2024, Vol.50 (1), p.77-88

2024

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Electric properties of carbon films deposited by magnetron sputtering with ion assistance

Journal of physics. Conference series, 2019-10, Vol.1328 (1), p.12029

2019

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Physical Properties of a Low-Power Helicon Source Operating on a High-Frequency Discharge with a Capacitive Component

Plasma physics reports, 2023-07, Vol.49 (7), p.890-900

2023

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Mathematical simulation of a low-pressure capacitive RF discharge in an external radial magnetic field using the KARAT code

Technical physics, 2016-11, Vol.61 (11), p.1603-1608

2016

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Plasma-chemical deposition of diamond-like coatings in capacitively coupled RF plasma in toluene

Journal of physics. Conference series, 2022-12, Vol.2379 (1), p.12018

2022

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Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field

Plasma physics reports, 2022-11, Vol.48 (11), p.1189-1198

2022

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Pulsed Inductive RF Discharge as an Effective Working Process of an RF Ion Source

Plasma physics reports, 2023-11, Vol.49 (11), p.1424-1428

2023

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Characteristics of Capacitive RF Discharge in a Magnetic Field with a Predominant Radial Component

Technical physics, 2024-05, Vol.69 (5), p.1369-1377

2024

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Influence of an External Circuit on the Plasma Parameters in the Channel of the Radio-Frequency Accelerator with a Closed Electron Drift

Plasma physics reports, 2021-10, Vol.47 (10), p.1075-1079

2021

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Physical Features of the Particle Flow Created by a Low-Power Helicon Plasma Source

Plasma physics reports, 2022-09, Vol.48 (9), p.961-972

2022

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Dependence of Parameters of a Radio-Frequency Closed Electron Drift Accelerator on the Radio-Frequency Capacitive Discharge Circuit

High temperature, 2023-02, Vol.61 (1), p.1-7

2023

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Properties of a low-pressure inductive RF discharge I: Experiment

Plasma physics reports, 2007-09, Vol.33 (9), p.733-745

2007

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Features of RF low-pressure discharge with inductive and capacitive channels

Plasma sources science & technology, 2017-03, Vol.26 (5), p.55006

2017

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RF power absorption by plasma of a low-pressure inductive discharge

Plasma sources science & technology, 2016-02, Vol.25 (1), p.15016

2016

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RF power absorption by plasma of low pressure low power inductive discharge located in the external magnetic field

AIP advances, 2018-03, Vol.8 (3), p.035217-035217-29

2018

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Properties of a low-pressure inductive RF discharge II: Mathematical simulations

Plasma physics reports, 2007-09, Vol.33 (9), p.746-756

2007

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Experimental study of patterns of energy input into hybrid low pressure discharge for varying RF generator power and argon pressure

Moscow University physics bulletin, 2010-08, Vol.65 (4), p.311-316

2010

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Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source

Plasma physics reports, 2018-09, Vol.44 (9), p.878-881

2018

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Self-consistent model of an inductive RF plasma source in an external magnetic field

Plasma physics reports, 2004-05, Vol.30 (5), p.398-412

2004

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Hybrid plasma system for magnetron deposition of coatings with ion assistance

Journal of physics. Conference series, 2016-01, Vol.669 (1), p.12033

2016

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Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System

Plasma physics reports, 2017, Vol.43 (12), p.1208-1208

2017

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Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

Plasma physics reports, 2016-03, Vol.42 (3), p.290-292

2016

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Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system

Russian microelectronics, 2016-11, Vol.45 (6), p.433-441

2016

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Plasma Parameters in the Reactor with Simultaneous Magnetron Discharge and Inductive Radio-Frequency Discharge in the Presence of External Magnetic Field

Low-pressure radio-frequency inductive discharge and possibilities of optimizing inductive plasma sources

Frequency Dependence of Parameters of an Inductive RF Discharge Placed in a Weak Magnetic Field

Electric properties of carbon films deposited by magnetron sputtering with ion assistance

Physical Properties of a Low-Power Helicon Source Operating on a High-Frequency Discharge with a Capacitive Component

Mathematical simulation of a low-pressure capacitive RF discharge in an external radial magnetic field using the KARAT code

Plasma-chemical deposition of diamond-like coatings in capacitively coupled RF plasma in toluene

Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field

Pulsed Inductive RF Discharge as an Effective Working Process of an RF Ion Source

Characteristics of Capacitive RF Discharge in a Magnetic Field with a Predominant Radial Component

Influence of an External Circuit on the Plasma Parameters in the Channel of the Radio-Frequency Accelerator with a Closed Electron Drift

Physical Features of the Particle Flow Created by a Low-Power Helicon Plasma Source

Dependence of Parameters of a Radio-Frequency Closed Electron Drift Accelerator on the Radio-Frequency Capacitive Discharge Circuit

Properties of a low-pressure inductive RF discharge I: Experiment

Features of RF low-pressure discharge with inductive and capacitive channels

RF power absorption by plasma of a low-pressure inductive discharge

RF power absorption by plasma of low pressure low power inductive discharge located in the external magnetic field

Properties of a low-pressure inductive RF discharge II: Mathematical simulations

Experimental study of patterns of energy input into hybrid low pressure discharge for varying RF generator power and argon pressure

Effect of an External Magnetic Field on the Absorption Efficiency of the RF Power in a Spatially Bounded Inductive Plasma Source

Self-consistent model of an inductive RF plasma source in an external magnetic field

Hybrid plasma system for magnetron deposition of coatings with ion assistance

Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System

Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system

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