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JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, 2005, Vol.38(11), pp.922-928
2005
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Korean Journal of Chemical Engineering, 2009, 26(3), 120, pp.824-827
2009
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Japanese Journal of Applied Physics, 2001-12, Vol.40 (12A), p.L1286-L1289
2001
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2008-03, Vol.26 (2), p.576-581
2008
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Microelectronics, 2007-01, Vol.38 (1), p.125-129
2007
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2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497), 2001, p.30-33
2001
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Hanʼguk Seramik Hakhoe chi, 2000, Vol.37 (11), p.1084-1090
2000
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화학공학, 1996-08, Vol.34 (4), p.502
1996
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화학공학, 1994-08, Vol.32 (4), p.606
1994
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Journal of applied physics, 2002-06, Vol.91 (12), p.9788-9793
2002
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Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2001-05, Vol.19 (3), p.916-921
2001
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Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2001-05, Vol.19 (3), p.916-921
2001
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2009-01, Vol.27 (1), p.33-40
2009
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2009-01, Vol.27 (1), p.33-40
2009
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2008-03, Vol.26 (2), p.576-581
2008
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Ar addition effect on mechanism of fluorocarbon ion formation in CF 4 /Ar inductively coupled plasma
2000
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2000-03, Vol.18 (2), p.811-819
2000
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ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361), 1999, p.133-135
1999
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- Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
- Journal Of Vacuum Science & Technology. A, Vacuum, Surfaces, And Films
- 화학공학
- Hanʼguk Seramik Hakhoe Chi
- Japanese Journal Of Applied Physics
- Japanese Journal Of Applied Physics Part 2-Letters
- Japanese Journal Of Applied Physics, Part 2: Letters
- Journal Of Applied Physics
- Journal Of Chemical Engineering Of Japan
- Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures