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Predicting synergy in atomic layer etching

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2017-09, Vol.35 (5)

2017

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Directional etch of magnetic and noble metals. II. Organic chemical vapor etch

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2017-09, Vol.35 (5)

2017

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Ion beam assisted organic chemical vapor etch of magnetic thin films

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2017-05, Vol.35 (3)

2017

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Directional etch of magnetic and noble metals. I. Role of surface oxidation states

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2017-09, Vol.35 (5)

2017

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Viable chemical approach for patterning nanoscale magnetoresistive random access memory

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2015-03, Vol.33 (2)

2015

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Thermodynamic assessment and experimental verification of reactive ion etching of magnetic metal elements

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2014-07, Vol.32 (4)

2014

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Effect of residual H2O on epitaxial AlN film growth on 4H-SiC by alternating doses of TMA and NH3

Applied surface science, 2014-09, Vol.314, p.1047-1052

2014

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Naturally occurring radioactive materials (NORM) in the groundwater of two islands with various geologic settings in South Korea

Geologia Croatica, 2018-06, Vol.71 (2), p.91-95

2018

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Synthesis and Electrochemical Properties of Hydrosulfide Solid Electrolytes

The Korean journal of chemical engineering, 2024-08

2024

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X-ray-Initiated Metal-Promoted Thin Film Growth

Journal of physical chemistry. C, 2012-04, Vol.116 (15), p.8594-8600

2012

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Surface Chemistry of Pentakis(dimethylamido)tantalum on Ta Surfaces

Journal of physical chemistry. C, 2011-04, Vol.115 (16), p.8240-8247

2011

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Enhanced battery capacity and cycle life due to suppressed side reactions on the surface of Ni-rich LiNi 0.8 Co 0.1 Mn 0.1 O 2 cathode materials coated with Co 3 (PO 4 ) 2

Journal of colloid and interface science, 2024-09, Vol.670, p.729

2024

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Enhanced battery capacity and cycle life due to suppressed side reactions on the surface of Ni-rich LiNi0.8Co0.1Mn0.1O2 cathode materials coated with Co3(PO4)2

Journal of colloid and interface science, 2024-09, Vol.670, p.729-741

2024

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Enhanced Electrochemical Stability and Moisture Reactivity of Al 2 S 3 Doped Argyrodite Solid Electrolyte

Journal of the Electrochemical Society, 2021-07, Vol.168 (7), p.70511

2021

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Predictive radon potential mapping in groundwater: a case study in Yongin, Korea

Environmental earth sciences, 2017-08, Vol.76 (15), p.1, Article 515

2017

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Atomic layer deposition of YMnO3 thin films

Journal of magnetism and magnetic materials, 2020-03, Vol.498, p.166146, Article 166146

2020

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Hydrogen-Rich Argyrodite Solid Electrolytes for NCM/Li All-Solid-State batteries

ACS energy letters, 2024-09, Vol.9 (9), p.4493-4500

2024

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Mechanistic study of atomic layer deposition of AlxSiyO thin film via in-situ FTIR spectroscopy

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2015-09, Vol.33 (5)

2015

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Development of Flexible Dual-type Proximity Sensor with Resonant Frequency for Robotic Applications

2019 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), 2019, p.8294-8299

2019

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In-situ etch rate study of HfxLayOz in Cl-2/BCl3 plasmas using the quartz crystal microbalance

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2015-05, Vol.33 (3)

2015

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Elucidating the Surface Reaction Mechanisms During Atomic Layer Deposition of Li x Al y Si z O by in Situ Fourier Transform Infrared Spectroscopy

Journal of physical chemistry. C, 2016-06, Vol.120 (22), p.11837-11846

2016

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Mechanistic study of atomic layer deposition of Al{sub x}Si{sub y}O thin film via in-situ FTIR spectroscopy

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2015-09, Vol.33 (5)

2015

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In-situ etch rate study of Hf{sub x}La{sub y}O{sub z} in Cl{sub 2}/BCl{sub 3} plasmas using the quartz crystal microbalance

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2015-05, Vol.33 (3)

2015

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Thermal Chemistry of Cu(I)-Iminopyrrolidinate and Cu(I)-Guanidinate Atomic Layer Deposition (ALD) Precursors on Ni(110) Single-Crystal Surfaces

Chemistry of materials, 2013-09, Vol.25 (18), p.3630-3639

2013

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(Invited) The Challenges and Opportunities in Plasma Etching of Functionally Enhanced Complex Material Systems

ECS transactions, 2017-01, Vol.75 (33), p.1-4

2017

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Predicting synergy in atomic layer etching

Directional etch of magnetic and noble metals. II. Organic chemical vapor etch

Ion beam assisted organic chemical vapor etch of magnetic thin films

Directional etch of magnetic and noble metals. I. Role of surface oxidation states

Viable chemical approach for patterning nanoscale magnetoresistive random access memory

Thermodynamic assessment and experimental verification of reactive ion etching of magnetic metal elements

Effect of residual H2O on epitaxial AlN film growth on 4H-SiC by alternating doses of TMA and NH3

Naturally occurring radioactive materials (NORM) in the groundwater of two islands with various geologic settings in South Korea

Synthesis and Electrochemical Properties of Hydrosulfide Solid Electrolytes

X-ray-Initiated Metal-Promoted Thin Film Growth

Surface Chemistry of Pentakis(dimethylamido)tantalum on Ta Surfaces

Enhanced battery capacity and cycle life due to suppressed side reactions on the surface of Ni-rich LiNi 0.8 Co 0.1 Mn 0.1 O 2 cathode materials coated with Co 3 (PO 4 ) 2

Enhanced battery capacity and cycle life due to suppressed side reactions on the surface of Ni-rich LiNi0.8Co0.1Mn0.1O2 cathode materials coated with Co3(PO4)2

Enhanced Electrochemical Stability and Moisture Reactivity of Al 2 S 3 Doped Argyrodite Solid Electrolyte

Predictive radon potential mapping in groundwater: a case study in Yongin, Korea

Atomic layer deposition of YMnO3 thin films

Hydrogen-Rich Argyrodite Solid Electrolytes for NCM/Li All-Solid-State batteries

Mechanistic study of atomic layer deposition of AlxSiyO thin film via in-situ FTIR spectroscopy

Development of Flexible Dual-type Proximity Sensor with Resonant Frequency for Robotic Applications

In-situ etch rate study of HfxLayOz in Cl-2/BCl3 plasmas using the quartz crystal microbalance

Elucidating the Surface Reaction Mechanisms During Atomic Layer Deposition of Li x Al y Si z O by in Situ Fourier Transform Infrared Spectroscopy

Mechanistic study of atomic layer deposition of Al{sub x}Si{sub y}O thin film via in-situ FTIR spectroscopy

In-situ etch rate study of Hf{sub x}La{sub y}O{sub z} in Cl{sub 2}/BCl{sub 3} plasmas using the quartz crystal microbalance

Thermal Chemistry of Cu(I)-Iminopyrrolidinate and Cu(I)-Guanidinate Atomic Layer Deposition (ALD) Precursors on Ni(110) Single-Crystal Surfaces

(Invited) The Challenges and Opportunities in Plasma Etching of Functionally Enhanced Complex Material Systems

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