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Characterization of SiO2 Etching Profiles in Pulse-Modulated Capacitively Coupled Plasmas

Materials, 2021-09, Vol.14 (17), p.5036

2021

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Low-Temperature Plasma Diagnostics to Investigate the Process Window Shift in Plasma Etching of SiO2

Sensors (Basel, Switzerland), 2022-08, Vol.22 (16), p.6029

2022

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Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath

Sensors (Basel, Switzerland), 2022-08, Vol.22 (16), p.6254

2022

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Contribution of Ion Energy and Flux on High-Aspect Ratio SiO2 Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C4F8 Plasma: Individual Ion Energy and Flux Controlled

Materials, 2023-05, Vol.16 (10), p.3820

2023

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Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma

Materials, 2023-08, Vol.16 (17), p.5746

2023

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Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method

Materials, 2023-03, Vol.16 (7), p.2762

2023

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A unified global model accompanied with a voltage and current sensor for low-pressure capacitively coupled RF discharge

Applied physics express, 2024-09, Vol.17 (9), p.96001

2024

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Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma

Sensors (Basel, Switzerland), 2022-08, Vol.22 (17), p.6589

2022

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Characterization of SiO2 Plasma Etching with Perfluorocarbon (C4F8 and C6F6) and Hydrofluorocarbon (CHF3 and C4H2F6) Precursors for the Greenhouse Gas Emissions Reduction

Materials, 2023-08, Vol.16 (16), p.5624

2023

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CLINICAL CHARACTERISTICS AND OUTCOME OF PATIENTS WITH LEFT VENTRICULAR THROMBUS AFTER ST-SEGMENT ELEVATION MYOCARDIAL INFARCTION: A SINGLE-CENTER RETROSPECTIVE STUDY

Journal of the American College of Cardiology, 2022-03, Vol.79 (9), p.801

2022

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Database Development of SiO2 Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe

Nanomaterials (Basel, Switzerland), 2022-10, Vol.12 (21), p.3828

2022

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Experimental Evaluation for the Microvibration Performance of a Segmented PC Method Based High Technology Industrial Facility Using 1/2 Scale Test Models

Shock and vibration, 2017-01, Vol.2017 (2017), p.1-9

2017

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Nonoperative Management of Iatrogenic Right Atrial Appendage Pseudoaneurysm During Catheter Ablation

JACC. Case reports, 2024-01, Vol.29 (1), p.102147-102147, Article 102147

2024

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Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma

Nanomaterials (Basel, Switzerland), 2022-11, Vol.12 (22), p.3963

2022

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Comprehensive Assessments in Bonding Energy of Plasma Assisted Si-SiO2 Direct Wafer Bonding after Low Temperature Rapid Thermal Annealing

Micromachines (Basel), 2022-10, Vol.13 (11), p.1856

2022

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Experimental and Analytical Investigation Based on 1/2 Scale Model for a Cleanroom Unit Module Consisting of Steel Section and Reinforced Concrete

Advances in materials science and engineering, 2016-01, Vol.2016 (2016), p.1-11

2016

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Design of PC beam-column joint applied X-braced bars in the segmented structural system

Journal of civil engineering and management, 2016-07, Vol.22 (5), p.634-644

2016

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Which Ideas for Change Are Endorsed? How Agentic and Communal Voice Affects Endorsement Differently for Men and for Women

Academy of Management journal, 2022-04, Vol.65 (2), p.634-655

2022

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A BREATHTAKING TRAPPED HEART: A CASE OF CALCIFIC CONSTRICTIVE PERICARDITIS

Journal of the American College of Cardiology, 2023-03, Vol.81 (8), p.3997-3997

2023

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AORTIC INTRAMURAL HEMATOMA PRESENTING WITH CARDIAC TAMPONADE

Journal of the American College of Cardiology, 2021-05, Vol.77 (18), p.2927-2927

2021

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ACUTE GASTRIC VOLVULUS PRESENTING AS ST-ELEVATION MYOCARDIAL INFARCTION

Journal of the American College of Cardiology, 2021-05, Vol.77 (18), p.2558-2558

2021

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Prognostic Utility of Right Ventricular Remodeling Over Conventional Risk Stratification in Patients With COVID-19

Journal of the American College of Cardiology, 2020-10, Vol.76 (17), p.1965-1977

2020

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Sorry to Ask but ... How Is Apology Effectiveness Dependent on Apology Content and Gender?

Journal of applied psychology, 2024-03, Vol.109 (3), p.339-361

2024

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The Positive and Negative Effects of Social Status on Ratings of Voice Behavior: A Test of Opposing Structural and Psychological Pathways

Journal of applied psychology, 2022-06, Vol.107 (6), p.951-967

2022

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Various evolution trends of sample thickness in fluorocarbon film deposition on SiO2

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2022-01, Vol.40 (1)

2022

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Characterization of SiO2 Etching Profiles in Pulse-Modulated Capacitively Coupled Plasmas

Low-Temperature Plasma Diagnostics to Investigate the Process Window Shift in Plasma Etching of SiO2

Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath

Contribution of Ion Energy and Flux on High-Aspect Ratio SiO2 Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C4F8 Plasma: Individual Ion Energy and Flux Controlled

Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma

Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method

A unified global model accompanied with a voltage and current sensor for low-pressure capacitively coupled RF discharge

Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma

Characterization of SiO2 Plasma Etching with Perfluorocarbon (C4F8 and C6F6) and Hydrofluorocarbon (CHF3 and C4H2F6) Precursors for the Greenhouse Gas Emissions Reduction

CLINICAL CHARACTERISTICS AND OUTCOME OF PATIENTS WITH LEFT VENTRICULAR THROMBUS AFTER ST-SEGMENT ELEVATION MYOCARDIAL INFARCTION: A SINGLE-CENTER RETROSPECTIVE STUDY

Database Development of SiO2 Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe

Experimental Evaluation for the Microvibration Performance of a Segmented PC Method Based High Technology Industrial Facility Using 1/2 Scale Test Models

Nonoperative Management of Iatrogenic Right Atrial Appendage Pseudoaneurysm During Catheter Ablation

Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma

Comprehensive Assessments in Bonding Energy of Plasma Assisted Si-SiO2 Direct Wafer Bonding after Low Temperature Rapid Thermal Annealing

Experimental and Analytical Investigation Based on 1/2 Scale Model for a Cleanroom Unit Module Consisting of Steel Section and Reinforced Concrete

Design of PC beam-column joint applied X-braced bars in the segmented structural system

Which Ideas for Change Are Endorsed? How Agentic and Communal Voice Affects Endorsement Differently for Men and for Women

A BREATHTAKING TRAPPED HEART: A CASE OF CALCIFIC CONSTRICTIVE PERICARDITIS

AORTIC INTRAMURAL HEMATOMA PRESENTING WITH CARDIAC TAMPONADE

ACUTE GASTRIC VOLVULUS PRESENTING AS ST-ELEVATION MYOCARDIAL INFARCTION

Prognostic Utility of Right Ventricular Remodeling Over Conventional Risk Stratification in Patients With COVID-19

Sorry to Ask but ... How Is Apology Effectiveness Dependent on Apology Content and Gender?

The Positive and Negative Effects of Social Status on Ratings of Voice Behavior: A Test of Opposing Structural and Psychological Pathways

Various evolution trends of sample thickness in fluorocarbon film deposition on SiO2

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