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Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process

Journal of intelligent manufacturing, 2020-01, Vol.31 (1), p.73-86

2020

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Discriminative feature learning and cluster-based defect label reconstruction for reducing uncertainty in wafer bin map labels

Journal of intelligent manufacturing, 2021, Vol.32 (1), p.251-263

2021

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Semisupervised sentiment analysis method for online text reviews

Journal of information science, 2021-06, Vol.47 (3), p.387-403

2021

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A Convolutional Neural Network for Fault Classification and Diagnosis in Semiconductor Manufacturing Processes

IEEE transactions on semiconductor manufacturing, 2017-05, Vol.30 (2), p.135-142

2017

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Convolutional Neural Network for Wafer Surface Defect Classification and the Detection of Unknown Defect Class

IEEE transactions on semiconductor manufacturing, 2019-05, Vol.32 (2), p.163-170

2019

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A Deep Learning Model for Robust Wafer Fault Monitoring With Sensor Measurement Noise

IEEE transactions on semiconductor manufacturing, 2017-02, Vol.30 (1), p.23-31

2017

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A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks

Journal of intelligent manufacturing, 2021-12, Vol.32 (8), p.2267-2280

2021

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State-Dependent Parameter Tuning of the Apparent Tardiness Cost Dispatching Rule Using Deep Reinforcement Learning

IEEE access, 2022, Vol.10, p.20187-20198

2022

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Performance of Machine Learning Algorithms for Class-Imbalanced Process Fault Detection Problems

IEEE transactions on semiconductor manufacturing, 2016-11, Vol.29 (4), p.436-445

2016

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Autonomous Control of Combat Unmanned Aerial Vehicles to Evade Surface-to-Air Missiles Using Deep Reinforcement Learning

IEEE access, 2020, Vol.8, p.226724-226736

2020

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Statistical Comparison of Fault Detection Models for Semiconductor Manufacturing Processes

IEEE transactions on semiconductor manufacturing, 2015-02, Vol.28 (1), p.80-91

2015

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An Incremental Clustering-Based Fault Detection Algorithm for Class-Imbalanced Process Data

IEEE transactions on semiconductor manufacturing, 2015-08, Vol.28 (3), p.318-328

2015

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Automatic inspection of salt-and-pepper defects in OLED panels using image processing and control chart techniques

Journal of intelligent manufacturing, 2019-03, Vol.30 (3), p.1047-1055

2019

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Collective Decision of One-vs-Rest Networks for Open-Set Recognition

IEEE transaction on neural networks and learning systems, 2024-02, Vol.35 (2), p.2327-2338

2024

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Modular Reinforcement Learning for Autonomous UAV Flight Control

Drones (Basel), 2023-07, Vol.7 (7), p.418

2023

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Adaptive Weapon-to-Target Assignment Model Based on the Real-Time Prediction of Hit Probability

IEEE access, 2019, Vol.7, p.72210-72220

2019

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Stepwise Soft Actor–Critic for UAV Autonomous Flight Control

Drones (Basel), 2023-09, Vol.7 (9), p.549

2023

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Yield Prediction Through the Event Sequence Analysis of the Die Attach Process

IEEE transactions on semiconductor manufacturing, 2015-11, Vol.28 (4), p.563-570

2015

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Teacher-Explorer-Student Learning: A Novel Learning Method for Open Set Recognition

IEEE transaction on neural networks and learning systems, 2023-12, Vol.PP, p.1-14

2023

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Siamese Network-Based Health Representation Learning and Robust Reference-Based Remaining Useful Life Prediction

IEEE transactions on industrial informatics, 2022-08, Vol.18 (8), p.5264-5274

2022

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A multivariate parameter trace analysis for online fault detection in a semiconductor etch tool

International journal of production research, 2012-12, Vol.50 (23), p.6639-6654

2012

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Unstructured borderline self-organizing map: Learning highly imbalanced, high-dimensional datasets for fault detection

Expert systems with applications, 2022-02, Vol.188, p.116028, Article 116028

2022

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Situation dependent decision selector for production control in testing and rework cell

International journal of production research, 2011-08, Vol.49 (15), p.4505-4516

2011

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A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance

Journal of intelligent manufacturing, 2023-02, Vol.34 (2), p.529-540

2023

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Support Weighted Ensemble Model for Open Set Recognition of Wafer Map Defects

IEEE transactions on semiconductor manufacturing, 2020-11, Vol.33 (4), p.635-643

2020

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Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process

Discriminative feature learning and cluster-based defect label reconstruction for reducing uncertainty in wafer bin map labels

Semisupervised sentiment analysis method for online text reviews

A Convolutional Neural Network for Fault Classification and Diagnosis in Semiconductor Manufacturing Processes

Convolutional Neural Network for Wafer Surface Defect Classification and the Detection of Unknown Defect Class

A Deep Learning Model for Robust Wafer Fault Monitoring With Sensor Measurement Noise

A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks

State-Dependent Parameter Tuning of the Apparent Tardiness Cost Dispatching Rule Using Deep Reinforcement Learning

Performance of Machine Learning Algorithms for Class-Imbalanced Process Fault Detection Problems

Autonomous Control of Combat Unmanned Aerial Vehicles to Evade Surface-to-Air Missiles Using Deep Reinforcement Learning

Statistical Comparison of Fault Detection Models for Semiconductor Manufacturing Processes

An Incremental Clustering-Based Fault Detection Algorithm for Class-Imbalanced Process Data

Automatic inspection of salt-and-pepper defects in OLED panels using image processing and control chart techniques

Collective Decision of One-vs-Rest Networks for Open-Set Recognition

Modular Reinforcement Learning for Autonomous UAV Flight Control

Adaptive Weapon-to-Target Assignment Model Based on the Real-Time Prediction of Hit Probability

Stepwise Soft Actor–Critic for UAV Autonomous Flight Control

Yield Prediction Through the Event Sequence Analysis of the Die Attach Process

Teacher-Explorer-Student Learning: A Novel Learning Method for Open Set Recognition

Siamese Network-Based Health Representation Learning and Robust Reference-Based Remaining Useful Life Prediction

A multivariate parameter trace analysis for online fault detection in a semiconductor etch tool

Unstructured borderline self-organizing map: Learning highly imbalanced, high-dimensional datasets for fault detection

Situation dependent decision selector for production control in testing and rework cell

A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance

Support Weighted Ensemble Model for Open Set Recognition of Wafer Map Defects

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