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A 12 MHz micromechanical bulk acoustic mode oscillator

Sensors and actuators. A. Physical., 2002-09, Vol.101 (1), p.1-9

2002

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Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Sensors and actuators. A. Physical., 2012-12, Vol.188, p.240-245

2012

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Deceleration of silicon etch rate at high aspect ratios

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2000-07, Vol.18 (4), p.1385-1389

Kiihamaki, J

2000

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Imaging of in- and out-of-plane vibrations in micromechanical resonator

Electronics letters, 2005-02, Vol.41 (3), p.121-122

2005

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Pattern shape effects and artefacts in deep silicon etching

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1999-07, Vol.17 (4), p.2280-2285

1999

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Depth and profile control in plasma etched MEMS structures

Sensors and actuators. A. Physical., 2000-05, Vol.82 (1), p.234-238

2000

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14 MHz micromechanical oscillator

Sensors and actuators. A, Physical, 2002-04, Vol.97, p.497-502

2002

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Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

IEEE electron device letters, 2004-04, Vol.25 (4), p.173-175

2004

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Long-term stability of single-crystal silicon microresonators

Sensors and actuators. A. Physical., 2004-09, Vol.115 (1), p.23-27

2004

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Electrical and Mechanical Properties of Micromachined Vacuum Cavities

Physica scripta, 2004-01, Vol.2004, p.195-198

2004

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Etching through silicon wafer in inductively coupled plasma

Microsystem technologies, 2000-04, Vol.6 (4), p.141-144

2000

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“Plug-up”–a new concept for fabricating SOI MEMS devices

Microsystem technologies : sensors, actuators, systems integration, 2004-08, Vol.10 (5), p.346-350

2004

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Plug-up: a new concept for fabricating SOI MEMS devices

Microsystem technologies : sensors, actuators, systems integration, 2004-08, Vol.10 (5), p.346-350

2004

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Deep silicon etching in inductively coupled plasma reactor for MEMS

Physica scripta, 1999-01, Vol.1999 (1), p.250

1999

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Imaging of in- and out-of-plane vibrations in micromechanical resonator

Electronics letters, 2005-02, Vol.41 (3), p.1-1

2005

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Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011, p.1887-1890

2011

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Square-extensional mode single-crystal silicon micromechanical RF-resonator

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, Vol.2, p.951-954 vol.2

2003

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Fabrication of single crystal silicon resonators with narrow gaps

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05, 2005, Vol.2, p.1354-1357 Vol. 2

2005

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Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method

2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017), 2000, Vol.1, p.99-102 vol.1

2000

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Modular integration of CMOS and SOI-MEMS using "plug-up" concept

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003, Vol.2, p.1647-1650 vol.2

2003

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Micromechanical bulk acoustic wave resonator

2002 IEEE Ultrasonics Symposium, 2002. Proceedings, 2002, Vol.1, p.945-948 vol.1

2002

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Monolithic SOI-MEMS capacitive pressure sensor with standard bulk CMOS readout circuit

ESSCIRC 2004 - 29th European Solid-State Circuits Conference (IEEE Cat. No.03EX705), 2003, p.611-614

2003

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"Plug-up"-a new concept for fabricating SOI MEMS devices

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, 2003, p.229-233

2003

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Measurement of Oxide Etch Rate of SOI Structure using near IR Microscopy

Physica scripta, 2002-01, Vol.2002 (1), p.185

Kiihamäki, Jyrki

2002

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Stability of wafer level vacuum encapsulated single-crystal silicon resonators

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05, 2005, Vol.1, p.916-919 Vol. 1

2005

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A 12 MHz micromechanical bulk acoustic mode oscillator

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Deceleration of silicon etch rate at high aspect ratios

Imaging of in- and out-of-plane vibrations in micromechanical resonator

Pattern shape effects and artefacts in deep silicon etching

Depth and profile control in plasma etched MEMS structures

14 MHz micromechanical oscillator

Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications

Long-term stability of single-crystal silicon microresonators

Electrical and Mechanical Properties of Micromachined Vacuum Cavities

Etching through silicon wafer in inductively coupled plasma

“Plug-up”–a new concept for fabricating SOI MEMS devices

Plug-up: a new concept for fabricating SOI MEMS devices

Deep silicon etching in inductively coupled plasma reactor for MEMS

Imaging of in- and out-of-plane vibrations in micromechanical resonator

Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition

Square-extensional mode single-crystal silicon micromechanical RF-resonator

Fabrication of single crystal silicon resonators with narrow gaps

Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method

Modular integration of CMOS and SOI-MEMS using "plug-up" concept

Micromechanical bulk acoustic wave resonator

Monolithic SOI-MEMS capacitive pressure sensor with standard bulk CMOS readout circuit

"Plug-up"-a new concept for fabricating SOI MEMS devices

Measurement of Oxide Etch Rate of SOI Structure using near IR Microscopy

Stability of wafer level vacuum encapsulated single-crystal silicon resonators

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