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Perspective: Optical measurement of feature dimensions and shapes by scatterometry

APL materials, 2018-05, Vol.6 (5), p.058201-058201-16

2018

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Nondestructive characterization of nanoscale subsurface features fabricated by selective etching of multilayered nanowire test structures using Mueller matrix spectroscopic ellipsometry based scatterometry

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2020-03, Vol.38 (2)

2020

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In situ spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO2 nanotrenches

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2022-12, Vol.40 (6)

2022

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3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology

IEEE transactions on semiconductor manufacturing, 2024-08, Vol.37 (3), p.244-250

2024

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Function of a Viral Genome Packaging Motor from Bacteriophage T4 is Insensitive to DNA Sequence

Biophysical journal, 2021-02, Vol.120 (3), p.36a-36a

2021

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Decorrelation of optical critical dimensions in mid-infrared ellipsometric spectroscopy of high aspect ratio etch profiles

Journal of Micro/Nanopatterning, Materials, and Metrology, 2022-04, Vol.21 (2)

2022

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Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes

Journal of micro/nanolithography, MEMS, and MOEMS, 2018-07, Vol.17 (3), p.1

2018

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Enhancing one dimensional sensitivity with plasmonic coupling: erratum

Optics express, 2016-02, Vol.24 (4), p.3613-3614

2016

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Enhancing one dimensional sensitivity with plasmonic coupling

Optics express, 2014-10, Vol.22 (21), p.26246-26253

2014

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3D NAND Oxide/Nitride Tier Stack Thickness Measurements with Infrared Metrology

2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2023, p.1-8

2023

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Optical critical dimension metrology for directed self-assembly assisted contact hole shrink

Journal of micro/nanolithography, MEMS, and MOEMS, 2016-03, Vol.15 (1), p.14004

2016

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Risk Assessment and Screening for Sexually Transmitted Infections, HIV, and Hepatitis Virus Among Long-Distance Truck Drivers in New Mexico, 2004-2006

American journal of public health (1971), 2009-11, Vol.99 (11), p.2063-2068

2009

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Characterization of Overlay and Tilt in Advanced Technology Nodes using Scatterometry

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2019, p.1-7

2019

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Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology

Journal of micro/nanolithography, MEMS, and MOEMS, 2015-07, Vol.14 (3), p.31208

2015

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Comparison of HIV-antibody prevalence in patients consenting to and declining HIV-antibody testing in an STD clinic

JAMA : the journal of the American Medical Association, 1988-08, Vol.260 (7), p.935

1988

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Sexual and Drug Use Risk Behaviors of Long-Haul Truck Drivers and Their Commercial Sex Contacts in New Mexico

Public health reports (1974), 2010-01, Vol.125 (1), p.52-60

2010

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Modeling ellipsometric measurement of three-dimensional structures with rigorous coupled wave analysis and finite element method simulations

Journal of micro/nanolithography, MEMS, and MOEMS, 2016-10, Vol.15 (4), p.44003

2016

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Economic perspectives for 1982 indicate downturn: inflation, poor export markets, high import prices show poor 1981 better than this year

The American banker, 1982-04, Vol.147, p.9

Keller, Nick Vaisman

1982

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Counseling and Antibody Testing to Prevent HIV Infection-Reply

JAMA : the journal of the American Medical Association, 1989-05, Vol.261 (17), p.2502

Hull, Harry F.

1989

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The unsuitability of implantable Doppler probes for the early detection of renal vascular complications - a porcine model for prevention of renal transplant loss

PloS one, 2017-05, Vol.12 (5), p.e0178301-e0178301

2017

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Confronting the risks of large-scale invasive species control

Nature ecology & evolution, 2017-05, Vol.1 (6), Article 0172

2017

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Insights into the Cultured Bacterial Fraction of Corals

mSystems, 2021-06, Vol.6 (3), p.e0124920

2021

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Pannexin 1 channels in renin-expressing cells influence renin secretion and blood pressure homeostasis

Kidney international, 2020-09, Vol.98 (3), p.630-644

2020

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A quantitative test of Hamilton's rule for the evolution of altruism

PLoS biology, 2011-05, Vol.9 (5), p.e1000615-e1000615

2011

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Revisiting the discrimination and distribution of S-type granites from zircon trace element composition

Earth and planetary science letters, 2024-05, Vol.633, p.118638, Article 118638

2024

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Perspective: Optical measurement of feature dimensions and shapes by scatterometry

Nondestructive characterization of nanoscale subsurface features fabricated by selective etching of multilayered nanowire test structures using Mueller matrix spectroscopic ellipsometry based scatterometry

In situ spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO2 nanotrenches

3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology

Function of a Viral Genome Packaging Motor from Bacteriophage T4 is Insensitive to DNA Sequence

Decorrelation of optical critical dimensions in mid-infrared ellipsometric spectroscopy of high aspect ratio etch profiles

Nonconventional applications of Mueller matrix-based scatterometry for advanced technology nodes

Enhancing one dimensional sensitivity with plasmonic coupling: erratum

Enhancing one dimensional sensitivity with plasmonic coupling

3D NAND Oxide/Nitride Tier Stack Thickness Measurements with Infrared Metrology

Optical critical dimension metrology for directed self-assembly assisted contact hole shrink

Risk Assessment and Screening for Sexually Transmitted Infections, HIV, and Hepatitis Virus Among Long-Distance Truck Drivers in New Mexico, 2004-2006

Characterization of Overlay and Tilt in Advanced Technology Nodes using Scatterometry

Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology

Comparison of HIV-antibody prevalence in patients consenting to and declining HIV-antibody testing in an STD clinic

Sexual and Drug Use Risk Behaviors of Long-Haul Truck Drivers and Their Commercial Sex Contacts in New Mexico

Modeling ellipsometric measurement of three-dimensional structures with rigorous coupled wave analysis and finite element method simulations

Economic perspectives for 1982 indicate downturn: inflation, poor export markets, high import prices show poor 1981 better than this year

Counseling and Antibody Testing to Prevent HIV Infection-Reply

The unsuitability of implantable Doppler probes for the early detection of renal vascular complications - a porcine model for prevention of renal transplant loss

Confronting the risks of large-scale invasive species control

Insights into the Cultured Bacterial Fraction of Corals

Pannexin 1 channels in renin-expressing cells influence renin secretion and blood pressure homeostasis

A quantitative test of Hamilton's rule for the evolution of altruism

Revisiting the discrimination and distribution of S-type granites from zircon trace element composition

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