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Ce 3+ -enriched core–shell ceria nanoparticles for silicate adsorption

Journal of materials research, 2017-07, Vol.32 (14), p.2829-2836

2017

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Ce3+-enriched core–shell ceria nanoparticles for silicate adsorption

Journal of materials research, 2017-07, Vol.32 (14), p.2829-2836

2017

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Communication—Reduction of Friction Force between Ceria and SiO 2 for Low Dishing in STI CMP

ECS journal of solid state science and technology, 2017, Vol.6 (10), p.P752-P754

2017

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Communication—Selective Adsorption of PEG on SiO 2 for High Removal Selectivity in Tungsten CMP

ECS journal of solid state science and technology, 2018, Vol.7 (3), p.P132-P134

2018

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Communication—Synergistic Effect of Mixed Particle Size on W CMP Process: Optimization Using Experimental Design

ECS journal of solid state science and technology, 2017-01, Vol.6 (1), p.P42-P44

2017

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Control of Galvanic Corrosion Behavior Between Tungsten and Titanium Nitride in CMP Application

Meeting abstracts (Electrochemical Society), 2016-09, Vol.MA2016-02 (9), p.1112-1112

2016

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Engineering SiO2 Nanoparticles: A Perspective on Chemical Mechanical Planarization Slurry for Advanced Semiconductor Processing

KONA Powder and Particle Journal, 2023, pp.2025001

2023

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Fe-substituted silica via lattice dissolution–reprecipitation replacement for tungsten chemical mechanical planarization

Journal of Industrial and Engineering Chemistry, 2022, 111(0), , pp.219-225

2022

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Fenton-Like Reaction between Copper Ions and Hydrogen Peroxide for High Removal Rate of Tungsten in Chemical Mechanical Planarization

ECS journal of solid state science and technology, 2018, Vol.7 (3), p.P91-P95

2018

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Galvanic corrosion inhibition from aspect of bonding orbital theory in Cu/Ru barrier CMP

Scientific reports, 2021-10, Vol.11 (1), p.21214-21214, Article 21214

2021

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Heterostructure design of Fe2(MoO4)3 decorated MoO3 nanorods for boosting catalytic activity in high-performance lithium sulfur batteries

Electrochimica acta, 2022-01, Vol.401, p.139535, Article 139535

2022

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Highly Dispersed Fe 3+ -Substituted Colloidal Silica Nanoparticles for Defect-Free Tungsten Chemical Mechanical Planarization

ECS journal of solid state science and technology, 2017, Vol.6 (7), p.P405-P409

2017

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Highly reversible cycling with Dendrite-Free lithium deposition enabled by robust SEI layer with low charge transfer activation energy

Applied surface science, 2022-01, Vol.572, p.151439, Article 151439

2022

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Hydrogenated ceria nanoparticles for high-efficiency silicate adsorption

New journal of chemistry, 2022-11, Vol.46 (43), p.2572-2579

2022

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Improved Li-ion kinetics of the anode by kneading process of binder for lithium-ion batteries with high energy density

Electrochimica acta, 2023-10, Vol.464, p.142900, Article 142900

2023

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Interface-reinforcing sintering step for highly stable operation of proton-conducting fuel cell stack

Journal of power sources, 2022-11, Vol.548, p.232082, Article 232082

2022

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Mitigation of Binder Migration Behavior during the Drying Process by Applying an Electric Field for Fast‐Charging in Lithium‐Ion Batteries

Batteries & supercaps, 2023-09, Vol.6 (9)

2023

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Modulating SEI formation tuning the solvation sheath for lithium metal batteries

Chemical communications (Cambridge, England), 2022-08, Vol.58 (7), p.9834-9837

2022

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Modulating SEI formation via tuning the solvation sheath for lithium metal batteries

Chemical communications (Cambridge, England), 2022-08, Vol.58 (70), p.9834-9837

2022

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Modulation of Molybdenum Oxidation State Via Catalytic-Oxidation

SSRN Electronic Journal

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Modulation of Molybdenum oxidation state via Catalytic-oxidation

Applied surface science, 2023-04, Vol.615, p.156330, Article 156330

2023

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Optimizing a blend of a mixture slurry in chemical mechanical planarization for advanced semiconductor manufacturing using a posterior preference articulation approach to dual response surface optimization

Applied stochastic models in business and industry, 2016-09, Vol.32 (5), p.648-659

2016

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Processing Gain in a Recursive Single Parity Check Product Code with Non-Gaussian Weight Distribution

VTC Spring 2009 - IEEE 69th Vehicular Technology Conference, 2009, p.1-5

2009

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Recent Advances in CMP Slurries: Composition and Analysis Perspectives

Ceramist, 2024-06, Vol.27 (2), p.161-176

2024

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Recovery and reuse of magnetic silica-coated iron oxide particles for eco-friendly chemical mechanical planarization

Colloids and surfaces. A, Physicochemical and engineering aspects, 2024-08, Vol.694, p.134064, Article 134064

2024

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Ce 3+ -enriched core–shell ceria nanoparticles for silicate adsorption

Ce3+-enriched core–shell ceria nanoparticles for silicate adsorption

Communication—Reduction of Friction Force between Ceria and SiO 2 for Low Dishing in STI CMP

Communication—Selective Adsorption of PEG on SiO 2 for High Removal Selectivity in Tungsten CMP

Communication—Synergistic Effect of Mixed Particle Size on W CMP Process: Optimization Using Experimental Design

Control of Galvanic Corrosion Behavior Between Tungsten and Titanium Nitride in CMP Application

Engineering SiO2 Nanoparticles: A Perspective on Chemical Mechanical Planarization Slurry for Advanced Semiconductor Processing

Fe-substituted silica via lattice dissolution–reprecipitation replacement for tungsten chemical mechanical planarization

Fenton-Like Reaction between Copper Ions and Hydrogen Peroxide for High Removal Rate of Tungsten in Chemical Mechanical Planarization

Galvanic corrosion inhibition from aspect of bonding orbital theory in Cu/Ru barrier CMP

Heterostructure design of Fe2(MoO4)3 decorated MoO3 nanorods for boosting catalytic activity in high-performance lithium sulfur batteries

Highly Dispersed Fe 3+ -Substituted Colloidal Silica Nanoparticles for Defect-Free Tungsten Chemical Mechanical Planarization

Highly reversible cycling with Dendrite-Free lithium deposition enabled by robust SEI layer with low charge transfer activation energy

Hydrogenated ceria nanoparticles for high-efficiency silicate adsorption

Improved Li-ion kinetics of the anode by kneading process of binder for lithium-ion batteries with high energy density

Interface-reinforcing sintering step for highly stable operation of proton-conducting fuel cell stack

Mitigation of Binder Migration Behavior during the Drying Process by Applying an Electric Field for Fast‐Charging in Lithium‐Ion Batteries

Modulating SEI formation tuning the solvation sheath for lithium metal batteries

Modulating SEI formation via tuning the solvation sheath for lithium metal batteries

Modulation of Molybdenum Oxidation State Via Catalytic-Oxidation

Modulation of Molybdenum oxidation state via Catalytic-oxidation

Optimizing a blend of a mixture slurry in chemical mechanical planarization for advanced semiconductor manufacturing using a posterior preference articulation approach to dual response surface optimization

Processing Gain in a Recursive Single Parity Check Product Code with Non-Gaussian Weight Distribution

Recent Advances in CMP Slurries: Composition and Analysis Perspectives

Recovery and reuse of magnetic silica-coated iron oxide particles for eco-friendly chemical mechanical planarization

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