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Analysis of the reverse patterning phenomenon caused by a light source change in an attenuated phase shift mask

Microelectronic engineering, 2013-04, Vol.104, p.33-36

2013

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Analysis of gate oxide damage by ultraviolet light during oxide deposition in high density plasma

Thin solid films, 2011-08, Vol.519 (20), p.6645-6648

2011

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Experimental and numerical investigation on the effect of material models of tire tread composites in rolling tire noise via coupled acoustic-structural finite element analysis

Advanced composite materials, 2023-07, Vol.32 (4), p.501-518

2023

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Study of plasma charging-induced white pixel defect increase in CMOS active pixel sensor

Thin solid films, 2007-04, Vol.515 (12), p.4864-4868

2007

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Real-time monitoring of plasma flickering in high pressure electronegative discharge

2006 IEEE International Symposium on Semiconductor Manufacturing, 2006, p.346-349

2006

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Issues of contact etching and pre-treatment in Schottky contact

Thin solid films, 2009-05, Vol.517 (14), p.3844-3846

2009

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Real-time process monitoring by optical emission spectroscopy in DRAM gate CD control

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005, 2005, p.136-138

2005

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Chemical Mechanical Planarization Technology for Si Wafer Bonding

ECS transactions, 2010, Vol.33 (10), p.153-156

2010

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Effect of Ashing, Strip and Annealing Process on the Dopant Concentration of Silicon

ECS transactions, 2007, Vol.11 (2), p.211-217

2007

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Removal of Aspect Ratio Dependent Etching by Low angle Forward Reflected Neutral Beam Etching

Journal of the Korean Physical Society, 2005, 46(4), , pp.867-871

2005

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Chemical Mechanical Planarization Technology for Si Wafer Bonding

Meeting abstracts (Electrochemical Society), 2010-07, Vol.MA2010-02 (21), p.1477-1477

2010

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Stoichiometric Control of Unltrathin SrTiO 3 Film on Ru Electrode by Two Step ALD Process

Meeting abstracts (Electrochemical Society), 2011-03, Vol.MA2011-01 (22), p.1382-1382

2011

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Effect of Ashing, Strip and Annealing Process on the Dopant Concentration of Silicon

Meeting abstracts (Electrochemical Society), 2007-09, Vol.MA2007-02 (18), p.1034-1034

2007

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Chamber maintenance and fault detection technique for a gate etch process via self-excited electron resonance spectroscopy

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2005-01, Vol.23 (1), p.125-129

2005

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A Study On The High Temperture Platinum Etching

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135), 1998, p.219-220

1998

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Experimental and numerical investigations of forced response of multi-element lean-premixed hydrogen flames

Combustion and flame, 2023-12, Vol.258, p.113079, Article 113079

2023

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Preparation of Highly Stable Black Phosphorus by Gold Decoration for High‐Performance Thermoelectric Generators

Advanced functional materials, 2018-07, Vol.28 (28), p.n/a

2018

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Engineered nanocarbon mixing for enhancing the thermoelectric properties of a telluride-PEDOT:PSS nanocomposite

Journal of materials chemistry. A, Materials for energy and sustainability, 2017, Vol.5 (34), p.17867-17873

2017

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Increased risk of contralateral breast cancer for BRCA1/2 wild-type, high-risk Korean breast cancer patients: a retrospective cohort study

Breast cancer research : BCR, 2024-01, Vol.26 (1), p.14-14, Article 14

2024

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Enhanced Ionic Conductivity of Semi-IPN Solid Polymer Electrolytes Based on Star-Shaped Oligo(ethyleneoxy)cyclotriphosphazenes

Macromolecules, 2012-10, Vol.45 (19), p.7931-7938

2012

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Flow Velocity Deviation of Spinning Solution Under Multi-field Coupling

Fibers and Polymers, 2023, 24(10), , pp.3513-3526

2023

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Feasibility of quantifying SDC2 methylation in stool DNA for early detection of colorectal cancer

Clinical epigenetics, 2017-12, Vol.9 (1), p.126-126, Article 126

2017

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High‐Transconductance Stretchable Transistors Achieved by Controlled Gold Microcrack Morphology

Advanced electronic materials, 2019-08, Vol.5 (8), p.n/a

2019

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Solution synthesis of telluride-based nano-barbell structures coated with PEDOT:PSS for spray-printed thermoelectric generators

Nanoscale, 2016-06, Vol.8 (21), p.10885-10890

2016

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Promoting near‐infrared II fluorescence efficiency by blocking long‐range energy migration

Aggregate (Hoboken), 2023-06, Vol.4 (3), p.n/a

2023

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Analysis of the reverse patterning phenomenon caused by a light source change in an attenuated phase shift mask

Analysis of gate oxide damage by ultraviolet light during oxide deposition in high density plasma

Experimental and numerical investigation on the effect of material models of tire tread composites in rolling tire noise via coupled acoustic-structural finite element analysis

Study of plasma charging-induced white pixel defect increase in CMOS active pixel sensor

Real-time monitoring of plasma flickering in high pressure electronegative discharge

Issues of contact etching and pre-treatment in Schottky contact

Real-time process monitoring by optical emission spectroscopy in DRAM gate CD control

Chemical Mechanical Planarization Technology for Si Wafer Bonding

Effect of Ashing, Strip and Annealing Process on the Dopant Concentration of Silicon

Removal of Aspect Ratio Dependent Etching by Low angle Forward Reflected Neutral Beam Etching

Chemical Mechanical Planarization Technology for Si Wafer Bonding

Stoichiometric Control of Unltrathin SrTiO 3 Film on Ru Electrode by Two Step ALD Process

Effect of Ashing, Strip and Annealing Process on the Dopant Concentration of Silicon

Chamber maintenance and fault detection technique for a gate etch process via self-excited electron resonance spectroscopy

A Study On The High Temperture Platinum Etching

Experimental and numerical investigations of forced response of multi-element lean-premixed hydrogen flames

Preparation of Highly Stable Black Phosphorus by Gold Decoration for High‐Performance Thermoelectric Generators

Engineered nanocarbon mixing for enhancing the thermoelectric properties of a telluride-PEDOT:PSS nanocomposite

Increased risk of contralateral breast cancer for BRCA1/2 wild-type, high-risk Korean breast cancer patients: a retrospective cohort study

Enhanced Ionic Conductivity of Semi-IPN Solid Polymer Electrolytes Based on Star-Shaped Oligo(ethyleneoxy)cyclotriphosphazenes

Flow Velocity Deviation of Spinning Solution Under Multi-field Coupling

Feasibility of quantifying SDC2 methylation in stool DNA for early detection of colorectal cancer

High‐Transconductance Stretchable Transistors Achieved by Controlled Gold Microcrack Morphology

Solution synthesis of telluride-based nano-barbell structures coated with PEDOT:PSS for spray-printed thermoelectric generators

Promoting near‐infrared II fluorescence efficiency by blocking long‐range energy migration

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