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The Chemistry of Metal CVD

1. Aufl., 2008

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Chemical Vapor Deposition of Copper from Hexafluoroacetylacetonato Copper(I) Vinyltrimethylsilane: Deposition Rates, Mechanism, Selectivity, Morphology, and Resistivity as a Function of Temperature and Pressure

Journal of the Electrochemical Society, 1993-05, Vol.140 (5), p.1434-1439

1993

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Comparison of Solid-State and Spray-Pyrolysis Synthesis of Yttrium Aluminate Powders

Journal of the American Ceramic Society, 1997-05, Vol.80 (5), p.1231-1238

1997

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The chemistry of metal CVD

1994

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Aerosol Processing of Materials

Aerosol science and technology, 1993-01, Vol.19 (4), p.411-452

1993

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Morphology of Single-Component Particles Produced by Spray Pyrolysis

Aerosol science and technology, 1997-01, Vol.27 (5), p.575-590

1997

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Green photoluminescence efficiency and free-carrier density in ZnO phosphor powders prepared by spray pyrolysis

Journal of luminescence, 1997-07, Vol.75 (1), p.11-16

1997

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Synthesis of Alumina- and Alumina/Silica-Coated Titania Particles in an Aerosol Flow Reactor

Chemistry of materials, 1997-03, Vol.9 (3), p.685-693

1997

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Generation and sintering characteristics of silver–copper (II) oxide composite powders made by spray pyrolysis

Powder technology, 2000-05, Vol.110 (1), p.76-81

2000

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Chemistry of copper(I) .beta.-diketonate complexes. 2. Synthesis, characterization, and physical properties of (.beta.-diketonato)copper(I) trimethylphosphine and bis(trimethylphosphine) complexes

Inorganic chemistry, 1992-02, Vol.31 (3), p.424-431

1992

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Aerosol-Assisted Chemical Vapor Deposition (AACVD) of Binary Alloy (AgxPd1-x, CuxPd1-x, AgxCu1-x) Films and Studies of Their Compositional Variation

Chemistry of materials, 1995-08, Vol.7 (8), p.1539-1546

1995

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Hot-wall chemical vapor deposition of copper from copper(I) compounds. 2. Selective, low-temperature deposition of copper from copper(I) .beta.-diketonate compounds, (.beta.-diketonate)CuLn, via thermally induced disproportionation reactions

Chemistry of materials, 1992-07, Vol.4 (4), p.788-795

1992

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Copper (I) oxide powder generation by spray pyrolysis

Journal of materials research, 1996-11, Vol.11 (11), p.2861-2868

1996

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Chemical vapor deposition of copper–cobalt binary films

Thin solid films, 1999-02, Vol.340 (1), p.45-52

1999

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Chemical Vapor Deposition of Copper from (hfac)CuL (L = VTMS and 2-Butyne) in the Presence of Water, Methanol, and Dimethyl Ether

Chemistry of materials, 1996-05, Vol.8 (5), p.1119-1127

1996

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Thermal dry-etching of copper using hydrogen peroxide and hexafluoroacetylacetone

Thin solid films, 1995-11, Vol.269 (1-2), p.51-56

1995

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Chemical vapor deposition of copper from (hexafluoroacetylacetonato)(alkyne)copper(I) complexes via disproportionation

Chemistry of materials, 1991-11, Vol.3 (6), p.995-997

1991

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Droplet evaporation and solute precipitation during spray pyrolysis

Journal of aerosol science, 1993-10, Vol.24 (7), p.893-908

1993

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Feed-Rate-Limited Aerosol-Assisted Chemical Vapor Deposition of CdxZn1-xS and ZnS:Mn with Composition Control

Chemistry of materials, 1998-03, Vol.10 (3), p.914-921

1998

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Preparation of Strontium Ferrite Particles by Spray Pyrolysis

Journal of the American Ceramic Society, 1995-11, Vol.78 (11), p.2973-2976

1995

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Control of selectivity during chemical vapor deposition of copper from copper (I) compounds via silicon dioxide surface modification

Applied physics letters, 1992-11, Vol.61 (22), p.2662-2664

1992

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Chemical vapor deposition of metals: Part 1. An overview of CVD processes

Chemical vapor deposition, 1995-07, Vol.1 (1), p.8-23

1995

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Low-Pressure Chemical Vapor Deposition of Cu−Pd Films: Alloy Growth Kinetics

Chemistry of materials, 1997-12, Vol.9 (12), p.2822-2829

1997

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The ash formation during co-combustion of wood and sludge in industrial fluidized bed boilers

Fuel processing technology, 1998-03, Vol.54 (1), p.79-94

1998

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Sequential gas-phase formation of Al2O3 and SiO2 layers on aerosol-made TiO2 Particles

Advanced materials (Weinheim), 1997, Vol.9 (5), p.420-423

1997

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The Chemistry of Metal CVD

Chemical Vapor Deposition of Copper from Hexafluoroacetylacetonato Copper(I) Vinyltrimethylsilane: Deposition Rates, Mechanism, Selectivity, Morphology, and Resistivity as a Function of Temperature and Pressure

Comparison of Solid-State and Spray-Pyrolysis Synthesis of Yttrium Aluminate Powders

The chemistry of metal CVD

Aerosol Processing of Materials

Morphology of Single-Component Particles Produced by Spray Pyrolysis

Green photoluminescence efficiency and free-carrier density in ZnO phosphor powders prepared by spray pyrolysis

Synthesis of Alumina- and Alumina/Silica-Coated Titania Particles in an Aerosol Flow Reactor

Generation and sintering characteristics of silver–copper (II) oxide composite powders made by spray pyrolysis

Chemistry of copper(I) .beta.-diketonate complexes. 2. Synthesis, characterization, and physical properties of (.beta.-diketonato)copper(I) trimethylphosphine and bis(trimethylphosphine) complexes

Aerosol-Assisted Chemical Vapor Deposition (AACVD) of Binary Alloy (AgxPd1-x, CuxPd1-x, AgxCu1-x) Films and Studies of Their Compositional Variation

Hot-wall chemical vapor deposition of copper from copper(I) compounds. 2. Selective, low-temperature deposition of copper from copper(I) .beta.-diketonate compounds, (.beta.-diketonate)CuLn, via thermally induced disproportionation reactions

Copper (I) oxide powder generation by spray pyrolysis

Chemical vapor deposition of copper–cobalt binary films

Chemical Vapor Deposition of Copper from (hfac)CuL (L = VTMS and 2-Butyne) in the Presence of Water, Methanol, and Dimethyl Ether

Thermal dry-etching of copper using hydrogen peroxide and hexafluoroacetylacetone

Chemical vapor deposition of copper from (hexafluoroacetylacetonato)(alkyne)copper(I) complexes via disproportionation

Droplet evaporation and solute precipitation during spray pyrolysis

Feed-Rate-Limited Aerosol-Assisted Chemical Vapor Deposition of CdxZn1-xS and ZnS:Mn with Composition Control

Preparation of Strontium Ferrite Particles by Spray Pyrolysis

Control of selectivity during chemical vapor deposition of copper from copper (I) compounds via silicon dioxide surface modification

Chemical vapor deposition of metals: Part 1. An overview of CVD processes

Low-Pressure Chemical Vapor Deposition of Cu−Pd Films: Alloy Growth Kinetics

The ash formation during co-combustion of wood and sludge in industrial fluidized bed boilers

Sequential gas-phase formation of Al2O3 and SiO2 layers on aerosol-made TiO2 Particles

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