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Processing and charge state engineering of MoOx

AIP advances, 2017-01, Vol.7 (1), p.015034-015034-6

2017

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A correlative experimental and ab initio approach to improve the fracture behavior of Mo thin films by alloying with Cu

Applied physics letters, 2017-09, Vol.111 (13)

2017

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Whole powder pattern decomposition - An application for the evaluation of residual stress states in consideration of steep stress gradients

Thin solid films, 2016-09, Vol.615, p.183-189

2016

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Deformation behavior of Re alloyed Mo thin films on flexible substrates: In situ fragmentation analysis supported by first-principles calculations

Scientific reports, 2017-08, Vol.7 (1), p.7374-10, Article 7374

2017

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Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density

Surface & coatings technology, 2007-01, Vol.201 (8), p.4777-4780

2007

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26-4: Highly Oxidation-Resistant Mo-Alloys for Metal-Oxide TFT Metallization

SID International Symposium Digest of technical papers, 2016-05, Vol.47 (1), p.330-332

2016

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P-145: Optimization of Molybdenum Oxides for Low-Reflectance Thin Films using Numerical Simulation

SID International Symposium Digest of technical papers, 2015-06, Vol.46 (1), p.1741-1743

2015

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Residual stress determination in thin films by X-ray diffraction and the widespread analytical practice applying a biaxial stress model: An outdated oversimplification?

Applied surface science, 2021-03, Vol.541, p.148531, Article 148531

2021

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Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2022-03, Vol.40 (2)

2022

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Electro-mechanical behavior of Al/Mo bilayers studied with in situ straining methods

Thin solid films, 2018-11, Vol.665, p.131-136

2018

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Improved electro-mechanical reliability of flexible systems with alloyed Mo-Ta adhesion layers

Thin solid films, 2021-02, Vol.720, p.138533, Article 138533

2021

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The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties

Surface & coatings technology, 2020-01, Vol.381, p.125174, Article 125174

2020

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48.4: Galvanic Corrosion of Molybdenum Alloys and Oxides in contact with Copper for Thin Film Transistors using Evans Diagrams

SID International Symposium Digest of technical papers, 2021-08, Vol.52 (S2), p.588-590

2021

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Correlation of mechanical damage and electrical behavior of Al/Mo bilayers subjected to bending

Thin solid films, 2019-10, Vol.687, p.137480, Article 137480

2019

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Structure evolution in reactively sputtered molybdenum oxide thin films

Vacuum, 2016-09, Vol.131, p.246-251

2016

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Oxidation and wet-etching behavior of MoAlTi thin films deposited by sputtering from a rotatable MoAlTi compound target

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2019-03, Vol.37 (2)

2019

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A Comparison of 90° Bending for Foldable Electronics

Coatings (Basel), 2024-01, Vol.14 (1), p.98

2024

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Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets

Surface & coatings technology, 2017-12, Vol.332, p.80-85

2017

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Oxidation and wet etching behavior of sputtered Mo-Ti-Al films

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2018-03, Vol.36 (2)

2018

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Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2017-03, Vol.35 (2)

2017

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15‐3: Resistance Reduction of Mo Metallization by W Seed Layer

SID International Symposium Digest of technical papers, 2020-08, Vol.51 (1), p.200-203

2020

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Optimization of doped lanthanated tungsten components in ion sources by determining the temperature profile for halogen processes

MRS advances, 2022-12, Vol.7 (36), p.1530-1533

2022

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Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoO^sub x^ targets

Surface & coatings technology, 2017-12, Vol.332, p.80

2017

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Structure, stresses and stress relaxation of TiN/Cu multilayer and nanocomposite coatings

International journal of materials research, 2009-08, Vol.100 (8), p.1114-1118

2009

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Balancing the electro-mechanical and interfacial performance of Mo-based alloy films

Materialia, 2020-08, Vol.12, p.100774, Article 100774

2020

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Processing and charge state engineering of MoOx

A correlative experimental and ab initio approach to improve the fracture behavior of Mo thin films by alloying with Cu

Whole powder pattern decomposition - An application for the evaluation of residual stress states in consideration of steep stress gradients

Deformation behavior of Re alloyed Mo thin films on flexible substrates: In situ fragmentation analysis supported by first-principles calculations

Annealing of intrinsic stresses in sputtered TiN films: The role of thickness-dependent gradients of point defect density

26-4: Highly Oxidation-Resistant Mo-Alloys for Metal-Oxide TFT Metallization

P-145: Optimization of Molybdenum Oxides for Low-Reflectance Thin Films using Numerical Simulation

Residual stress determination in thin films by X-ray diffraction and the widespread analytical practice applying a biaxial stress model: An outdated oversimplification?

Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals

Electro-mechanical behavior of Al/Mo bilayers studied with in situ straining methods

Improved electro-mechanical reliability of flexible systems with alloyed Mo-Ta adhesion layers

The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties

48.4: Galvanic Corrosion of Molybdenum Alloys and Oxides in contact with Copper for Thin Film Transistors using Evans Diagrams

Correlation of mechanical damage and electrical behavior of Al/Mo bilayers subjected to bending

Structure evolution in reactively sputtered molybdenum oxide thin films

Oxidation and wet-etching behavior of MoAlTi thin films deposited by sputtering from a rotatable MoAlTi compound target

A Comparison of 90° Bending for Foldable Electronics

Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets

Oxidation and wet etching behavior of sputtered Mo-Ti-Al films

Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

15‐3: Resistance Reduction of Mo Metallization by W Seed Layer

Optimization of doped lanthanated tungsten components in ion sources by determining the temperature profile for halogen processes

Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoO^sub x^ targets

Structure, stresses and stress relaxation of TiN/Cu multilayer and nanocomposite coatings

Balancing the electro-mechanical and interfacial performance of Mo-based alloy films

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