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High speed imaging of Z-pinch gas discharge in extreme ultraviolet and model-based three-dimensional reconstruction of emitting volume

Review of scientific instruments, 2022-01, Vol.93 (1)

2022

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Structural properties of templated Ge quantum dot arrays: impact of growth and pre-pattern parameters

Nanotechnology, 2018-07, Vol.29 (27), p.275601-275601

2018

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Ptychographic imaging with a compact gas-discharge plasma extreme ultraviolet light source

Optics letters, 2015-12, Vol.40 (23), p.5574-5577

2015

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A phase retrieval algorithm based on three-dimensionally translated diffraction patterns

Europhysics letters, 2015-09, Vol.111 (6), p.64002-p1-64002-p5

2015

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Optical properties of 2D fractional Talbot patterns under coherent EUV illumination

Journal of physics. D, Applied physics, 2015-09, Vol.48 (37), p.375101-7

2015

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Analysis of buried interfaces in multilayer mirrors using grazing incidence extreme ultraviolet reflectometry near resonance edges

Applied Optics, 2015-12, Vol.54 (35), p.10351

2015

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Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography

Thin solid films, 2012-05, Vol.520 (15), p.5080-5085

2012

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Laser triggered Z-pinch broadband extreme ultraviolet source for metrology

Applied physics letters, 2013-05, Vol.102 (20)

2013

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Spectral Sharpening Algorithm for a Polychromatic Reflectometer in the Extreme Ultraviolet

Applied spectroscopy, 2010-04, Vol.64 (4), p.401-408

2010

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EUV Dark-Field Microscopy for Defect Inspection

AIP conference proceedings, 2011, Vol.1365 (1)

2011

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Optimization of a gas discharge plasma source for extreme ultraviolet interference lithography at a wavelength of 11 nm

Journal of applied physics, 2009-10, Vol.106 (7), p.073309-073309-5

2009

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Extreme ultraviolet free-standing transmittance filters for high brilliance sources, based on Nb/Zr and Zr/Nb thin films on Si3N4 membranes: Design, fabrication, optical and structural characterization

Thin solid films, 2020-02, Vol.695, p.137739, Article 137739

2020

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EUV emission from Kr and Xe capillary discharge plasmas

Journal of physics. D, Applied physics, 2002-02, Vol.35 (3), p.219-227

2002

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X-ray lasing as a result of an induced instability in an ablative capillary discharge

Journal of physics. D, Applied physics, 2001-02, Vol.34 (3), p.336-339

2001

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Fundamentals and limits for the EUV emission of pinch plasma sources for EUV lithography

Journal of physics. D, Applied physics, 2004-12, Vol.37 (23), p.3213-3224

2004

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Deposition and characterization of B4C/CeO2 multilayers at 6.x nm extreme ultraviolet wavelengths

Journal of applied physics, 2016-03, Vol.119 (9)

2016

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A capillary discharge as a pseudo-Planck radiator in the vacuum ultraviolet

Plasma sources science & technology, 1999-08, Vol.8 (3), p.370-375

1999

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Pinch Plasma Radiation Sources for the Extreme Ultraviolet

Contributions to plasma physics (1985), 2001-11, Vol.41 (6), p.589-597

2001

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Quantum Efficiency Determination of a Novel CMOS Design for Fast Imaging Applications in the Extreme Ultraviolet

IEEE transactions on electron devices, 2012-03, Vol.59 (3), p.846-849

2012

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Investigation of Dense Argon Plasmas in a Simple Capillary Discharge

Contributions to plasma physics (1988), 2000-04, Vol.40 (1-2), p.130-134

2000

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Nanophotonic Applications of FS-Laser Radiation Induced Nanostructures and Their Theoretical Description

Optically Induced Nanostructures, 2015, p.1-1

2015

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EUV emission from Kr and Xe capillary discharge plasmas

Journal of physics. D, Applied physics, 2002, Vol.35 (3), p.219-227

2002

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X-ray lasing as a result of an induced instability in an ablative capillary discharge

Journal of physics. D, Applied physics, 2001, Vol.34 (3), p.336-339

2001

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Coherent Diffractive Imaging with a Laboratory-Scale, Gas-Discharge Plasma Extreme Ultraviolet Light Source

X-Ray Lasers 2014, p.275-280

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Investigation of X-ray lasing in a capillary discharge

Le Journal de Physique IV, 2001-07, Vol.11 (PR2), p.Pr2-103-Pr2-106

2001

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High speed imaging of Z-pinch gas discharge in extreme ultraviolet and model-based three-dimensional reconstruction of emitting volume

Structural properties of templated Ge quantum dot arrays: impact of growth and pre-pattern parameters

Ptychographic imaging with a compact gas-discharge plasma extreme ultraviolet light source

A phase retrieval algorithm based on three-dimensionally translated diffraction patterns

Optical properties of 2D fractional Talbot patterns under coherent EUV illumination

Analysis of buried interfaces in multilayer mirrors using grazing incidence extreme ultraviolet reflectometry near resonance edges

Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography

Laser triggered Z-pinch broadband extreme ultraviolet source for metrology

Spectral Sharpening Algorithm for a Polychromatic Reflectometer in the Extreme Ultraviolet

EUV Dark-Field Microscopy for Defect Inspection

Optimization of a gas discharge plasma source for extreme ultraviolet interference lithography at a wavelength of 11 nm

Extreme ultraviolet free-standing transmittance filters for high brilliance sources, based on Nb/Zr and Zr/Nb thin films on Si3N4 membranes: Design, fabrication, optical and structural characterization

EUV emission from Kr and Xe capillary discharge plasmas

X-ray lasing as a result of an induced instability in an ablative capillary discharge

Fundamentals and limits for the EUV emission of pinch plasma sources for EUV lithography

Deposition and characterization of B4C/CeO2 multilayers at 6.x nm extreme ultraviolet wavelengths

A capillary discharge as a pseudo-Planck radiator in the vacuum ultraviolet

Pinch Plasma Radiation Sources for the Extreme Ultraviolet

Quantum Efficiency Determination of a Novel CMOS Design for Fast Imaging Applications in the Extreme Ultraviolet

Investigation of Dense Argon Plasmas in a Simple Capillary Discharge

Nanophotonic Applications of FS-Laser Radiation Induced Nanostructures and Their Theoretical Description

EUV emission from Kr and Xe capillary discharge plasmas

X-ray lasing as a result of an induced instability in an ablative capillary discharge

Coherent Diffractive Imaging with a Laboratory-Scale, Gas-Discharge Plasma Extreme Ultraviolet Light Source

Investigation of X-ray lasing in a capillary discharge

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