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High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements

Applied surface science, 1999, Vol.138, p.111-116

1999

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Effect of inert gas additive species on Cl2 high density plasma etching of compound semiconductors

Applied surface science, 1999-05, Vol.147 (1-4), p.207-214

1999

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Effect of inert gas additive species on Cl2 high density plasma etching of compound semiconductors

Applied surface science, 1999-05, Vol.147 (1-4), p.215-221

1999

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Plasma etching of NiFe/Cu and NiMnSb/Al2O3 multilayers for sub-micron pattern definition

Journal of magnetism and magnetic materials, 1999-06, Vol.198-199, p.204-206

1999

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Selective dry etching using inductively coupled plasmas

Applied surface science, 1999-05, Vol.147 (1-4), p.125-133

1999

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Growth and fabrication of GaN/AlGaN heterojunction bipolar transistor

Applied physics letters, 1999-05, Vol.74 (18), p.2702-2704

1999

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Increased macrosomia and perinatal morbidity independent of maternal obesity and advanced age in Korean women with GDM

Diabetes care, 1997-10, Vol.20 (10), p.1582-1588

1997

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Effect of inert gas additive species on Cl 2 high density plasma etching of compound semiconductors : Part II. InP, InSb, InGaP and InGaAs

Applied surface science, 1999-05, Vol.147 (1), p.215-221

1999

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Effect of inert gas additive species on Cl 2 high density plasma etching of compound semiconductors : Part I. GaAs and GaSb

Applied surface science, 1999-05, Vol.147 (1), p.207-214

1999

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GaN/AlGaN HBT fabrication

Solid-state electronics, 2000-02, Vol.44 (2), p.239-244

2000

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Inductively coupled plasma etchingof in-based compound semiconductorsin CH4/H2/Ar

Solid-state electronics, 1998-11, Vol.42 (11), p.1947-1951

1998

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GaN PN junction issues and developments

Solid-state electronics, 2000-02, Vol.44 (2), p.377-381

2000

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Cl 2-based inductively coupled plasma etching of CoFeB, CoSm, CoZr and FeMn

Materials science & engineering. B, Solid-state materials for advanced technology, 1999-06, Vol.60 (2), p.101-106

1999

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Plasma etching of NiFe/Cu and NiMnSb/Al 2O 3 multilayers for sub-micron pattern definition

Journal of magnetism and magnetic materials, 1999, Vol.198, p.204-206

1999

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Inductively coupled plasma etchingof in-based compound semiconductorsin CH 4/H 2/Ar

Solid-state electronics, 1998, Vol.42 (11), p.1947-1951

1998

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Cl2-based inductively coupled plasma etching of CoFeB, CoSm, CoZr and FeMn

Materials science & engineering. B, Solid-state materials for advanced technology, 1999-06, Vol.60 (2), p.101-106

1999

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Selective dry etching using inductively coupled plasmas

Applied surface science, 1999-05, Vol.147 (1-4), p.134-139

1999

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Selective dry etching using inductively coupled plasmas: Part II. InN/GaN and InN/AlN

Applied surface science, 1999, Vol.147 (1), p.134-139

1999

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Comparison of ICl- and IBr-based plasma chemistries for inductively coupled plasma etching of GaN, InN and AlN

Materials science & engineering. B, Solid-state materials for advanced technology, 1999-06, Vol.60 (2), p.95-100

1999

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Screening for gestational diabetes mellitus in Korea

International journal of gynecology and obstetrics, 1995-11, Vol.51 (2), p.115-122

1995

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Selective dry etching using inductively coupled plasmas: Part I. GaAs/AlGaAs and GaAs/InGaP

Applied surface science, 1999, Vol.147 (1), p.125-133

1999

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Interhalogen plasma chemistries for dry etch patterning of Ni, Fe, NiFe and NiFeCo thin films

Applied surface science, 1999-02, Vol.140 (1), p.215-222

1999

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Dry Etching of MRAM Structures

MRS proceedings, 2000, Vol.614, Article F10.2.1

2000

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New-shaped electrode for AC-PDP for enhancement of luminous efficiency in AC-PDP

The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts, 2003, p.220

2003

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Influence of wall charge configurations prior to addressing discharge on dynamic margin in AC plasma display panel

The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts, 2003, p.134

2003

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High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements

Effect of inert gas additive species on Cl2 high density plasma etching of compound semiconductors

Effect of inert gas additive species on Cl2 high density plasma etching of compound semiconductors

Plasma etching of NiFe/Cu and NiMnSb/Al2O3 multilayers for sub-micron pattern definition

Selective dry etching using inductively coupled plasmas

Growth and fabrication of GaN/AlGaN heterojunction bipolar transistor

Increased macrosomia and perinatal morbidity independent of maternal obesity and advanced age in Korean women with GDM

Effect of inert gas additive species on Cl 2 high density plasma etching of compound semiconductors : Part II. InP, InSb, InGaP and InGaAs

Effect of inert gas additive species on Cl 2 high density plasma etching of compound semiconductors : Part I. GaAs and GaSb

GaN/AlGaN HBT fabrication

Inductively coupled plasma etchingof in-based compound semiconductorsin CH4/H2/Ar

GaN PN junction issues and developments

Cl 2-based inductively coupled plasma etching of CoFeB, CoSm, CoZr and FeMn

Plasma etching of NiFe/Cu and NiMnSb/Al 2O 3 multilayers for sub-micron pattern definition

Inductively coupled plasma etchingof in-based compound semiconductorsin CH 4/H 2/Ar

Cl2-based inductively coupled plasma etching of CoFeB, CoSm, CoZr and FeMn

Selective dry etching using inductively coupled plasmas

Selective dry etching using inductively coupled plasmas: Part II. InN/GaN and InN/AlN

Comparison of ICl- and IBr-based plasma chemistries for inductively coupled plasma etching of GaN, InN and AlN

Screening for gestational diabetes mellitus in Korea

Selective dry etching using inductively coupled plasmas: Part I. GaAs/AlGaAs and GaAs/InGaP

Interhalogen plasma chemistries for dry etch patterning of Ni, Fe, NiFe and NiFeCo thin films

Dry Etching of MRAM Structures

New-shaped electrode for AC-PDP for enhancement of luminous efficiency in AC-PDP

Influence of wall charge configurations prior to addressing discharge on dynamic margin in AC plasma display panel

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