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Anchor Loss in Hemispherical Shell Resonators

Journal of microelectromechanical systems, 2017-02, Vol.26 (1), p.51-66

2017

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Thermoelastic Dissipation in Micromachined Birdbath Shell Resonators

Journal of microelectromechanical systems, 2017-08, Vol.26 (4), p.758-772

2017

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Simulation of Blowtorch Reflow of Fused Silica Micro-Shell Resonators

Journal of microelectromechanical systems, 2017-08, Vol.26 (4), p.782-792

2017

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Fused-Silica Micro Birdbath Resonator Gyroscope ( \mu-BRG)

Journal of microelectromechanical systems, 2014-02, Vol.23 (1), p.66-77

2014

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3-Dimensional Blow Torch-Molding of Fused Silica Microstructures

Journal of microelectromechanical systems, 2013-12, Vol.22 (6), p.1276-1284

2013

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259 Second ring-down time and 4.45 million quality factor in 5.5 kHz fused silica birdbath shell resonator

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017, p.790-793

2017

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A high-q all-fused silica solid-stem wineglass hemispherical resonator formed using micro blow torching and welding

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015, p.821-824

2015

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Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes

2018 IEEE/ION Position, Location and Navigation Symposium (PLANS), 2018, p.15-19

2018

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Shell-in-Shell (SiS): 3D Shell Resonator with 3D Conformal Shell Electrodes

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2020, p.1-4

2020

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Effect of drive-axis displacement on MEMS Birdbath Resonator Gyroscope performance

2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2017, p.1-2

2017

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Numerical study of impact of surface roughness on thermoelastic loss of micro-resonators

2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2017, p.74-77

2017

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Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WA-BRG)

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), 2014, p.20-23

2014

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Effect of Electrode Design on Frequency Tuning in Shell Resonators

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2019, p.1-4

2019

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Effect of metal annealing on the Q-factor of metal- coated fused silica micro shell resonators

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings, 2015, p.1-5

2015

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Resonant Characteristics of Birdbath Shell Resonator in n =3 Wine-Glass Mode

2018 IEEE SENSORS, 2018, p.1-4

2018

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Fused-Silica Micro Birdbath Resonator Gyroscope μ-BRG

Journal of microelectromechanical systems, 2014, Vol.23 (1), p.66-77

2014

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Low-Cost, High-Throughput Process Using HF Acid to Singulate Fused-Silica Shell Resonators with High-Q

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2020, p.1-4

2020

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Non-Destructive Characterization of High Aspect-Ratio Structures Using 3D X-Ray Microscopy

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2023, p.1-4

2023

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High-performance micromachined vibratory rate- and rate-integrating gyroscopes

Cho, Jae Yoong

2012

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1.5-Million Q-Factor Vacuum-Packaged Birdbath Resonator Gyroscope (BRG)

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019, p.210-213

2019

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High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019, p.668-671

2019

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High Q-Factor Mode-Matched Silicon Gyroscope with a Ladder Structure

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2020, p.1-4

2020

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0.00016 deg/√hr Angle Random Walk (ARW) and 0.0014 deg/hr Bias Instability (BI) from a 5.2M-Q and 1-cm Precision Shell Integrating (PSI) Gyroscope

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2020, p.1-4

2020

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Fabrication of hemispherical fused silica micro-resonator with tailored stiffness and mass distribution

2018 IEEE Micro Electro Mechanical Systems (MEMS), 2018, p.1000-1003

2018

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0.0062\ ^/\sqrt Angle Random Walk and 0.027\ ^/hr Bias Instability from a Micro-Shell Resonator Gyroscope with Surface Electrodes

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, p.737-740

2020

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Fused Silica
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Anchor Loss in Hemispherical Shell Resonators

Thermoelastic Dissipation in Micromachined Birdbath Shell Resonators

Simulation of Blowtorch Reflow of Fused Silica Micro-Shell Resonators

Fused-Silica Micro Birdbath Resonator Gyroscope ( \mu-BRG)

3-Dimensional Blow Torch-Molding of Fused Silica Microstructures

259 Second ring-down time and 4.45 million quality factor in 5.5 kHz fused silica birdbath shell resonator

A high-q all-fused silica solid-stem wineglass hemispherical resonator formed using micro blow torching and welding

Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes

Shell-in-Shell (SiS): 3D Shell Resonator with 3D Conformal Shell Electrodes

Effect of drive-axis displacement on MEMS Birdbath Resonator Gyroscope performance

Numerical study of impact of surface roughness on thermoelastic loss of micro-resonators

Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WA-BRG)

Effect of Electrode Design on Frequency Tuning in Shell Resonators

Effect of metal annealing on the Q-factor of metal- coated fused silica micro shell resonators

Resonant Characteristics of Birdbath Shell Resonator in n =3 Wine-Glass Mode

Fused-Silica Micro Birdbath Resonator Gyroscope μ-BRG

Low-Cost, High-Throughput Process Using HF Acid to Singulate Fused-Silica Shell Resonators with High-Q

Non-Destructive Characterization of High Aspect-Ratio Structures Using 3D X-Ray Microscopy

High-performance micromachined vibratory rate- and rate-integrating gyroscopes

1.5-Million Q-Factor Vacuum-Packaged Birdbath Resonator Gyroscope (BRG)

High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes

High Q-Factor Mode-Matched Silicon Gyroscope with a Ladder Structure

0.00016 deg/√hr Angle Random Walk (ARW) and 0.0014 deg/hr Bias Instability (BI) from a 5.2M-Q and 1-cm Precision Shell Integrating (PSI) Gyroscope

Fabrication of hemispherical fused silica micro-resonator with tailored stiffness and mass distribution

0.0062\ ^/\sqrt Angle Random Walk and 0.027\ ^/hr Bias Instability from a Micro-Shell Resonator Gyroscope with Surface Electrodes

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