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Sheath collision processes controlling the energy and directionality of surface bombardment in O2 reactive ion etching

Journal of applied physics, 1988-07, Vol.64 (2), p.590-597

Jurgensen, C. W.

1988

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Simulation of reactive ion etching pattern transfer

Journal of applied physics, 1989-11, Vol.66 (10), p.4664-4675

1989

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The effect of pressure on the optical absorption edge of sulfur to 300 kbar

The Journal of chemical physics, 1984-12, Vol.81 (12), p.6407-6408

1984

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Formation of monolithic masks for 0.25 μm x-ray lithography

Applied physics letters, 1991-12, Vol.59 (24), p.3105-3107

1991

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High-pressure studies of the neutral-to-ionic transition in some organic charge-transfer solids

Chemical physics letters, 1986-04, Vol.125 (5), p.554-556

1986

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The effect of pressure on electronic excitations in TCNQ and its complexes

The Journal of chemical physics, 1986-01, Vol.84 (2), p.649-653

1986

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The effect of high pressure of the electronic and infrared spectra of TCNE and its charge transfer complexes with hexamethylbenzene

The Journal of chemical physics, 1985-01, Vol.83 (12), p.6108-6112

1985

Volltextzugriff (PDF)

Glutathione metabolism and dimorphism in Aureobasidium pullulans

Journal of basic microbiology, 2001-05, Vol.41 (2), p.131-137

2001

Volltextzugriff (PDF)

Nonlocal transport models of the self-consistent potential distribution in a plasma sheath with charge transfer collisions

Journal of applied physics, 1988-12, Vol.64 (11), p.6200-6209

1988

Volltextzugriff (PDF)

High-pressure studies of the absorption edges of three thallous halides

Physical review. B, Condensed matter, 1984-12, Vol.30 (12), p.7202-7205

1984

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Sheath collision controlling the energy and directionality of surface bombardment in O2 reactive ion etching

Journal of applied physics, 1988, Vol.64 (2), p.590-597

JURGENSEN, C. W

1988

Volltextzugriff (PDF)

Factors controlling the etching rate and etching profile in the O2 reactive ion etching pattern transfer step in multilevel lithography

Polymer engineering and science, 1989-07, Vol.29 (13), p.878-881

1989

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Factors controlling the etching rate and etching profile in the O 2 reactive ion etching pattern transfer step in multilevel lithography

Polymer engineering and science, 1989-07, Vol.29 (13), p.878-881

1989

Volltextzugriff (PDF)

Kinetic theory of bombardment induced interface evolution

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1989-11, Vol.7 (6), p.1488-1492

1989

Volltextzugriff (PDF)

Effect of plasma exchange in accelerating natalizumab clearance and restoring leukocyte function

Neurology, 2009-02, Vol.72 (5), p.402

2009

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Transluminal endoscopic necrosectomy after acute pancreatitis: a multicentre study with long-term follow-up (the GEPARD Study)

Gut, 2009-09, Vol.58 (9), p.1260-1266

2009

Volltextzugriff (PDF)

Randomised clinical trial: vercirnon, an oral CCR9 antagonist, vs. placebo as induction therapy in active Crohn's disease

Alimentary pharmacology & therapeutics, 2015-11, Vol.42 (10), p.1170-1181

2015

Volltextzugriff (PDF)

Prevention of non-melanoma skin cancer in organ transplant patients by regular use of a sunscreen: a 24 months, prospective, case-control study

British journal of dermatology (1951), 2009-11, Vol.161 (s3), p.78-84

2009

Volltextzugriff (PDF)

Evaluation of the symbol digit modalities test (SDMT) and MS neuropsychological screening questionnaire (MSNQ) in natalizumab-treated MS patients over 48 weeks

Multiple sclerosis, 2010-11, Vol.16 (11), p.1385-1392

2010

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Fusion transcript analysis reveals slower response kinetics than multiparameter flow cytometry in childhood acute myeloid leukaemia

International journal of laboratory hematology, 2022-12, Vol.44 (6), p.1094-1101

2022

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Lycopodium Spores in Transrectal Ultrasound-guided Core Biopsies of the Prostate

Scandinavian journal of urology and nephrology, 1998, Vol.32 (2), p.148-149

1998

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Recovery of carbon and nutrient pools in a northern forested wetland 11 years after harvesting and site preparation

Forest ecology and management, 2011-11, Vol.262 (9), p.1826-1833

2011

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Widespread, hypoxia‐inducible expression of HIF‐2α in distinct cell populations of different organs

The FASEB journal, 2003-02, Vol.17 (2), p.271-273

2003

Volltextzugriff (PDF)

Soil organic matter and nitrogen cycling in response to harvesting, mechanical site preparation, and fertilization in a wetland with a mineral substrate

Forest ecology and management, 2000-04, Vol.129 (1), p.7-23

2000

Volltextzugriff (PDF)

Priming with r-metHuSCF and filgrastim or chemotherapy and filgrastim in patients with malignant lymphomas: a randomized phase II pilot study of mobilization and engraftment

Bone marrow transplantation (Basingstoke), 2011-01, Vol.46 (1), p.44-51

2011

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Sheath collision processes controlling the energy and directionality of surface bombardment in O2 reactive ion etching

Simulation of reactive ion etching pattern transfer

The effect of pressure on the optical absorption edge of sulfur to 300 kbar

Formation of monolithic masks for 0.25 μm x-ray lithography

High-pressure studies of the neutral-to-ionic transition in some organic charge-transfer solids

The effect of pressure on electronic excitations in TCNQ and its complexes

The effect of high pressure of the electronic and infrared spectra of TCNE and its charge transfer complexes with hexamethylbenzene

Glutathione metabolism and dimorphism in Aureobasidium pullulans

Nonlocal transport models of the self-consistent potential distribution in a plasma sheath with charge transfer collisions

High-pressure studies of the absorption edges of three thallous halides

Sheath collision controlling the energy and directionality of surface bombardment in O2 reactive ion etching

Factors controlling the etching rate and etching profile in the O2 reactive ion etching pattern transfer step in multilevel lithography

Factors controlling the etching rate and etching profile in the O 2 reactive ion etching pattern transfer step in multilevel lithography

Kinetic theory of bombardment induced interface evolution

Effect of plasma exchange in accelerating natalizumab clearance and restoring leukocyte function

Transluminal endoscopic necrosectomy after acute pancreatitis: a multicentre study with long-term follow-up (the GEPARD Study)

Randomised clinical trial: vercirnon, an oral CCR9 antagonist, vs. placebo as induction therapy in active Crohn's disease

Prevention of non-melanoma skin cancer in organ transplant patients by regular use of a sunscreen: a 24 months, prospective, case-control study

Evaluation of the symbol digit modalities test (SDMT) and MS neuropsychological screening questionnaire (MSNQ) in natalizumab-treated MS patients over 48 weeks

Fusion transcript analysis reveals slower response kinetics than multiparameter flow cytometry in childhood acute myeloid leukaemia

Lycopodium Spores in Transrectal Ultrasound-guided Core Biopsies of the Prostate

Recovery of carbon and nutrient pools in a northern forested wetland 11 years after harvesting and site preparation

Widespread, hypoxia‐inducible expression of HIF‐2α in distinct cell populations of different organs

Soil organic matter and nitrogen cycling in response to harvesting, mechanical site preparation, and fertilization in a wetland with a mineral substrate

Priming with r-metHuSCF and filgrastim or chemotherapy and filgrastim in patients with malignant lymphomas: a randomized phase II pilot study of mobilization and engraftment

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