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A Novel and Convenient Method for Monitoring Processing Plasma: The Insulated Pulse Probe Method

Japanese Journal of Applied Physics, 1998-03, Vol.37 (3R), p.970

1998

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Insulated Probe Method Using Transmission Line for Monitoring RF Plasmas

Japanese Journal of Applied Physics, 2002-08, Vol.41 (Part 1, No. 8), p.5424-5431, Article 5424

2002

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On the Effect of Film Deposition on Probe Surface in Measurement by the Insulated Pulse Probe Method

Japanese Journal of Applied Physics, 2002-01, Vol.41 (Part 1, No. 1), p.352-361

2002

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Simple Monitoring Method for RF Plasmas by the Insulated Pulse Probe Method

Japanese Journal of Applied Physics, 2002, Vol.41 (Part 1, No. 7A), p.4700-4719

2002

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Insulated Modulation Probe Method for Monitoring RF Plasmas

Japanese Journal of Applied Physics, 2002, Vol.41 (Part 1, No. 7A), p.4720-4728

2002

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Development and Plasma Characteristics Measurement of Planar-Type Magnetic Neutral Loop Discharge Etcher

Japanese Journal of Applied Physics, 1998-08, Vol.37 (8R), p.4572

1998

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Two-dimensional modelling of electron cyclotron resonance plasma production

Journal of applied physics, 1992-10, Vol.72 (7), p.2652-2658

1992

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The effect of oxygen on the delay time of flashover by a laser-produced plasma

Japanese Journal of Applied Physics, 1997-05, Vol.36 (5A), p.2870-2873

1997

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Performance of Electron Cycrotron Resonance Plasma Produced by a New Microwave Launching System in a Multicusp Magnetic Field with Permanent Magnets

Japanese Journal of Applied Physics, 1992-05, Vol.31 (5R), p.1473

1992

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Production of large diameter plasma by using multi-annular antenna for electron cyclotron resonance

Plasma sources science & technology, 1996-02, Vol.5 (1), p.28-31

1996

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Generation of Atmospheric-Pressure Glow Discharge and Its Applications 4.Technical Issues and Future Prospects of Non-Thermal Atmospheric-Pressure Plasma

Journal of Plasma and Fusion Research, 2003, Vol.79(10), pp.1029-1031

ITATANI, Ryohei

2003

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Effects of permanent magnet arrangements and antenna locations on the generation of multicusp electron cyclotron resonance plasma

Review of scientific instruments, 1992-01, Vol.63 (1), p.21-30

1992

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Physics of reactive plasmas for material tailoring

Plasmas & ions, 1998-09, Vol.1 (1), p.37-44

Itatani, Ryohei

1998

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A probe for measurements of negative and positive ions in a plasma

Japanese Journal of Applied Physics, 1985-01, Vol.24 (4), p.512-513

1985

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Energy and momentum deposition in plasmas due to the lower hybrid wave by a finite source

The Physics of fluids (1958), 1982-12, Vol.25 (12), p.2234-2248

1982

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Control of reactive plasmas: adventure to improve and to expand plasma processing

Pure and applied chemistry, 1992-01, Vol.64 (5), p.697-702

Itatani, Ryohei

1992

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High‐energy tail formation by a monochromatic wave in the magnetized plasma

The Physics of fluids (1958), 1980-12, Vol.23 (12), p.2417-2424

1980

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Suppression of electron waves in relation to the deformation of the electron beam distribution function

Physics letters. A, 1978-09, Vol.68 (1), p.59-62

1978

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Deformation of the Electron Beam Distribution Function and Suppression of Electron Waves

Journal of the Physical Society of Japan, 1977-01, Vol.42 (1), p.357-358

1977

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The Properties of Collision in the Plasma Composed of the Finite-Sized Particles of 2-Species

Journal of the Physical Society of Japan, 1976-01, Vol.41 (4), p.1364-1369

1976

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New light sources

Shomei Gakkai shi, 1991-11, Vol.75 (11), p.666-667

Itatani, Ryohei

1991

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New light sources

JOURNAL OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN, 1991/11/01, Vol.75(11), pp.666-667

Itatani, Ryohei

1991

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Collisional Diffusion in a Toroidal Pinch

Journal of the Physical Society of Japan, 1973-01, Vol.34 (1), p.181-188

1973

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Excitation of Flute-Type Negative-Energy Ion-Cyclotron Waves due to Ion Gradient- B Drifts in High-β Mirror-Confined Plasmas

Journal of the Physical Society of Japan, 1980-01, Vol.49 (6), p.2331-2339

1980

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Computer simulation of nonlinear interaction between a cold beam and a weakly collisional plasma

The Physics of fluids (1958), 1979-02, Vol.22 (2), p.310-320

1979

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A Novel and Convenient Method for Monitoring Processing Plasma: The Insulated Pulse Probe Method

Insulated Probe Method Using Transmission Line for Monitoring RF Plasmas

On the Effect of Film Deposition on Probe Surface in Measurement by the Insulated Pulse Probe Method

Simple Monitoring Method for RF Plasmas by the Insulated Pulse Probe Method

Insulated Modulation Probe Method for Monitoring RF Plasmas

Development and Plasma Characteristics Measurement of Planar-Type Magnetic Neutral Loop Discharge Etcher

Two-dimensional modelling of electron cyclotron resonance plasma production

The effect of oxygen on the delay time of flashover by a laser-produced plasma

Performance of Electron Cycrotron Resonance Plasma Produced by a New Microwave Launching System in a Multicusp Magnetic Field with Permanent Magnets

Production of large diameter plasma by using multi-annular antenna for electron cyclotron resonance

Generation of Atmospheric-Pressure Glow Discharge and Its Applications 4.Technical Issues and Future Prospects of Non-Thermal Atmospheric-Pressure Plasma

Effects of permanent magnet arrangements and antenna locations on the generation of multicusp electron cyclotron resonance plasma

Physics of reactive plasmas for material tailoring

A probe for measurements of negative and positive ions in a plasma

Energy and momentum deposition in plasmas due to the lower hybrid wave by a finite source

Control of reactive plasmas: adventure to improve and to expand plasma processing

High‐energy tail formation by a monochromatic wave in the magnetized plasma

Suppression of electron waves in relation to the deformation of the electron beam distribution function

Deformation of the Electron Beam Distribution Function and Suppression of Electron Waves

The Properties of Collision in the Plasma Composed of the Finite-Sized Particles of 2-Species

New light sources

New light sources

Collisional Diffusion in a Toroidal Pinch

Excitation of Flute-Type Negative-Energy Ion-Cyclotron Waves due to Ion Gradient- B Drifts in High-β Mirror-Confined Plasmas

Computer simulation of nonlinear interaction between a cold beam and a weakly collisional plasma

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