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Installieren Sie die LibKey Nomad-Browsererweiterung und erhalten Sie von vielen Webseiten einfachen Zugriff auf lizenzierte Volltexte oder Open Access Publikationen. Mehr erfahren...Applied physics letters, 2007-01, Vol.90 (2), p.023116-023116-3
2007
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2014-11, Vol.32 (6)
2014
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2016-11, Vol.34 (6)
2016
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2011-11, Vol.29 (6), p.6
2011
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Optics express, 2008-06, Vol.16 (12), p.9106-9111
2008
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2012-11, Vol.30 (6)
2012
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Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2007-11, Vol.582 (1), p.254-257
2007
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Microelectronic engineering, 2009-04, Vol.86 (4), p.500-504
2009
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Journal of micro/nanolithography, MEMS, and MOEMS, 2009-04, Vol.8 (2), p.21203
2009
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2012 Conference on Lasers and Electro-Optics (CLEO), 2012, p.1-2
2012
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Nanolithography, 2014, p.xiii-xvi
- Feldman, Martin
- Smith, Bruce W.
- Rice, Bryan J.
- Groves, Timothy R.
- Utlaut, Mark
- Gallagher, Emily
- Hibbs, Michael
- Walsh, Michael
- Zhang, Feng
- Menon, Rajesh
- Smith, Henry I.
- Novembre, Anthony
- Liu, Sen
- Matsui, Shinji
- Takenaka, Mikihito
- Yoshida, Hiroshi
- Resnick, Doug
- Cheng, Xing
- Dastmalchi, Pouya
- Haddadpour, Ali
- Veronis, Georgios
- Daniels-Race, Theda
- Jiang, Li
- Korivi, Naga S.
- Isoyan, Artak
- Melvin, Lawrence S.
- Moon, Euclid E.
- Constantoudis, Vassilios
- Gogolides, Evangelos
- Patsis, George P.
- Yesilkoy, Filiz
- Ropp, Chad
- Cummins, Zach
- Probst, Roland
- Waks, Edo
- Shapiro, Benjamin
- Peckerar, Martin
- Feldman, M
2014
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- Journal Of Microlithography, Microfabrication, And Microsystems
- Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures
- Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
- Microelectronic Engineering
- Nuclear Instruments & Methods In Physics Research. Section A, Accelerators, Spectrometers, Detectors And Associated Equipment