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In-operando x-ray topography analysis of SiC metal–oxide–semiconductor field-effect transistors to visualize stacking fault expansion motions dynamically during operations

Journal of applied physics, 2021-10, Vol.130 (14)

2021

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Three-dimensional micro-X-ray topography using focused sheet-shaped X-ray beam

Scientific reports, 2023-07, Vol.13 (1), p.12381-12381, Article 12381

2023

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Effect of carbon coating on surface structure in annealing process of high-dose implanted/annealed SiC

Journal of applied physics, 2024-05, Vol.135 (18)

2024

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Determination of observable depth of dislocations in 4H-SiC by X-ray topography in back reflection

Japanese Journal of Applied Physics, 2017-10, Vol.56 (10), p.106601

2017

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Nucleation sites of expanded stacking faults detected by in operando x-ray topography analysis to design epitaxial layers for bipolar-degradation-free SiC MOSFETs

AIP advances, 2022-03, Vol.12 (3), p.035310-035310-12

2022

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Advanced X‐ray imaging at beamline 07 of the SAGA Light Source

Journal of synchrotron radiation, 2021-11, Vol.28 (6), p.1966-1977

2021

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Development of white and monochromatic X-ray topography system in SAGA-LS

Physica status solidi. A, Applications and materials science, 2011-11, Vol.208 (11), p.2516-2521

2011

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Warpage Structure of 4H-SiC after Implantation and Annealing Processes

Materials Science Forum, 2016-05, Vol.858, p.544-548

2016

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Characterization of Defect Structure in Epilayer Grown on On-Axis SiC by Synchrotron X-ray Topography

Journal of electronic materials, 2022-04, Vol.51 (4), p.1541-1547

2022

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Defect generation behavior in Czochralski-grown ScAlMgO4 crystal using synchrotron X-ray topography

Journal of crystal growth, 2023-02, Vol.603, p.126984, Article 126984

2023

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Expansion of beam width in exposure and crystal structure beamline (BL09) of SAGA-LS and applications using expanded beams

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2022-10, Vol.1041, p.167366, Article 167366

2022

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Enlargement of effective area in Schottky barrier diodes on heteroepitaxial (001) diamond substrates by defect reduction and their radiation tolerance

Diamond and related materials, 2024-08, Vol.147, p.111346, Article 111346

2024

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Interface Structures and Magnetic Properties of Exchanged-Coupled Co/Cu Multilayers Sputter-Grown on Ta Buffers

Japanese Journal of Applied Physics, 2006-05, Vol.45 (5R), p.4187

2006

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Development of High-Resolution Nuclear Emulsion Plates for Synchrotron X-Ray Topography Observation of Large-Size Semiconductor Wafers

Journal of electronic materials, 2023-05, Vol.52 (5), p.2951-2956

2023

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Observation of the Fixed Fe–CN–Mn Cluster in Cesium Manganese Hexacyanoferrate

Journal of the Physical Society of Japan, 2010-07, Vol.79 (7), p.74801

2010

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3D structure of threading screw dislocation at a deep location in 4H-SiC using 3D micro-X-ray topography

Japanese Journal of Applied Physics, 2024-02, Vol.63 (2), p.2

2024

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Correlation between crystal warpage and swelling of 4H-SiC through implantation and annealing

Semiconductor science and technology, 2020-10, Vol.35 (10), p.105008

2020

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Resistivity Measurement of P+-Implanted 4H-SiC Samples Prepared at Different Implantation and Annealing Temperatures Using Terahertz Time-Domain Spectroscopic Ellipsometry

Materials science forum, 2020-07, Vol.1004, p.272-277

2020

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Observation of phase transition of cesium manganese hexacyanoferrates by X-ray absorption spectroscopy

The Journal of physics and chemistry of solids, 2007-11, Vol.68 (11), p.2158-2161

2007

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Probing the Magnetic Polarizations of Delocalized Electrons in Exchange-coupled Co/CuNi Multilayers by X-ray Magnetic Circular Dichroism Measurements

Journal of the Physical Society of Japan, 2005-02, Vol.74 (2), p.753-757

2005

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Thermally Stable and Radiation‐Proof Visible‐Light Photodetectors Made from N‐Doped Diamond

Advanced optical materials, 2023-06, Vol.11 (12), p.n/a

2023

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Influence of P super(+)-Implantation and Post-Annealing on Warpage Structure of 4H-SiC Wafers

Materials science forum, 2014-02, Vol.778-780, p.449-452

2014

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Influence of P+-Implantation and Post-Annealing on Warpage Structure of 4H-SiC Wafers

Materials science forum, 2014, Vol.778-780, p.449-452

2014

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Development of white and monochromatic X-ray topography system in SAGA-LS : High-resolution X-ray Diffraction and Imaging

Physica status solidi. A, Applications and materials science, 2011, Vol.208 (11), p.2516-2521

2011

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Performance of X-ray Reflectivity and Grazing-Incidence Small-Angle X-ray Scattering Measurement at Beamline BL15 of the Saga Light Source

Transactions of the Materials Research Society of Japan, 2008, Vol.33 (3), p.649-652

2008

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In-operando x-ray topography analysis of SiC metal–oxide–semiconductor field-effect transistors to visualize stacking fault expansion motions dynamically during operations

Three-dimensional micro-X-ray topography using focused sheet-shaped X-ray beam

Effect of carbon coating on surface structure in annealing process of high-dose implanted/annealed SiC

Determination of observable depth of dislocations in 4H-SiC by X-ray topography in back reflection

Nucleation sites of expanded stacking faults detected by in operando x-ray topography analysis to design epitaxial layers for bipolar-degradation-free SiC MOSFETs

Advanced X‐ray imaging at beamline 07 of the SAGA Light Source

Development of white and monochromatic X-ray topography system in SAGA-LS

Warpage Structure of 4H-SiC after Implantation and Annealing Processes

Characterization of Defect Structure in Epilayer Grown on On-Axis SiC by Synchrotron X-ray Topography

Defect generation behavior in Czochralski-grown ScAlMgO4 crystal using synchrotron X-ray topography

Expansion of beam width in exposure and crystal structure beamline (BL09) of SAGA-LS and applications using expanded beams

Enlargement of effective area in Schottky barrier diodes on heteroepitaxial (001) diamond substrates by defect reduction and their radiation tolerance

Interface Structures and Magnetic Properties of Exchanged-Coupled Co/Cu Multilayers Sputter-Grown on Ta Buffers

Development of High-Resolution Nuclear Emulsion Plates for Synchrotron X-Ray Topography Observation of Large-Size Semiconductor Wafers

Observation of the Fixed Fe–CN–Mn Cluster in Cesium Manganese Hexacyanoferrate

3D structure of threading screw dislocation at a deep location in 4H-SiC using 3D micro-X-ray topography

Correlation between crystal warpage and swelling of 4H-SiC through implantation and annealing

Resistivity Measurement of P+-Implanted 4H-SiC Samples Prepared at Different Implantation and Annealing Temperatures Using Terahertz Time-Domain Spectroscopic Ellipsometry

Observation of phase transition of cesium manganese hexacyanoferrates by X-ray absorption spectroscopy

Probing the Magnetic Polarizations of Delocalized Electrons in Exchange-coupled Co/CuNi Multilayers by X-ray Magnetic Circular Dichroism Measurements

Thermally Stable and Radiation‐Proof Visible‐Light Photodetectors Made from N‐Doped Diamond

Influence of P super(+)-Implantation and Post-Annealing on Warpage Structure of 4H-SiC Wafers

Influence of P+-Implantation and Post-Annealing on Warpage Structure of 4H-SiC Wafers

Development of white and monochromatic X-ray topography system in SAGA-LS : High-resolution X-ray Diffraction and Imaging

Performance of X-ray Reflectivity and Grazing-Incidence Small-Angle X-ray Scattering Measurement at Beamline BL15 of the Saga Light Source

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