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High growth rate and high wet etch resistance silicon nitride grown by low temperature plasma enhanced atomic layer deposition with a novel silylamine precursor

Journal of materials chemistry. C, Materials for optical and electronic devices, 2020-10, Vol.8 (37), p.1333-1339

2020

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Hollow Cathode Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using Pentachlorodisilane

ACS applied materials & interfaces, 2018-04, Vol.10 (16), p.14116-14123

2018

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High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2022-03, Vol.40 (2)

2022

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Ozone based high-temperature atomic layer deposition of SiO2 thin films

Japanese Journal of Applied Physics, 2020-06, Vol.59, p.1

2020

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Ozone based high-temperature atomic layer deposition of SiO 2 thin films

Japanese Journal of Applied Physics, 2020-06, Vol.59 (SI), p.SIIG05

2020

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Comparable rates for cleavage of amide and ester bonds through nucleophilic attack by carboxylate anion and general acid catalysis by metal-bound water in a carboxypeptidase A model

Journal of the American Chemical Society, 1992-06, Vol.114 (13), p.5141-5146

1992

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57.2: Fabrication of High-Transmittance TFT-LCD Panels Using Low-k CVD Films

SID International Symposium Digest of technical papers, 2003-05, Vol.34 (1), p.1508-1511

2003

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Hollow Cathode Plasma (HCP) Enhanced Atomic Layer Deposition of Silicon Nitride (SiN x ) Thin Films Using Pentachlorodisilane (PCDS)

ECS transactions, 2019-04, Vol.89 (3), p.63-69

2019

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Plasma-Enhanced Atomic-Layer Deposition of Nanometer-Thick SiN x Films Using Trichlorodisilane for Etch-Resistant Coatings

ACS applied nano materials, 2021-03, Vol.4 (3), p.2558-2564

2021

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Enzyme-catalyzed peptide segment condensation using 5(4H)-oxazolones as acyl donors

Journal of the American Chemical Society, 1993-08, Vol.115 (17), p.7912-7913

1993

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Enhancement of durability of chymotrypsin through cross-linking with poly(allylamine)

Bioorganic chemistry, 1992-09, Vol.20 (3), p.223-235

1992

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5(4H)-Oxazolinones as acyl donors in papain-catalyzed peptide fragment condensations

Tetrahedron letters, 1994-04, Vol.35 (15), p.2317-2320

1994

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Ionization of Poly(ethylenimine) and Poly(allylamine) at Various pH′s

Bioorganic chemistry, 1994, Vol.22 (3), p.318-327

1994

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Elimination of Al line and via resistance degradation under HTS test in application of F-doped oxide as intermetal dielectric

Japanese Journal of Applied Physics, 1996, Vol.35 (2B), p.1588-1592

1996

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Characterization of chemical-vapor-deposited low- k thin films using x-ray porosimetry

Applied physics letters, 2003-02, Vol.82 (7), p.1084-1086

2003

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High transmittance TFT-LCD panels using low-/spl kappa/ CVD films

IEEE electron device letters, 2004-06, Vol.25 (6), p.381-383

2004

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High transmittance TFT-LCD panels using low-[kappa] CVD films

IEEE electron device letters, 2004-06, Vol.25 (6), p.381

2004

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Hollow Cathode Plasma (HCP) Enhanced Atomic Layer Deposition of Silicon Nitride (SiN x ) Thin Films Using Pentachlorodisilane (PCDS)

Meeting abstracts (Electrochemical Society), 2019-05, Vol.MA2019-01 (23), p.1188-1188

2019

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High Transmittance TFT-LCD Panels Using Low- $kappa$ CVD Films

IEEE electron device letters, 2004-06, Vol.25 (6), p.381-383

2004

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Does R&D investment increase SME survival during a recession?

Technological forecasting & social change, 2018-12, Vol.137, p.190-198

2018

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Carboxypeptidase A-Catalyzed Hydrolysis of O-(α-Acylamino-2-Styrylacryloyl)-L-β-Phenyllactates: Search of Specific Ester Substrates Hydrolyzed through Accumulation of Intermediates

Bioorganic chemistry, 1995-09, Vol.23 (3), p.183-192

1995

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Bifunctional catalysis by a metal ion and a carboxylate anion in hydrolysis of an alkyl ester and an alkyl amide in dimethyl sulfoxide: A carboxypeptidase a model

Bioorganic chemistry, 1990-06, Vol.18 (2), p.207-220

1990

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Isolated respiratory tract microorganisms and clinical characteristics in asthma exacerbation of obese patients: a multicenter study

BMC pulmonary medicine, 2024-02, Vol.24 (1), p.69-69, Article 69

2024

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A novel albumin nanocomplex containing both small interfering RNA and gold nanorods for synergetic anticancer therapy

Nanoscale, 2015-01, Vol.7 (20), p.9229-9237

2015

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Longitudinal small and medium enterprise (SME) data on survival, research and development (R&D) investment, and patent applications in Korea's innovation clusters from 2008 to 2014

Data in brief, 2019-08, Vol.25, p.103967-103967, Article 103967

2019

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High growth rate and high wet etch resistance silicon nitride grown by low temperature plasma enhanced atomic layer deposition with a novel silylamine precursor

Hollow Cathode Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using Pentachlorodisilane

High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane

Ozone based high-temperature atomic layer deposition of SiO2 thin films

Ozone based high-temperature atomic layer deposition of SiO 2 thin films

Comparable rates for cleavage of amide and ester bonds through nucleophilic attack by carboxylate anion and general acid catalysis by metal-bound water in a carboxypeptidase A model

57.2: Fabrication of High-Transmittance TFT-LCD Panels Using Low-k CVD Films

Hollow Cathode Plasma (HCP) Enhanced Atomic Layer Deposition of Silicon Nitride (SiN x ) Thin Films Using Pentachlorodisilane (PCDS)

Plasma-Enhanced Atomic-Layer Deposition of Nanometer-Thick SiN x Films Using Trichlorodisilane for Etch-Resistant Coatings

Enzyme-catalyzed peptide segment condensation using 5(4H)-oxazolones as acyl donors

Enhancement of durability of chymotrypsin through cross-linking with poly(allylamine)

5(4H)-Oxazolinones as acyl donors in papain-catalyzed peptide fragment condensations

Ionization of Poly(ethylenimine) and Poly(allylamine) at Various pH′s

Elimination of Al line and via resistance degradation under HTS test in application of F-doped oxide as intermetal dielectric

Characterization of chemical-vapor-deposited low- k thin films using x-ray porosimetry

High transmittance TFT-LCD panels using low-/spl kappa/ CVD films

High transmittance TFT-LCD panels using low-[kappa] CVD films

Hollow Cathode Plasma (HCP) Enhanced Atomic Layer Deposition of Silicon Nitride (SiN x ) Thin Films Using Pentachlorodisilane (PCDS)

High Transmittance TFT-LCD Panels Using Low- $kappa$ CVD Films

Does R&D investment increase SME survival during a recession?

Carboxypeptidase A-Catalyzed Hydrolysis of O-(α-Acylamino-2-Styrylacryloyl)-L-β-Phenyllactates: Search of Specific Ester Substrates Hydrolyzed through Accumulation of Intermediates

Bifunctional catalysis by a metal ion and a carboxylate anion in hydrolysis of an alkyl ester and an alkyl amide in dimethyl sulfoxide: A carboxypeptidase a model

Isolated respiratory tract microorganisms and clinical characteristics in asthma exacerbation of obese patients: a multicenter study

A novel albumin nanocomplex containing both small interfering RNA and gold nanorods for synergetic anticancer therapy

Longitudinal small and medium enterprise (SME) data on survival, research and development (R&D) investment, and patent applications in Korea's innovation clusters from 2008 to 2014

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