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Diffraction-Based Overlay Metrology With Optical Convolution Layer

IEEE photonics journal, 2023-12, Vol.15 (6), p.1-7

2023

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Ant Colony Optimization-Based Freeform Sources for Enhancing Nanolithographic Imaging Performance

IEEE transactions on nanotechnology, 2016-07, Vol.15 (4), p.599-606

2016

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Enhancement of Diffraction-Based Overlay Model for Overlay Target With Asymmetric Sidewall

IEEE transactions on semiconductor manufacturing, 2020-08, Vol.33 (3), p.373-382

2020

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Artificial Neural Network for Diffraction Based Overlay Measurement

IEEE access, 2016, Vol.4, p.7479-7486

2016

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Effect of Source Pupil Shape on Process Windows in EUV Lithography

IEEE transactions on nanotechnology, 2014-01, Vol.13 (1), p.136-142

Kuo, Hung-Fei

2014

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Analysis of Core-Shell-Isolated Nanoparticle Configurations Used in the Surface-Enhanced Raman Scattering Technique

IEEE sensors journal, 2014-10, Vol.14 (10), p.3708-3714

2014

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Placement of Sub-Resolution Assist Features Based on a Genetic Algorithm

IEEE access, 2019, Vol.7, p.86064-86076

2019

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Fabrication of p-n Junction With an n-Type Silicon Nanoparticle Layer by Using Infrared Fiber Laser Illumination

IEEE access, 2016, Vol.4, p.6225-6230

2016

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Surface-enhanced Raman scattering substrates of flat and wrinkly titanium nitride thin films by sputter deposition

Surface & coatings technology, 2018-03, Vol.337, p.434-438

2018

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Linewidth Reconstruction Employing a Radial Basis Function Network in Optical Scatterometry

IEEE access, 2016, Vol.4, p.6739-6748

2016

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Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System

IEEE access, 2017, Vol.5, p.6421-6428

2017

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Impact of source pupil shapes on process windows in EUV lithography

2013 IEEE 5th International Nanoelectronics Conference (INEC), 2013, p.124-127

Kuo, Hung-Fei

2013

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Resolution enhancement using pulse width modulation in digital micromirror device-based point-array scanning pattern exposure

Optics and lasers in engineering, 2016-04, Vol.79, p.55-60

2016

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Gaussian Beam Incident on the One-Dimensional Diffraction Gratings with the High- K Metal Gate Stack Structures

Journal of nanoscience and nanotechnology, 2014-04, Vol.14 (4), p.2780-2785

2014

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Full Field Analysis of Critical Dimension Uniformity Due to Focal Variation for Contact Features in Extreme Ultraviolet Lithography

Journal of nanoscience and nanotechnology, 2014-03, Vol.14 (3), p.2630-2634

2014

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Forming Freeform Source Shapes by Utilizing Particle Swarm Optimization to Enhance Resolution in Extreme UV Nanolithography

IEEE transactions on nanotechnology, 2015-03, Vol.14 (2), p.322-329

2015

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Printing line/space patterns on nonplanar substrates using a digital micromirror device-based point-array scanning technique

Optics and lasers in engineering, 2018-02, Vol.101, p.106-112

2018

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Hybrid Integration of End-to-End Optical Interconnects on Printed Circuit Boards

IEEE transactions on components and packaging technologies, 2007-12, Vol.30 (4), p.708-715

2007

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Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry

IEEE transactions on semiconductor manufacturing, 2024-08, p.1-1

2024

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Reflectance Analysis of Photovoltaic Cells Encapsulated by the Epoxy Resin for Agricultures

Advanced science letters, 2013-10, Vol.19 (10), p.3067-3069

2013

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Impact of Hard Mask on Reflectivity for Litho-Etch-Litho-Etch Process in Double Patterning Lithography

Journal of computational and theoretical nanoscience, 2013-03, Vol.10 (3), p.616-619

2013

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Deep learning-based framework for comprehensive mask optimization

2019 24th Asia and South Pacific Design Automation Conference (ASP-DAC), 2019, p.311-316

2019

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Efficiency Enhancement of Photovoltaic Modules Using Optical Grade Epoxy Resin

Advanced science letters, 2012-06, Vol.13 (1), p.664-666

2012

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Heterogeneous integration of InP/InGaAsP MQW thin film edge emitting lasers and polymer waveguides

2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE Cat. No.04CH37546), 2004, Vol.2, p.1537-1541 Vol.2

2004

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Optimization of an Epoxy-based solar cell module structure by using Grey Relational Analysis

2011 International Conference on Machine Learning and Cybernetics, 2011, Vol.3, p.1130-1135

2011

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Diffraction-Based Overlay Metrology With Optical Convolution Layer

Ant Colony Optimization-Based Freeform Sources for Enhancing Nanolithographic Imaging Performance

Enhancement of Diffraction-Based Overlay Model for Overlay Target With Asymmetric Sidewall

Artificial Neural Network for Diffraction Based Overlay Measurement

Effect of Source Pupil Shape on Process Windows in EUV Lithography

Analysis of Core-Shell-Isolated Nanoparticle Configurations Used in the Surface-Enhanced Raman Scattering Technique

Placement of Sub-Resolution Assist Features Based on a Genetic Algorithm

Fabrication of p-n Junction With an n-Type Silicon Nanoparticle Layer by Using Infrared Fiber Laser Illumination

Surface-enhanced Raman scattering substrates of flat and wrinkly titanium nitride thin films by sputter deposition

Linewidth Reconstruction Employing a Radial Basis Function Network in Optical Scatterometry

Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System

Impact of source pupil shapes on process windows in EUV lithography

Resolution enhancement using pulse width modulation in digital micromirror device-based point-array scanning pattern exposure

Gaussian Beam Incident on the One-Dimensional Diffraction Gratings with the High- K Metal Gate Stack Structures

Full Field Analysis of Critical Dimension Uniformity Due to Focal Variation for Contact Features in Extreme Ultraviolet Lithography

Forming Freeform Source Shapes by Utilizing Particle Swarm Optimization to Enhance Resolution in Extreme UV Nanolithography

Printing line/space patterns on nonplanar substrates using a digital micromirror device-based point-array scanning technique

Hybrid Integration of End-to-End Optical Interconnects on Printed Circuit Boards

Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry

Reflectance Analysis of Photovoltaic Cells Encapsulated by the Epoxy Resin for Agricultures

Impact of Hard Mask on Reflectivity for Litho-Etch-Litho-Etch Process in Double Patterning Lithography

Deep learning-based framework for comprehensive mask optimization

Efficiency Enhancement of Photovoltaic Modules Using Optical Grade Epoxy Resin

Heterogeneous integration of InP/InGaAsP MQW thin film edge emitting lasers and polymer waveguides

Optimization of an Epoxy-based solar cell module structure by using Grey Relational Analysis

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