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2D analysis of sputtered species transport in high-power impulse magnetron sputtering (HiPIMS) discharge

Journal of applied physics, 2024-05, Vol.135 (17)

2024

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Characterization of radical-enhanced atomic layer deposition process based on microwave surface wave generated plasma

Journal of applied physics, 2021-07, Vol.130 (1)

2021

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Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude

Plasma sources science & technology, 2020-06, Vol.29 (6), p.65003

2020

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Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution

Plasma sources science & technology, 2020-08, Vol.29 (8), p.85016

2020

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WO3 thin films prepared by sedimentation and plasma sputtering

Chemical engineering journal (Lausanne, Switzerland : 1996), 2017-06, Vol.318, p.281-288

2017

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Cobalt Oxide Catalysts in the Form of Thin Films Prepared by Magnetron Sputtering on Stainless-Steel Meshes: Performance in Ethanol Oxidation

Catalysts, 2019-10, Vol.9 (10), p.806

2019

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Nickel-Copper Oxide Catalysts Deposited on Stainless Steel Meshes by Plasma Jet Sputtering: Comparison with Granular Analogues and Synergistic Effect in VOC Oxidation

Catalysts, 2023-03, Vol.13 (3), p.595

2023

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Co3O4 thin films prepared by hollow cathode discharge

Surface & coatings technology, 2019-05, Vol.366, p.303-310

2019

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Size-controlled formation of Cu nanoclusters in pulsed magnetron sputtering system

Surface & coatings technology, 2011-01, Vol.205 (8), p.2755-2762

2011

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Plasma Jet Sputtering as an Efficient Method for the Deposition of Nickel and Cobalt Mixed Oxides on Stainless-Steel Meshes: Application to VOC Oxidation

Catalysts, 2023-01, Vol.13 (1), p.79

2023

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Hematite photoanodes for solar water splitting: Directly sputtered vs. anodically oxidized sputtered Fe

Catalysis today, 2017-06, Vol.287, p.99-105

2017

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Preparation of cobalt oxide catalysts on stainless steel wire mesh by combination of magnetron sputtering and electrochemical deposition

Catalysis today, 2019-08, Vol.334, p.13-23

2019

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Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system

Thin solid films, 2013-12, Vol.549, p.177-183

2013

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Modification of Cobalt Oxide Electrochemically Deposited on Stainless Steel Meshes with Co-Mn Thin Films Prepared by Magnetron Sputtering: Effect of Preparation Method and Application to Ethanol Oxidation

Catalysts, 2021-12, Vol.11 (12), p.1453

2021

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Ultrafast UV Luminescence of ZnO Films: Sub‐30 ps Decay Time with Suppressed Visible Component

Advanced optical materials, 2024-07, Vol.12 (21), p.n/a

2024

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Transparent Nanotubular TiO₂ Photoanodes Grown Directly on FTO Substrates

Molecules (Basel, Switzerland), 2017-05, Vol.22 (5), p.775

2017

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Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets

Surface & coatings technology, 2014-01, Vol.238, p.152-157

2014

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Physical properties of homogeneous TiO2 films prepared by high power impulse magnetron sputtering as a function of crystallographic phase and nanostructure

Journal of physics. D, Applied physics, 2009-05, Vol.42, p.105204

2009

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Anodic self-organized transparent nanotubular/porous hematite films from Fe thin-films sputtered on FTO and photoelectrochemical water splitting

Research on chemical intermediates, 2015-12, Vol.41 (12), p.9333-9341

2015

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Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2016-07, Vol.34 (4)

2016

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Hybrid HiPIMS + controlled pulsed arc for deposition of hard coatings

Surface & coatings technology, 2022-09, Vol.446, p.128765, Article 128765

2022

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Transparent rutile TiO2 films prepared by thermal oxidation of sputtered Ti on FTO glass

Photochemical & photobiological sciences, 2019, Vol.18 (4), p.891-896

2019

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Sideways deposition rate and ionized flux fraction in dc and high power impulse magnetron sputtering

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-05, Vol.38 (3)

2020

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Retraction notice to “Significant enhancement of photoactivity in one-dimensional TiO2 nanorods modified by S-, N-, O-doped carbon nanosheets” [CATTOD 328C (2019) 111–117]

Catalysis today, 2021-11, Vol.380, p.268-268

2021

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The Effect of Magnetic Field Strength and Geometry on the Deposition Rate and Ionized Flux Fraction in the HiPIMS Discharge

Plasma, 2019-05, Vol.2 (2), p.201-221

2019

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2D analysis of sputtered species transport in high-power impulse magnetron sputtering (HiPIMS) discharge

Characterization of radical-enhanced atomic layer deposition process based on microwave surface wave generated plasma

Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude

Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution

WO3 thin films prepared by sedimentation and plasma sputtering

Cobalt Oxide Catalysts in the Form of Thin Films Prepared by Magnetron Sputtering on Stainless-Steel Meshes: Performance in Ethanol Oxidation

Nickel-Copper Oxide Catalysts Deposited on Stainless Steel Meshes by Plasma Jet Sputtering: Comparison with Granular Analogues and Synergistic Effect in VOC Oxidation

Co3O4 thin films prepared by hollow cathode discharge

Size-controlled formation of Cu nanoclusters in pulsed magnetron sputtering system

Plasma Jet Sputtering as an Efficient Method for the Deposition of Nickel and Cobalt Mixed Oxides on Stainless-Steel Meshes: Application to VOC Oxidation

Hematite photoanodes for solar water splitting: Directly sputtered vs. anodically oxidized sputtered Fe

Preparation of cobalt oxide catalysts on stainless steel wire mesh by combination of magnetron sputtering and electrochemical deposition

Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system

Modification of Cobalt Oxide Electrochemically Deposited on Stainless Steel Meshes with Co-Mn Thin Films Prepared by Magnetron Sputtering: Effect of Preparation Method and Application to Ethanol Oxidation

Ultrafast UV Luminescence of ZnO Films: Sub‐30 ps Decay Time with Suppressed Visible Component

Transparent Nanotubular TiO₂ Photoanodes Grown Directly on FTO Substrates

Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets

Physical properties of homogeneous TiO2 films prepared by high power impulse magnetron sputtering as a function of crystallographic phase and nanostructure

Anodic self-organized transparent nanotubular/porous hematite films from Fe thin-films sputtered on FTO and photoelectrochemical water splitting

Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering

Hybrid HiPIMS + controlled pulsed arc for deposition of hard coatings

Transparent rutile TiO2 films prepared by thermal oxidation of sputtered Ti on FTO glass

Sideways deposition rate and ionized flux fraction in dc and high power impulse magnetron sputtering

Retraction notice to “Significant enhancement of photoactivity in one-dimensional TiO2 nanorods modified by S-, N-, O-doped carbon nanosheets” [CATTOD 328C (2019) 111–117]

The Effect of Magnetic Field Strength and Geometry on the Deposition Rate and Ionized Flux Fraction in the HiPIMS Discharge

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