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Regulation of film thickness, surface roughness and porosity in thin film growth using deposition rate

Chemical engineering science, 2009-09, Vol.64 (17), p.3903-3913

2009

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Modeling and control of film porosity in thin film deposition

Chemical engineering science, 2009-08, Vol.64 (16), p.3668-3682

2009

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Dynamic output feedback covariance control of stochastic dissipative partial differential equations

Chemical engineering science, 2008-09, Vol.63 (18), p.4531-4542

2008

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Stochastic Modeling and Simultaneous Regulation of Surface Roughness and Porosity in Thin Film Deposition

Industrial & engineering chemistry research, 2009-07, Vol.48 (14), p.6690-6700

2009

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Dependence of film surface roughness and slope on surface migration and lattice size in thin film deposition processes

Chemical engineering science, 2010-12, Vol.65 (23), p.6101-6111

2010

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Dynamics and Lattice-Size Dependence of Surface Mean Slope in Thin-Film Deposition

Industrial & engineering chemistry research, 2011-02, Vol.50 (3), p.1219-1230

2011

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A non-Gaussian pattern matching based dynamic process monitoring approach and its application to cryogenic air separation process

Computers & chemical engineering, 2013-11, Vol.58, p.40-53

2013

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Model predictive control of nonlinear stochastic partial differential equations with application to a sputtering process

AIChE journal, 2008-08, Vol.54 (8), p.2065-2081

2008

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Predictive control of surface mean slope and roughness in a thin film deposition process

Chemical engineering science, 2010-08, Vol.65 (16), p.4720-4731

2010

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Multivariable Model Predictive Control of Thin Film Surface Roughness and Slope for Light Trapping Optimization

Industrial & engineering chemistry research, 2010-11, Vol.49 (21), p.10510-10516

2010

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Conversion of hydrogen chloride to chlorine by catalytic oxidation in a two-zone circulating fluidized bed reactor

Chemical engineering and processing, 2011-07, Vol.50 (7), p.593-598

2011

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Model parameter estimation and feedback control of surface roughness in a sputtering process

Chemical engineering science, 2008-04, Vol.63 (7), p.1800-1816

2008

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Subspace-based model identification of a hydrogen plant startup dynamics

Computers & chemical engineering, 2017-11, Vol.106, p.183-190

2017

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Controller and Estimator Design for Regulation of Film Thickness, Surface Roughness, and Porosity in a Multiscale Thin Film Growth Process

Industrial & engineering chemistry research, 2010-09, Vol.49 (17), p.7795-7806

2010

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Controlling aggregate thin film surface morphology for improved light trapping using a patterned deposition rate profile

Chemical engineering science, 2012, Vol.67 (1), p.101-110

2012

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Controlling aggregate thin film surface morphology for improved light trapping using a patterned deposition rate profile: Dynamics, Control and Optimization of Energy Systems

Chemical engineering science, 2012, Vol.67 (1), p.101-110

2012

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Stochastic Modeling and Control of Film Porosity, Surface Roughness and Thickness in Thin Film Growth

Hu, Gangshi

2010

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An independent component analysis and mutual information based non-Gaussian pattern matching method for fault detection and diagnosis of complex cryogenic air separation process

2013 American Control Conference, 2013, p.2797-2802

2013

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Dependence of film surface roughness on surface migration and lattice size in thin film deposition

Proceedings of the 2011 American Control Conference, 2011, p.2957-2962

2011

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Model predictive control of nonlinear stochastic PDEs: Application to a sputtering process

2009 American Control Conference, 2009, p.2476-2483

2009

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Stochastic modeling of film porosity in thin film deposition

2009 American Control Conference, 2009, p.4771-4778

2009

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Simultaneous regulation of thin film surface mean slope and roughness for light trapping optimization using predictive control

49th IEEE Conference on Decision and Control (CDC), 2010, p.6069-6076

2010

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Dynamic output feedback covariance control of linear stochastic dissipative partial differential equations

2008 American Control Conference, 2008, p.260-266

2008

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Simultaneous regulation of film thickness, surface roughness and porosity in a multiscale thin film growth process

Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference, 2009, p.2387-2394

2009

Volltextzugriff (PDF)

Investigation of film surface roughness and porosity dependence on lattice size in a porous thin film deposition process

Physical review. E, Statistical, nonlinear, and soft matter physics, 2009-10, Vol.80 (4 Pt 1), p.041122-041122, Article 041122

2009

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Regulation of film thickness, surface roughness and porosity in thin film growth using deposition rate

Modeling and control of film porosity in thin film deposition

Dynamic output feedback covariance control of stochastic dissipative partial differential equations

Stochastic Modeling and Simultaneous Regulation of Surface Roughness and Porosity in Thin Film Deposition

Dependence of film surface roughness and slope on surface migration and lattice size in thin film deposition processes

Dynamics and Lattice-Size Dependence of Surface Mean Slope in Thin-Film Deposition

A non-Gaussian pattern matching based dynamic process monitoring approach and its application to cryogenic air separation process

Model predictive control of nonlinear stochastic partial differential equations with application to a sputtering process

Predictive control of surface mean slope and roughness in a thin film deposition process

Multivariable Model Predictive Control of Thin Film Surface Roughness and Slope for Light Trapping Optimization

Conversion of hydrogen chloride to chlorine by catalytic oxidation in a two-zone circulating fluidized bed reactor

Model parameter estimation and feedback control of surface roughness in a sputtering process

Subspace-based model identification of a hydrogen plant startup dynamics

Controller and Estimator Design for Regulation of Film Thickness, Surface Roughness, and Porosity in a Multiscale Thin Film Growth Process

Controlling aggregate thin film surface morphology for improved light trapping using a patterned deposition rate profile

Controlling aggregate thin film surface morphology for improved light trapping using a patterned deposition rate profile: Dynamics, Control and Optimization of Energy Systems

Stochastic Modeling and Control of Film Porosity, Surface Roughness and Thickness in Thin Film Growth

An independent component analysis and mutual information based non-Gaussian pattern matching method for fault detection and diagnosis of complex cryogenic air separation process

Dependence of film surface roughness on surface migration and lattice size in thin film deposition

Model predictive control of nonlinear stochastic PDEs: Application to a sputtering process

Stochastic modeling of film porosity in thin film deposition

Simultaneous regulation of thin film surface mean slope and roughness for light trapping optimization using predictive control

Dynamic output feedback covariance control of linear stochastic dissipative partial differential equations

Simultaneous regulation of film thickness, surface roughness and porosity in a multiscale thin film growth process

Investigation of film surface roughness and porosity dependence on lattice size in a porous thin film deposition process

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