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An approach to line-shaped nitrogen plasma production at atmospheric pressure by slot-excited microwave discharge

Japanese Journal of Applied Physics, 2017-11, Vol.56 (11), p.116001

2017

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Effectiveness of plasma and radical control for the low temperature synthesis and properties of a-SiNx:H films using RF-near microwave PECVD

Physics of plasmas, 2018-02, Vol.25 (2)

2018

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Rapid resist ashing by slot-excited atmospheric pressure microwave O2 plasma

Japanese Journal of Applied Physics, 2019-11, Vol.58 (12)

2019

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Atmospheric pressure water-vapor plasma in an air-shielded environment by water flow

Japanese Journal of Applied Physics, 2019-02, Vol.58 (SA), p.SAAC05

2019

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Rapid plasma treatment of polyimide for improved adhesive and durable copper film deposition

Thin solid films, 2012-10, Vol.521, p.22-26

2012

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Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma

Japanese Journal of Applied Physics, 2021-01, Vol.60 (1), p.16001

2021

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Angular distribution measurement of high-energy argon neutral and ion in a 13.56 MHz capacitively-coupled plasma

Applied physics express, 2021-12, Vol.14 (12), p.126001

2021

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High performance of carbon nanowall supported Pt catalyst for methanol electro-oxidation

Carbon (New York), 2012-08, Vol.50 (10), p.3731-3738

2012

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Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma

Japanese Journal of Applied Physics, 2020-06, Vol.59 (SJ), p.SJJB03

2020

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Spatial Uniformity Evaluation of Atmospheric-Pressure Microwave Line Plasma for Wide-Area Surface Treatment

Plasma and Fusion Research, 2021/04/09, Vol.16, pp.1406046-1406046

2021

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Plasma-grafted alkaline anion-exchange membranes based on polyvinyl chloride for potential application in direct alcohol fuel cell

Journal of power sources, 2011-05, Vol.196 (10), p.4483-4490

2011

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New line plasma source excited by 2.45 GHz microwave at atmospheric pressure

Applied physics express, 2015-03, Vol.8 (3), p.36001

2015

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Magnet-free uniform sputtering of dielectric film by RF and microwave power superposition

Japanese Journal of Applied Physics, 2016-08, Vol.55 (8), p.86202

2016

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The Mechanism of Anti-Epileptogenesis by Levetiracetam Treatment is Similar to the Spontaneous Recovery of Idiopathic Generalized Epilepsy during Adolescence

PSYCHIATRY INVESTIGATION, 2017, 14(6), , pp.844-850

2017

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Magnetron sputtering of platinum nanoparticles onto vertically aligned carbon nanofibers for electrocatalytic oxidation of methanol

Electrochimica acta, 2011-07, Vol.56 (17), p.6033-6040

2011

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Synergistic effect of microwave plasma and ultrasonic wave on decomposition of organic compounds in water

Japanese Journal of Applied Physics, 2014-07, Vol.53 (7S), p.7-1-07KE01-5

2014

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Characterization of a steam plasma jet at atmospheric pressure

Plasma sources science & technology, 2012-02, Vol.21 (1), p.15009-1-12

2012

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High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System

Japanese Journal of Applied Physics, 2013-11, Vol.52 (11), p.11NE01-11NE01-3

2013

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High-Performance Plasma-Polymerized Alkaline Anion-Exchange Membranes for Potential Application in Direct Alcohol Fuel Cells

Plasma processes and polymers, 2011-11, Vol.8 (11), p.1024-1032

2011

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Novel Antenna Coupler Design for Production of Meter-Scale High-Density Planar Surface Wave Plasma

Japanese Journal of Applied Physics, 2010-08, Vol.49 (8), p.086002-086002-5

2010

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Influence of Oxygen Addition and Wafer Bias Voltage on Bromine Atom Surface Reaction in a HBr/Ar Inductively Coupled Plasma

Japanese Journal of Applied Physics, 2013-11, Vol.52 (11), p.11NC01-11NC01-6

2013

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Fine Structure of O - Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism

Applied physics express, 2009-12, Vol.2 (12), p.126001

2009

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High-energy ions and atoms sputtered and reflected from a magnetron source for deposition of magnetic thin films

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2005-07, Vol.23 (4), p.671-675

2005

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Evaluation of the spatial structure of multiline emission in a capacitively coupled plasma using tomographic reconstruction

Japanese Journal of Applied Physics, 2024-05, Vol.63 (5), p.56004

2024

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Production of Long-scale Atmospheric-pressure Microwave Plasma and its Applications to Surface Process

Hyōmen gijutsu, 2020-10, Vol.71 (10), p.624-628

2020

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An approach to line-shaped nitrogen plasma production at atmospheric pressure by slot-excited microwave discharge

Effectiveness of plasma and radical control for the low temperature synthesis and properties of a-SiNx:H films using RF-near microwave PECVD

Rapid resist ashing by slot-excited atmospheric pressure microwave O2 plasma

Atmospheric pressure water-vapor plasma in an air-shielded environment by water flow

Rapid plasma treatment of polyimide for improved adhesive and durable copper film deposition

Time-dependent measurement of charge density on the bottom of high aspect capillary hole in pulse-modulated VHF capacitively coupled Ar plasma

Angular distribution measurement of high-energy argon neutral and ion in a 13.56 MHz capacitively-coupled plasma

High performance of carbon nanowall supported Pt catalyst for methanol electro-oxidation

Evaluation of absolute charge density at the bottom of high aspect capillary holes exposed to a pulsed very high frequency plasma

Spatial Uniformity Evaluation of Atmospheric-Pressure Microwave Line Plasma for Wide-Area Surface Treatment

Plasma-grafted alkaline anion-exchange membranes based on polyvinyl chloride for potential application in direct alcohol fuel cell

New line plasma source excited by 2.45 GHz microwave at atmospheric pressure

Magnet-free uniform sputtering of dielectric film by RF and microwave power superposition

The Mechanism of Anti-Epileptogenesis by Levetiracetam Treatment is Similar to the Spontaneous Recovery of Idiopathic Generalized Epilepsy during Adolescence

Magnetron sputtering of platinum nanoparticles onto vertically aligned carbon nanofibers for electrocatalytic oxidation of methanol

Synergistic effect of microwave plasma and ultrasonic wave on decomposition of organic compounds in water

Characterization of a steam plasma jet at atmospheric pressure

High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System

High-Performance Plasma-Polymerized Alkaline Anion-Exchange Membranes for Potential Application in Direct Alcohol Fuel Cells

Novel Antenna Coupler Design for Production of Meter-Scale High-Density Planar Surface Wave Plasma

Influence of Oxygen Addition and Wafer Bias Voltage on Bromine Atom Surface Reaction in a HBr/Ar Inductively Coupled Plasma

Fine Structure of O - Kinetic Energy Distribution in RF Plasma and Its Formation Mechanism

High-energy ions and atoms sputtered and reflected from a magnetron source for deposition of magnetic thin films

Evaluation of the spatial structure of multiline emission in a capacitively coupled plasma using tomographic reconstruction

Production of Long-scale Atmospheric-pressure Microwave Plasma and its Applications to Surface Process

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