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Out-of-plane polarization in a layered manganese chloride hybrid

APL materials, 2018-06, Vol.6 (6), p.066106-066106-9

2018

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Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study

Physical chemistry chemical physics : PCCP, 2024-04, Vol.26 (15), p.11597-1163

2024

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Corrigendum to “Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules” [Appl. Surf. Sci. 554 (2021) 149481]

Applied surface science, 2022-11, Vol.602, p.154355, Article 154355

2022

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Etching mechanism of amorphous hydrogenated silicon nitride by hydrogen fluoride

Applied surface science, 2024-05, Vol.654, p.159414, Article 159414

2024

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Density functional theory study on the selective capping of cobalt on copper interconnect

Applied surface science, 2022-05, Vol.585, p.152750, Article 152750

2022

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A theoretical study on the surface reaction of tetrakis(dimethylamino)titanium on titanium oxide

Physical chemistry chemical physics : PCCP, 2023-08, Vol.25 (33), p.22250-22257

2023

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Surface reaction of the hafnium precursor with a linked amido-cyclopentadienyl ligand: A density functional theory study

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2021-05, Vol.39 (3)

2021

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Reactivity of different nitriding agents with chlorine-terminated surface during atomic layer deposition of silicon nitride

Applied surface science, 2021-01, Vol.535, p.147727, Article 147727

2021

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Density functional theory study on the reducing agents for atomic layer deposition of tungsten using tungsten chloride precursor

Applied surface science, 2021-02, Vol.538, p.148156, Article 148156

2021

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Erratum: “Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules” [J. Vac. Sci. Technol. A 37, 021001 (2019)]

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2022-07, Vol.40 (4)

2022

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Biopolymer-based slow/controlled-release fertilizer (SRF/CRF): Nutrient release mechanism and agricultural sustainability

Journal of environmental chemical engineering, 2024-04, Vol.12 (2), p.112177, Article 112177

2024

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Selective etching mechanism of silicon oxide against silicon by hydrogen fluoride: a density functional theory study

Physical chemistry chemical physics : PCCP, 2023-02, Vol.25 (5), p.389-3899

2023

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Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules

Applied surface science, 2021-07, Vol.554, p.149481, Article 149481

2021

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Preparation of tungsten-based thin films using a F-free W precursor and tert-butyl hydrazine via 2- and 3-step atomic layer deposition process

Applied surface science, 2022-03, Vol.578, p.152062, Article 152062

2022

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Atomic layer deposition of tungsten and tungsten-based compounds using WCl5 and various reactants selected by density functional theory

Applied surface science, 2021-10, Vol.563, p.150373, Article 150373

2021

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Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2019-03, Vol.37 (2)

2019

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Gas-phase etching mechanism of silicon oxide by a mixture of hydrogen fluoride and ammonium fluoride: A density functional theory study

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-05, Vol.41 (3)

2023

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Chemisorption of tetrakis(dimethylamino)zirconium on zirconium oxide: Density functional theory study

Surfaces and interfaces, 2024-07, Vol.50, p.104480, Article 104480

2024

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Atomic layer deposition of titanium oxide thin films using a titanium precursor with a linked amido-cyclopentadienyl ligand

Journal of materials chemistry. C, Materials for optical and electronic devices, 2022-05, Vol.10 (17), p.6696-6709

2022

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Atomic layer deposition and tellurization of Ge-Sb film for phase-change memory applications

RSC advances, 2019-06, Vol.9 (3), p.17291-17298

2019

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Out-of-plane polarization in a layered manganese chloride hybrid

Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study

Corrigendum to “Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules” [Appl. Surf. Sci. 554 (2021) 149481]

Etching mechanism of amorphous hydrogenated silicon nitride by hydrogen fluoride

Density functional theory study on the selective capping of cobalt on copper interconnect

A theoretical study on the surface reaction of tetrakis(dimethylamino)titanium on titanium oxide

Surface reaction of the hafnium precursor with a linked amido-cyclopentadienyl ligand: A density functional theory study

Reactivity of different nitriding agents with chlorine-terminated surface during atomic layer deposition of silicon nitride

Density functional theory study on the reducing agents for atomic layer deposition of tungsten using tungsten chloride precursor

Erratum: “Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules” [J. Vac. Sci. Technol. A 37, 021001 (2019)]

Biopolymer-based slow/controlled-release fertilizer (SRF/CRF): Nutrient release mechanism and agricultural sustainability

Selective etching mechanism of silicon oxide against silicon by hydrogen fluoride: a density functional theory study

Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules

Preparation of tungsten-based thin films using a F-free W precursor and tert-butyl hydrazine via 2- and 3-step atomic layer deposition process

Atomic layer deposition of tungsten and tungsten-based compounds using WCl5 and various reactants selected by density functional theory

Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules

Gas-phase etching mechanism of silicon oxide by a mixture of hydrogen fluoride and ammonium fluoride: A density functional theory study

Chemisorption of tetrakis(dimethylamino)zirconium on zirconium oxide: Density functional theory study

Atomic layer deposition of titanium oxide thin films using a titanium precursor with a linked amido-cyclopentadienyl ligand

Atomic layer deposition and tellurization of Ge-Sb film for phase-change memory applications

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