UB Paderborn / Katalog / Suche / in CDI

Sortiert nach

Einfacher Volltextzugriff von (fast) überall

Installieren Sie die LibKey Nomad-Browsererweiterung und erhalten Sie von vielen Webseiten einfachen Zugriff auf lizenzierte Volltexte oder Open Access Publikationen. Mehr erfahren...

Harmonic dependence of thermal magnetic particle imaging

Scientific reports, 2023-09, Vol.13 (1), p.15762-15762, Article 15762

2023

Volltextzugriff (PDF)

Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and tilting-AFM

Measurement science & technology, 2014-04, Vol.25 (4), p.44002-13

2014

Volltextzugriff (PDF)

A maximum likelihood approach to the inverse problem of scatterometry

Optics express, 2012-06, Vol.20 (12), p.12771-12786

2012

Volltextzugriff (PDF)

Combining model-based measurement results of critical dimensions from multiple tools

Measurement science & technology, 2017-06, Vol.28 (6), p.65002

2017

Volltextzugriff (PDF)

Optimizing the nanoscale quantitative optical imaging of subfield scattering targets

Optics letters, 2016-11, Vol.41 (21), p.4959-4962

2016

Volltextzugriff (PDF)

Improved reconstruction of critical dimensions in extreme ultraviolet scatterometry by modeling systematic errors

Measurement science & technology, 2014-04, Vol.25 (4), p.44003-10

2014

Volltextzugriff (PDF)

Assessing Form-Dependent Optical Scattering at Vacuum- and Extreme-Ultraviolet Wavelengths of Nanostructures with Two-Dimensional Periodicity

Physical review applied, 2019-06, Vol.11 (6), Article 064056

2019

Volltextzugriff (PDF)

Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry

Optics letters, 2012-12, Vol.37 (24), p.5229

2012

Volltextzugriff (PDF)

Hyponormal and strongly hyponormal matrices in inner product spaces

Linear algebra and its applications, 2010-11, Vol.433 (6), p.1055-1076

2010

Volltextzugriff (PDF)

Modeling aspects to improve the solution of the inverse problem in scatterometry

Discrete and continuous dynamical systems. Series S, 2015-06, Vol.8 (3), p.497-519

2015

Volltextzugriff (PDF)

Data-driven approaches to optical patterned defect detection

OSA continuum, 2019-09, Vol.2 (9), p.2683-2693

2019

Volltextzugriff (PDF)

GPU-accelerated parallel image reconstruction strategies for magnetic particle imaging

Physics in medicine & biology, 2024-06, Vol.69 (13), p.135005

2024

Volltextzugriff (PDF)

Evaluating the effects of modeling errors for isolated finite three-dimensional targets

Journal of micro/nanolithography, MEMS, and MOEMS, 2017-10, Vol.16 (4), p.1

2017

Volltextzugriff (PDF)

Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization

Light, science & applications, 2016, Vol.5 (2), p.e16038-e16038

2016

Volltextzugriff (PDF)

Appraising the Extensibility of Optics-Based Metrology for Emerging Materials

ECS transactions, 2019-07, Vol.92 (1), p.73-84

2019

Volltextzugriff (PDF)

Optimizing hybrid metrology: rigorous implementation of Bayesian and combined regression

Journal of micro/nanolithography, MEMS, and MOEMS, 2015-10, Vol.14 (4), p.44001

2015

Volltextzugriff (PDF)

Appraising the Extensibility of Optics-Based Metrology for Emerging Materials

Meeting abstracts (Electrochemical Society), 2019-09, Vol.MA2019-02 (13), p.899-899

2019

Volltextzugriff (PDF)

1 – 17 von 17

Suche als RSS-Feed

Suchergebnisse filtern

Filter anzeigen

Nur zeigen

Geprüft (Peer-Review)
(12)
Mit Volltextzugriff
(11)

Publikationsform

Artikel
(17)

Sprache

Englisch
(17)

Erscheinungsjahr

n.n

Thema

Science & Technology
(15)
Physical Sciences
(10)
Optics
(7)
Engineering
(6)
Technology
(6)
Calibration
(3)
Engineering, Multidisciplinary
(3)
Instruments & Instrumentation
(3)
Roughness
(3)
Scatterometry
(3)
Science & Technology - Other Topics
(3)
Engineering, Electrical & Electronic
(2)
Materials Science
(2)
Materials Science, Multidisciplinary
(2)
Mathematical Analysis
(2)
Mathematics
(2)
Mathematics, Applied
(2)
Metrology
(2)
Nanoscience & Nanotechnology
(2)
Physics
(2)

15 weitere anzeigen...

Weniger anzeigen...

Menü

Weitere Dienste

Einstellungen

Harmonic dependence of thermal magnetic particle imaging

Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and tilting-AFM

A maximum likelihood approach to the inverse problem of scatterometry

Combining model-based measurement results of critical dimensions from multiple tools

Optimizing the nanoscale quantitative optical imaging of subfield scattering targets

Improved reconstruction of critical dimensions in extreme ultraviolet scatterometry by modeling systematic errors

Assessing Form-Dependent Optical Scattering at Vacuum- and Extreme-Ultraviolet Wavelengths of Nanostructures with Two-Dimensional Periodicity

Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry

Hyponormal and strongly hyponormal matrices in inner product spaces

Modeling aspects to improve the solution of the inverse problem in scatterometry

Data-driven approaches to optical patterned defect detection

GPU-accelerated parallel image reconstruction strategies for magnetic particle imaging

Evaluating the effects of modeling errors for isolated finite three-dimensional targets

Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization

Appraising the Extensibility of Optics-Based Metrology for Emerging Materials

Optimizing hybrid metrology: rigorous implementation of Bayesian and combined regression

Appraising the Extensibility of Optics-Based Metrology for Emerging Materials

Suchergebnisse filtern