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Permeation of hydrogen into silicon during low-energy hydrogen ion beam bombardment

Applied physics letters, 1987-08, Vol.51 (7), p.490-492

1987

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Evolution of Damage, Dopant Deactivation, and Hydrogen‐Related Effects in Dry Etch Silicon as a Function of Annealing History

Journal of the Electrochemical Society, 1990-06, Vol.137 (6), p.1960-1964

1990

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A pressure contact current-voltage technique for rapid characterization of thin dielectric films

Applied surface science, 1991, Vol.48, p.237-245

1991

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SOI material properties determined by electrical characterization

ESSDERC '92: 22nd European Solid State Device Research conference, 1992, Vol.19 (1), p.827-832

1992

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Boron Doping using Proximity Rapid Thermal Diffusion from Spin-on-Dopants

MRS proceedings, 1994, Vol.342, Article 369

1994

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Detection of anomalous defect-enhanced diffusion using advanced spreading resistance measurements and analysis

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 1994-01, Vol.12 (1), p.322-326

1994

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Profiling of ultra-shallow complementary metal–oxide semiconductor junctions using spreading resistance: A comparison to secondary ion mass spectrometry

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 1992, Vol.10 (1), p.533-539

1992

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Electrical characterization of shallow arsenic profiles using SRP2

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 1992-01, Vol.10 (1), p.442-448

1992

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Carrier diffusion effects in III–V semiconductor structures measured by the point contact current voltage technique

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 1992, Vol.10 (1), p.463-467

1992

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Effects of dry etching on the electrical properties of silicon

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1988-01, Vol.6 (1), p.280-283

1988

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Accurate profiling of ultra-shallow implants with mercury gate metal–oxide–semiconductor capacitance–voltage

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 1994-01, Vol.12 (1), p.336-341

1994

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Profiling of silicide–silicon structures using a combination of the spreading resistance and point contact current–voltage methods

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 1994-01, Vol.12 (1), p.317-321

1994

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Integration of multi-voltage analog and power devices in a 0.25/spl mu/m CMOS + flash memory process

Proceedings of the 14th International Symposium on Power Semiconductor Devices and Ics, 2002, p.305-308

2002

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Charge trapping in single and multiple implant SIMOX buried oxides

1990 IEEE SOS/SOI Technology Conference. Proceedings, 1990, p.143-144

1990

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Profiling of compound semiconductors using point contact techniques

Euro III vs review, 1990, Vol.3 (4), p.32-33

1990

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Profiling of compound semiconductors using point contact techniques: Part 2

Euro III vs review, 1990, Vol.3 (5), p.31-33

1990

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A 0.18 /spl mu/m SiGe:C RFBiCMOS technology for wireless and gigabit optical communication applications

Proceedings of the 2001 BIPOLAR/BiCMOS Circuits and Technology Meeting (Cat. No.01CH37212), 2001, p.151-154

2001

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Profiling of composition and carrier concentration in Al x Ga1− x As by point contact techniques

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 1992, Vol.10 (1), p.456-462

1992

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Immunogenicity of casein phosphopeptides derived from tryptic hydrolysis of beta-casein

Journal of dairy science, 1997-09, Vol.80 (9), p.1971-1976

1997

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Purity and Yield of β-Lactoglobulin Isolated by an N-Retinyl-Celite Bioaffinity Column

Journal of agricultural and food chemistry, 1997-07, Vol.45 (7), p.2369-2373

1997

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Relative immunogenicity of beta-lactoglobulin, bovine serum albumin, and model acid whey product

Nutrition research (New York, N.Y.), 1997-03, Vol.17 (3), p.505-514

1997

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Immunogenicity of Casein Phosphopetides Derived from Tryptic Hydroylsis of β-Casein

Journal of dairy science, 1997-09, Vol.80 (9), p.1971

1997

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Soils and their Role in Planning a Suburban County

Soil Surveys and Land Use Planning, 1966, p.15-30

1966

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The Use of Agricultural Soil Surveys in the Planning and Construction of Highways

Soil Surveys and Land Use Planning, 1966, p.87-103

1966

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Quantitative Aspects of Soil Survey Interpret at Ion in Appraisal of Soil Productivity

Soil Surveys and Land Use Planning, 1966, p.152-159

1966

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Permeation of hydrogen into silicon during low-energy hydrogen ion beam bombardment

Evolution of Damage, Dopant Deactivation, and Hydrogen‐Related Effects in Dry Etch Silicon as a Function of Annealing History

A pressure contact current-voltage technique for rapid characterization of thin dielectric films

SOI material properties determined by electrical characterization

Boron Doping using Proximity Rapid Thermal Diffusion from Spin-on-Dopants

Detection of anomalous defect-enhanced diffusion using advanced spreading resistance measurements and analysis

Profiling of ultra-shallow complementary metal–oxide semiconductor junctions using spreading resistance: A comparison to secondary ion mass spectrometry

Electrical characterization of shallow arsenic profiles using SRP2

Carrier diffusion effects in III–V semiconductor structures measured by the point contact current voltage technique

Effects of dry etching on the electrical properties of silicon

Accurate profiling of ultra-shallow implants with mercury gate metal–oxide–semiconductor capacitance–voltage

Profiling of silicide–silicon structures using a combination of the spreading resistance and point contact current–voltage methods

Integration of multi-voltage analog and power devices in a 0.25/spl mu/m CMOS + flash memory process

Charge trapping in single and multiple implant SIMOX buried oxides

Profiling of compound semiconductors using point contact techniques

Profiling of compound semiconductors using point contact techniques: Part 2

A 0.18 /spl mu/m SiGe:C RFBiCMOS technology for wireless and gigabit optical communication applications

Profiling of composition and carrier concentration in Al x Ga1− x As by point contact techniques

Immunogenicity of casein phosphopeptides derived from tryptic hydrolysis of beta-casein

Purity and Yield of β-Lactoglobulin Isolated by an N-Retinyl-Celite Bioaffinity Column

Relative immunogenicity of beta-lactoglobulin, bovine serum albumin, and model acid whey product

Immunogenicity of Casein Phosphopetides Derived from Tryptic Hydroylsis of β-Casein

Soils and their Role in Planning a Suburban County

The Use of Agricultural Soil Surveys in the Planning and Construction of Highways

Quantitative Aspects of Soil Survey Interpret at Ion in Appraisal of Soil Productivity

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