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A review of the present state of art in hard coatings grown from the vapor phase

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1986-09, Vol.4 (5), p.2259-2279

1986

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Al induced crystallization of a-Si

Journal of applied physics, 1991-05, Vol.69 (9), p.6394-6399

1991

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Browsing the Real World using Organic Electronics, Si-Chips, and a Human Touch

Advanced materials (Weinheim), 2016-03, Vol.28 (10), p.1911-1916

2016

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Crystallization of amorphous silicon during thin-film gold reaction

Journal of applied physics, 1987-11, Vol.62 (9), p.3647-3655

1987

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Effects of Sb on phase transformations of amorphous TiSi2 thin films

Journal of applied physics, 1992-07, Vol.72 (2), p.514-519

1992

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Thermodynamic investigations of solid-state Si-metal interactions. I, experimental and analytical studies of the Si-Ti binary system

Journal of applied physics, 1990-11, Vol.68 (9), p.4535-4541

1990

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Silicon heterojunction bipolar power transistor with an amorphous Si :B alloy emitter

Applied physics letters, 1992-09, Vol.61 (11), p.1316-1318

1992

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Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure

Thin solid films, 1983-07, Vol.105 (4), p.367-384

1983

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Al-doped and Sb-doped polycrystalline silicon obtained by means of metal-induced crystallization

Journal of applied physics, 1987-11, Vol.62 (9), p.3726-3732

1987

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Thermodynamic investigations of solid-state Si-metal interactions. II, general analysis of Si-metal binary systems

Journal of applied physics, 1990-11, Vol.68 (9), p.4542-4549

1990

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A new silicon phosphide, Si12P5: Formation conditions, structure, and properties

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1997-03, Vol.15 (2), p.394-401

1997

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Quantitative ion beam process for the deposition of compound thin films

Applied physics letters, 1983-09, Vol.43 (6), p.547-549

1983

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Higher nitrides of hafnium, zirconium, and titanium synthesized by dual ion beam deposition

Journal of materials research, 1986-06, Vol.1 (3), p.442-451

1986

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The influence of titanium nitride reactive magnetron sputtering on hardened tool steel surfaces

Thin solid films, 1991, Vol.195 (1), p.63-76

1991

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Optical and electrical investigation of semiconducting amorphous Si:P alloy thin films

Journal of applied physics, 1995-01, Vol.77 (1), p.301-307

1995

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Initial solid-state reactions between crystalline Sb and amorphous Si thin films

Journal of applied physics, 1988-08, Vol.64 (3), p.1457-1463

1988

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Predicting the crystallization temperature variation with composition for amorphous silicon-based binary alloy thin films

Journal of applied physics, 1997-02, Vol.81 (3), p.1150-1156

1997

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Thermal stability and crystallization products of amorphous Si:P alloy thin films made by coevaporation of Si and P

Journal of applied physics, 1994-11, Vol.76 (9), p.5179-5184

1994

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Titanium nitride deposition on hardened high speed steel by reactive magnetron sputtering

Thin solid films, 1990-09, Vol.190 (2), p.265-277

1990

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Influence of B concentration on recrystallization of polycrystalline Si

Journal of applied physics, 1991-11, Vol.70 (9), p.4857-4862

1991

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Synthesis of compound thin films by dual ion beam deposition. II. Properties of aluminum-nitrogen films

Journal of applied physics, 1985-07, Vol.58 (1), p.556-563

1985

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Structural and optical band-gap properties of the amorphous semiconducting Si1-xBx alloy

Journal of applied physics, 1993-07, Vol.74 (2), p.891-896

1993

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Interdiffusion in copper-aluminum thin film bilayers. I: Structure and kinetics of sequential compound formation

Journal of applied physics, 1983-12, Vol.54 (12), p.6923-6928

1983

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Deposition of titanium nitride on surface-hardened structural steel by reactive magnetron sputtering

Thin solid films, 1989-12, Vol.182 (1), p.153-166

1989

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Optical properties and crystallization of amorphous Si:Sb alloy thin films

Journal of applied physics, 1994-01, Vol.75 (1), p.507-513

1994

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A review of the present state of art in hard coatings grown from the vapor phase

Al induced crystallization of a-Si

Browsing the Real World using Organic Electronics, Si-Chips, and a Human Touch

Crystallization of amorphous silicon during thin-film gold reaction

Effects of Sb on phase transformations of amorphous TiSi2 thin films

Thermodynamic investigations of solid-state Si-metal interactions. I, experimental and analytical studies of the Si-Ti binary system

Silicon heterojunction bipolar power transistor with an amorphous Si :B alloy emitter

Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure

Al-doped and Sb-doped polycrystalline silicon obtained by means of metal-induced crystallization

Thermodynamic investigations of solid-state Si-metal interactions. II, general analysis of Si-metal binary systems

A new silicon phosphide, Si12P5: Formation conditions, structure, and properties

Quantitative ion beam process for the deposition of compound thin films

Higher nitrides of hafnium, zirconium, and titanium synthesized by dual ion beam deposition

The influence of titanium nitride reactive magnetron sputtering on hardened tool steel surfaces

Optical and electrical investigation of semiconducting amorphous Si:P alloy thin films

Initial solid-state reactions between crystalline Sb and amorphous Si thin films

Predicting the crystallization temperature variation with composition for amorphous silicon-based binary alloy thin films

Thermal stability and crystallization products of amorphous Si:P alloy thin films made by coevaporation of Si and P

Titanium nitride deposition on hardened high speed steel by reactive magnetron sputtering

Influence of B concentration on recrystallization of polycrystalline Si

Synthesis of compound thin films by dual ion beam deposition. II. Properties of aluminum-nitrogen films

Structural and optical band-gap properties of the amorphous semiconducting Si1-xBx alloy

Interdiffusion in copper-aluminum thin film bilayers. I: Structure and kinetics of sequential compound formation

Deposition of titanium nitride on surface-hardened structural steel by reactive magnetron sputtering

Optical properties and crystallization of amorphous Si:Sb alloy thin films

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