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A new proton-conducting porous silicon membrane for small fuel cells

Chemical engineering journal (1996), 2004-08, Vol.101 (1), p.107-111

2004

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Accurate measurement of anhydride fluorhydric acid concentration in controlled gaseous flow with STW sensors

IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2007-08, Vol.54 (8), p.1687-1691

2007

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High sensitivity anhydride hexafluorhydric acid sensor

Sensors and actuators. B, Chemical, 2005-11, Vol.111 (Complete), p.219-224

2005

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Microstereophotolithography and shape memory alloy for the fabrication of miniaturized actuators

Sensors and actuators. A. Physical., 1997-07, Vol.62 (1), p.741-747

1997

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Miniaturized Bulk and Surface Acoustic Wave Quartz Oscillators Used as Sensors

IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 1987-03, Vol.34 (2), p.253-258

Hauden, D.

1987

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AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements

Sensors and actuators. A, Physical, 1995, Vol.46 (1), p.179-182

1995

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Actionneurs miniatures à alliages à mémoire de forme fabriqués par microstéréophotolithographie

Journal de physique. III (Les Ulis), 1996-12, Vol.6 (12), p.1759-1774

1996

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Three-dimensional silicon electrostatic linear microactuator

Sensors and actuators. A. Physical., 1995, Vol.48 (2), p.145-150

1995

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A fast and reproducible method for gas sensor screening to flavour compounds

Sensors and actuators. B, Chemical, 1995-06, Vol.27 (1), p.242-245

1995

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Metallic microdevices fabricated by deep-etch UV lithography

Materials science & engineering. A, Structural materials : properties, microstructure and processing, 1993-02, Vol.160 (2), p.5-8

1993

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New proton-conducting porous silicon membrane for small fuel cells

Chemical engineering journal (Lausanne, Switzerland : 1996), 2004, Vol.101 - Issue 1-3, p.107-111

2004

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Metallurgical applications of the thermoelastic microscope

Thin solid films, 1992-03, Vol.209 (1), p.127-131

1992

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Elastic wave sensors—quartz technological channel and silicon technology

Sensors and actuators. A, Physical, 1992-05, Vol.33 (1), p.99-102

1992

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Feasibility of surface acoustic wave (SAW) sensor array processing with formal neural networks

Sensors and actuators. B, Chemical, 1994-04, Vol.19 (1), p.645-648

1994

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Deep etch X-ray lithography using silicon-gold masks fabricated by deep etch UV lithography and electroforming

Journal of micromechanics and microengineering, 1995-09, Vol.5 (3), p.203-208

1995

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Contribution to the understanding of quantitative measurements of piezoelectric coefficients of thin films using AFM piezoresponse mode

Proceedings - IEEE International Symposium on Applications of Ferroelectrics, 2002, p.99-102

2002

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Stress-sensitivity mapping for surface acoustic waves on quartz

IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 1989-01, Vol.36 (1), p.57-62

1989

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3D silicon electrostatic microactuator

Journal of micromechanics and microengineering, 1993-09, Vol.3 (3), p.155-157

1993

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Heterodyne interferometers: Practical limitations and improvements

Optics communications, 1988-02, Vol.65 (3), p.157-162

1988

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Applications aux microtechniques de la photolithographie profonde par UV et par rayonnement synchrotron

Annales de physique (Paris), 1994-10, Vol.19, p.C1-C1-85

1994

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Acceleration sensitivities of surface acoustic waves propagating on a cantilever quartz beam

Applied physics letters, 1985-01, Vol.47 (12), p.1271-1273

1985

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Acoustic wave thermal sensitivity: Temperature sensors and temperature compensation in microsensors

Sensors and actuators. A. Physical., 1994, Vol.44 (3), p.177-182

1994

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Fabrication de micro-objets métalliques par lithographie UV et électroformage

Matériaux et techniques, 1994, Vol.82 (6-7), p.17-22

1994

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SAW quartz cuts with low stress and temperature sensitivity

Electronics letters, 1987-05, Vol.23 (10), p.514-516

1987

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Erratum to “acoustic wave thermal sensitivity: temperature sensors and temperature compensation in microsensors” [sensors and actuators A 44 (1993) 177–182]

Sensors and actuators. A. Physical., 1994-11, Vol.45 (2), p.167-167

1994

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A new proton-conducting porous silicon membrane for small fuel cells

Accurate measurement of anhydride fluorhydric acid concentration in controlled gaseous flow with STW sensors

High sensitivity anhydride hexafluorhydric acid sensor

Microstereophotolithography and shape memory alloy for the fabrication of miniaturized actuators

Miniaturized Bulk and Surface Acoustic Wave Quartz Oscillators Used as Sensors

AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements

Actionneurs miniatures à alliages à mémoire de forme fabriqués par microstéréophotolithographie

Three-dimensional silicon electrostatic linear microactuator

A fast and reproducible method for gas sensor screening to flavour compounds

Metallic microdevices fabricated by deep-etch UV lithography

New proton-conducting porous silicon membrane for small fuel cells

Metallurgical applications of the thermoelastic microscope

Elastic wave sensors—quartz technological channel and silicon technology

Feasibility of surface acoustic wave (SAW) sensor array processing with formal neural networks

Deep etch X-ray lithography using silicon-gold masks fabricated by deep etch UV lithography and electroforming

Contribution to the understanding of quantitative measurements of piezoelectric coefficients of thin films using AFM piezoresponse mode

Stress-sensitivity mapping for surface acoustic waves on quartz

3D silicon electrostatic microactuator

Heterodyne interferometers: Practical limitations and improvements

Applications aux microtechniques de la photolithographie profonde par UV et par rayonnement synchrotron

Acceleration sensitivities of surface acoustic waves propagating on a cantilever quartz beam

Acoustic wave thermal sensitivity: Temperature sensors and temperature compensation in microsensors

Fabrication de micro-objets métalliques par lithographie UV et électroformage

SAW quartz cuts with low stress and temperature sensitivity

Erratum to “acoustic wave thermal sensitivity: temperature sensors and temperature compensation in microsensors” [sensors and actuators A 44 (1993) 177–182]

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