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Impact of CoFeB surface roughness on reliability of MgO films in CoFeB/MgO/CoFeB magnetic tunnel junction

Japanese Journal of Applied Physics, 2019-08, Vol.58 (SI), p.SIIB29

2019

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Proposal of tunneling- and diffusion-current hybrid MOSFET: A device simulation study

Japanese Journal of Applied Physics, 2016-04, Vol.55 (4S), p.4

2016

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Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition

ECS transactions, 2015-03, Vol.66 (4), p.151-159

2015

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High Selectivity in Dry Etching of Silicon Nitride over Si Using a Novel Hydrofluorocarbon Etch Gas in a Microwave Excited Plasma for FinFET

ECS transactions, 2014-03, Vol.61 (3), p.29-37

2014

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Influence of silicon wafer surface roughness on semiconductor device characteristics

Japanese Journal of Applied Physics, 2020-07, Vol.59 (SM), p.SMMB06

2020

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Distribution of seismic coupling on the subducting plate boundary in northeastern Japan inferred from GPS observations

Tectonophysics, 2000-08, Vol.323 (3), p.217-238

2000

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High reliability CoFeB/MgO/CoFeB magnetic tunnel junction fabrication using low-damage ion beam etching

Japanese Journal of Applied Physics, 2020-04, Vol.59 (SG), p.SGGB05

2020

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Formation technology of flat surface with epitaxial growth on ion-implanted (100)-oriented Si surface of thin silicon-on-insulator

Japanese Journal of Applied Physics, 2017-10, Vol.56 (10), p.105503

2017

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Al-Si crystallographic-orientation transition in Al-Si/TiN layered structures and electromigration performance as interconnects

Journal of applied physics, 1995-01, Vol.77 (2), p.885-892

1995

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Introduction of a High Selectivity Etching Process with Advanced SiN x Etch Gas in the Fabrication of FinFET Structures

ECS transactions, 2016-05, Vol.72 (4), p.23-30

2016

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Preparation of Nickel Pattern Electrodes on YSZ and Their Electrochemical Properties in H 2 ‐ H 2 O Atmospheres

Journal of the Electrochemical Society, 2019-12, Vol.141 (8), p.2129-2134

2019

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Reliability of MgO in magnetic tunnel junctions formed by MgO sputtering and Mg oxidation

2018 IEEE International Reliability Physics Symposium (IRPS), 2018, p.P-GD.4-1-P-GD.4-6

2018

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Interfacial reactions in Al-alloy/Ti/silicon-dioxide-based substrate structures for multilayered interconnects

Japanese Journal of Applied Physics, 1995, Vol.34 (9A), p.4728-4735

1995

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Effects of insulator surface roughness on Al-alloy film crystallographic orientation in Al-alloy/Ti/insulator structure

Japanese Journal of Applied Physics, 1995, Vol.34 (8B), p.L1037-L1040

1995

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Effect of rCaIFN-γ on NK cytotoxic activity in the peripheral blood of dogs

Research in veterinary science, 2013-12, Vol.95 (3), p.965-968

2013

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Effect of rCaIFN-? on NK cytotoxic activity in the peripheral blood of dogs

Research in veterinary science, 2013-12, Vol.95 (3), p.965

2013

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Study on further reducing the epitaxial silicon temperature down to 250 °C in low-energy bias sputtering

Journal of applied physics, 1991-02, Vol.69 (4), p.2062-2071

1991

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Bias-induced structure transition in reactively sputtered TiN films

Applied physics letters, 1989-01, Vol.54 (2), p.120-122

1989

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A simple method of detecting K- ras point mutations in stool samples for colorectal cancer screening using one-step polymerase chain reaction/restriction fragment length polymorphism analysis

Clinica chimica acta, 2002-04, Vol.318 (1), p.107-112

2002

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Formation of copper interconnects by the reflow of sputtered copper films

Electronics & communications in Japan. Part 2, Electronics, 1996, Vol.79 (8), p.105-114, Article 105

1996

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Changes in bradykinin level in coronary sinus blood after the experimental occlusion of a coronary artery

The American heart journal, 1973-05, Vol.85 (5), p.635-647

1973

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Cooking Effects for Baking of an Advanced Ceramic Plate

Journal of Home Economics of Japan, 1996/02/15, Vol.47(2), pp.143-152

1996

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Changes in components of kinin system and hemodynamics in acute myocardial infarction

The American heart journal, 1978-05, Vol.95 (5), p.619-626

1978

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Introduction of a High Selectivity Etching Process with Advanced SiN x Etch Gas in the Fabrication of FinFET Structures

Meeting abstracts (Electrochemical Society), 2016-04, Vol.MA2016-01 (23), p.1166-1166

2016

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Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition

Meeting abstracts (Electrochemical Society), 2015-04, Vol.MA2015-01 (21), p.1378-1378

2015

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Impact of CoFeB surface roughness on reliability of MgO films in CoFeB/MgO/CoFeB magnetic tunnel junction

Proposal of tunneling- and diffusion-current hybrid MOSFET: A device simulation study

Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition

High Selectivity in Dry Etching of Silicon Nitride over Si Using a Novel Hydrofluorocarbon Etch Gas in a Microwave Excited Plasma for FinFET

Influence of silicon wafer surface roughness on semiconductor device characteristics

Distribution of seismic coupling on the subducting plate boundary in northeastern Japan inferred from GPS observations

High reliability CoFeB/MgO/CoFeB magnetic tunnel junction fabrication using low-damage ion beam etching

Formation technology of flat surface with epitaxial growth on ion-implanted (100)-oriented Si surface of thin silicon-on-insulator

Al-Si crystallographic-orientation transition in Al-Si/TiN layered structures and electromigration performance as interconnects

Introduction of a High Selectivity Etching Process with Advanced SiN x Etch Gas in the Fabrication of FinFET Structures

Preparation of Nickel Pattern Electrodes on YSZ and Their Electrochemical Properties in H 2 ‐ H 2 O Atmospheres

Reliability of MgO in magnetic tunnel junctions formed by MgO sputtering and Mg oxidation

Interfacial reactions in Al-alloy/Ti/silicon-dioxide-based substrate structures for multilayered interconnects

Effects of insulator surface roughness on Al-alloy film crystallographic orientation in Al-alloy/Ti/insulator structure

Effect of rCaIFN-γ on NK cytotoxic activity in the peripheral blood of dogs

Effect of rCaIFN-? on NK cytotoxic activity in the peripheral blood of dogs

Study on further reducing the epitaxial silicon temperature down to 250 °C in low-energy bias sputtering

Bias-induced structure transition in reactively sputtered TiN films

A simple method of detecting K- ras point mutations in stool samples for colorectal cancer screening using one-step polymerase chain reaction/restriction fragment length polymorphism analysis

Formation of copper interconnects by the reflow of sputtered copper films

Changes in bradykinin level in coronary sinus blood after the experimental occlusion of a coronary artery

Cooking Effects for Baking of an Advanced Ceramic Plate

Changes in components of kinin system and hemodynamics in acute myocardial infarction

Introduction of a High Selectivity Etching Process with Advanced SiN x Etch Gas in the Fabrication of FinFET Structures

Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition

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