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A MOSFET Fabrication Using a Maskless Lithography System in Clean-Localized Environment of Minimal Fab

IEEE transactions on semiconductor manufacturing, 2015-08, Vol.28 (3), p.393-398

2015

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Enhancement of downstream plasma density by a stepped-diameter radiofrequency plasma source under a static magnetic field for a compact sputtering reactor

Vacuum, 2019-05, Vol.163, p.269-274

2019

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Via Interconnections for Half-Inch Packaging of Electronic Devices Using Minimal Fab Process Tools

Journal of Photopolymer Science and Technology, 2020/01/31, Vol.32(6), pp.763-768

2020

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Fabrication of nano-capillary emitter arrays for ionic liquid electrospray thrusters

Japanese Journal of Applied Physics, 2021-06, Vol.60 (SC), p.SCCF07

2021

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Fabrication of a high-density emitter array for electrospray thrusters using field emitter array process

Japanese Journal of Applied Physics, 2019-06, Vol.58 (SE), p.SEEG04

2019

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Small Plasma Space with a Small Plasma Source and Its Advantage in Minimal Fab

Journal of Photopolymer Science and Technology, 2019/06/24, Vol.32(5), pp.747-752

2019

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Magnetic Nozzle Radiofrequency Plasma Systems for Space Propulsion, Industry, and Fusion Plasmas

Plasma and Fusion Research, 2023/06/30, Vol.18, pp.2501050-2501050

2023

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An experimental study of solid source diffusion by spin on dopants and its application for minimal silicon-on-insulator CMOS fabrication

Japanese Journal of Applied Physics, 2017-06, Vol.56 (6S1), p.6

2017

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Photolithography for Minimal Fab System

IEEJ transactions on sensors and micromachines, 2013, Vol.133 (9), p.272-277

2013

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Transport of a helicon plasma by a convergent magnetic field for high speed and compact plasma etching

Journal of physics. D, Applied physics, 2014-10, Vol.47 (42), p.425201-6

2014

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Investigation of piezoresistive effect in p-channel metal-oxide-semiconductor field-effect transistors fabricated on circular silicon-on-insulator diaphragms using cost-effective minimal-fab process

Japanese Journal of Applied Physics, 2018-06, Vol.57 (6S1), p.6

2018

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Real time evaluation of silicon epitaxial growth process by exhaust gas measurement using quartz crystal microbalance

Materials science in semiconductor processing, 2018-12, Vol.88, p.192-197

2018

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Control of interface states at metal/6H-SiC(0001) interfaces

Physical review. B, Condensed matter and materials physics, 2004-07, Vol.70 (3), p.035312.1-035312.19, Article 035312

2004

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New Compact Electron Cyclotron Resonance Plasma Source for Silicon Nitride Film Formation in Minimal Fab System

IEEE journal of the Electron Devices Society, 2018, Vol.6, p.512-517

2018

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Competitive binding of CREB and ATF2 to cAMP/ATF responsive element regulates eNOS gene expression in endothelial cells

Arteriosclerosis, thrombosis, and vascular biology, 2006-05, Vol.26 (5), p.1036-1042

2006

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A case of Trousseau syndrome caused by pulmonary adenocarcinoma that was controlled for one year and 10 months with thrombosis treatment using an EGFR tyrosine kinase inhibitor and chemotherapy

Respiratory medicine case reports, 2015-01, Vol.15 (C), p.101-105

2015

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Analyses on Cleanroom-Free Performance and Transistor Manufacturing Cycle Time of Minimal Fab

IEEE transactions on semiconductor manufacturing, 2015-11, Vol.28 (4), p.551-556

2015

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The Schottky limit and a charge neutrality level found on metal/6H-SiC interfaces

Surface science, 2001-12, Vol.494 (3), p.L805-L810

Hara, Shiro

2001

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ミニマルファブのための小型HiPIMS型スパッタ成膜装置の開発

Journal of the Vacuum Society of Japan, 2017, Vol.60(9), pp.365-371

2017

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Minimal multi-target plasma sputtering tool

Vacuum, 2020-01, Vol.171, p.109000, Article 109000

2020

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A method to deposit a known number of polystyrene latex particles on a flat surface

Aerosol science and technology, 2019-12, Vol.53 (12), p.1353-1366

2019

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Novel Sensor Using ISFET and Pt Electrodes for Water pH and Flow Speed Measurement

IEEE sensors letters, 2024-08, Vol.8 (8), p.1-4

2024

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Microfabrication of surface acoustic wave devices with AlN thin film deposited on half‐inch quartz wafer

Electrical engineering in Japan, 2022-12, Vol.215 (4), p.n/a

2022

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Microfabrication of Surface Acoustic Wave Devices with AlN Thin Film Deposited on Half-inch Quartz Wafer

IEEJ transactions on sensors and micromachines, 2022-09, Vol.142 (9), p.248-253

2022

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Boron-Silicon Thin Film Formation Using a Slim Vertical Chemical Vapor Deposition Reactor

Advances in chemical engineering and science, 2023, Vol.13 (1), p.7-18

2023

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A MOSFET Fabrication Using a Maskless Lithography System in Clean-Localized Environment of Minimal Fab

Enhancement of downstream plasma density by a stepped-diameter radiofrequency plasma source under a static magnetic field for a compact sputtering reactor

Via Interconnections for Half-Inch Packaging of Electronic Devices Using Minimal Fab Process Tools

Fabrication of nano-capillary emitter arrays for ionic liquid electrospray thrusters

Fabrication of a high-density emitter array for electrospray thrusters using field emitter array process

Small Plasma Space with a Small Plasma Source and Its Advantage in Minimal Fab

Magnetic Nozzle Radiofrequency Plasma Systems for Space Propulsion, Industry, and Fusion Plasmas

An experimental study of solid source diffusion by spin on dopants and its application for minimal silicon-on-insulator CMOS fabrication

Photolithography for Minimal Fab System

Transport of a helicon plasma by a convergent magnetic field for high speed and compact plasma etching

Investigation of piezoresistive effect in p-channel metal-oxide-semiconductor field-effect transistors fabricated on circular silicon-on-insulator diaphragms using cost-effective minimal-fab process

Real time evaluation of silicon epitaxial growth process by exhaust gas measurement using quartz crystal microbalance

Control of interface states at metal/6H-SiC(0001) interfaces

New Compact Electron Cyclotron Resonance Plasma Source for Silicon Nitride Film Formation in Minimal Fab System

Competitive binding of CREB and ATF2 to cAMP/ATF responsive element regulates eNOS gene expression in endothelial cells

A case of Trousseau syndrome caused by pulmonary adenocarcinoma that was controlled for one year and 10 months with thrombosis treatment using an EGFR tyrosine kinase inhibitor and chemotherapy

Analyses on Cleanroom-Free Performance and Transistor Manufacturing Cycle Time of Minimal Fab

The Schottky limit and a charge neutrality level found on metal/6H-SiC interfaces

ミニマルファブのための小型HiPIMS型スパッタ成膜装置の開発

Minimal multi-target plasma sputtering tool

A method to deposit a known number of polystyrene latex particles on a flat surface

Novel Sensor Using ISFET and Pt Electrodes for Water pH and Flow Speed Measurement

Microfabrication of surface acoustic wave devices with AlN thin film deposited on half‐inch quartz wafer

Microfabrication of Surface Acoustic Wave Devices with AlN Thin Film Deposited on Half-inch Quartz Wafer

Boron-Silicon Thin Film Formation Using a Slim Vertical Chemical Vapor Deposition Reactor

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