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Microsystem technologies : sensors, actuators, systems integration, 2002-05, Vol.8 (2-3), p.83-87
2002
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- Applied Sciences
- Circuit Properties
- Electric, Optical And Optoelectronic Circuits
- Electronics
- Engineering
- Engineering, Electrical & Electronic
- Exact Sciences And Technology
- Fabrication Techniques; Lithography, Pattern Transfer
- Integrated Optics. Optical Fibers And Wave Guides
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- Materials Science, Multidisciplinary
- Mechanical Engineering. Machine Design
- Mechanical Instruments, Equipment And Techniques
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- Precision Engineering, Watch Making
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