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Synthesis and characterization of highly-conducting nitrogen-doped ultrananocrystalline diamond films

Applied physics letters, 2001-09, Vol.79 (10), p.1441-1443

2001

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Inductively coupled plasmas in low global-warming-potential gases

Journal of physics. D, Applied physics, 2000-08, Vol.33 (16), p.2004-2009

2000

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Electron transport, ionization, and attachment coefficients in C2F4 and C2F4/Ar mixtures

The Journal of chemical physics, 2001-05, Vol.114 (20), p.8932-8937

2001

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Ion compositions and energies in inductively coupled plasmas containing SF6

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2001-07, Vol.19 (4), p.1294-1297

2001

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Spectroscopic determination of carbon dimer densities in Ar-H2-CH4 and Ar-H2-C60 plasmas

Journal of physics. D, Applied physics, 1998-08, Vol.31 (16), p.1975-1986

1998

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C2 Swan band emission intensity as a function of C2 density

Plasma sources science & technology, 1998-05, Vol.7 (2), p.149-153

1998

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Experimental comparison of rotational and gas kinetic temperatures in N2 and He-N2 discharges

Journal of physics. D, Applied physics, 1998-07, Vol.31 (13), p.1556-1564

1998

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An experimental comparison of rotational temperature and gas kinetic temperature in a H2 discharge

Journal of physics. D, Applied physics, 1996-05, Vol.29 (5), p.1197-1201

1996

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Electron drift in C4F6 and C4F6/Ar mixtures

Journal of applied physics, 2002-09, Vol.92 (5), p.2948-2949

2002

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Ion fluxes and energies in inductively coupled radio-frequency discharges containing C2F6 and c -C4F8

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2000-11, Vol.18 (6), p.2785-2790

2000

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Ion fluxes and energies in inductively coupled radio-frequency discharges containing CHF3

Journal of applied physics, 2000-11, Vol.88 (10), p.5612-5617

2000

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Measurement of C6H6 densities in a diamond deposition system

The Journal of chemical physics, 1999-03, Vol.110 (9), p.4647-4650

1999

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An experimental comparison of rotational temperature and gas kinetic temperature in a discharge

Journal of physics. D, Applied physics, 1996-05, Vol.29 (5), p.1197-1201

1996

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Swan band emission intensity as a function of density

Plasma sources science & technology, 1998-05, Vol.7 (2), p.149-153

1998

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Uses of High-Sensitivity White-Light Absorption Spectroscopy In Chemical Vapor Deposition and Plasma Processing

Advances In Atomic, Molecular, and Optical Physics, 2000, Vol.43, p.295-339

2000

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Ion fluxes and energies in inductively coupled radio-frequency discharges containing C 2 F 6 and c - C 4 F 8

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2000-11, Vol.18 (6), p.2785-2790

2000

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Experimental comparison of rotational and gas kinetic temperatures in and He- discharges

Journal of physics. D, Applied physics, 1998-07, Vol.31 (13), p.1556-1564

1998

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Ion compositions and energies in inductively coupled plasmas containing SF 6

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2001, Vol.19 (4), p.1294-1297

2001

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Spectroscopic determination of carbon dimer densities in and plasmas

Journal of physics. D, Applied physics, 1998-08, Vol.31 (16), p.1975-1986

1998

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C 2 column densities in H2/Ar/CH4 microwave plasmas

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1998-01, Vol.16 (1), p.337-340

1998

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Ion compositions and energies in inductively coupled plasmas containing SF sub(6 )

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2001-01, Vol.19 (4), p.1294-1297

2001

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Spectroscopic determination of carbon dimer densities in Ar-H{sub 2}-CH{sub 4} and Ar-H{sub 2}-C{sub 60} plasmas

Journal of physics. D, Applied physics, 1998-08, Vol.31 (16 ; Aug. 21, 1998)

1998

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An experimental comparison of rotational temperature and gas kinetic temperature in a H\+v\2\-v\ discharge

Journal of physics. D, Applied physics, 1996-05, Vol.29 (5), p.1197-1201

1996

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UV/VUV high sensitivity absorption spectroscopy

AIP conference proceedings, 1998-09, Vol.443 (1)

1998

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C{sub 2} swan band emission intensity as a function of C{sub 2} density

Plasma sources science & technology, 1998-05, Vol.7 (2 ; May 1998)

1998

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Synthesis and characterization of highly-conducting nitrogen-doped ultrananocrystalline diamond films

Inductively coupled plasmas in low global-warming-potential gases

Electron transport, ionization, and attachment coefficients in C2F4 and C2F4/Ar mixtures

Ion compositions and energies in inductively coupled plasmas containing SF6

Spectroscopic determination of carbon dimer densities in Ar-H2-CH4 and Ar-H2-C60 plasmas

C2 Swan band emission intensity as a function of C2 density

Experimental comparison of rotational and gas kinetic temperatures in N2 and He-N2 discharges

An experimental comparison of rotational temperature and gas kinetic temperature in a H2 discharge

Electron drift in C4F6 and C4F6/Ar mixtures

Ion fluxes and energies in inductively coupled radio-frequency discharges containing C2F6 and c -C4F8

Ion fluxes and energies in inductively coupled radio-frequency discharges containing CHF3

Measurement of C6H6 densities in a diamond deposition system

An experimental comparison of rotational temperature and gas kinetic temperature in a discharge

Swan band emission intensity as a function of density

Uses of High-Sensitivity White-Light Absorption Spectroscopy In Chemical Vapor Deposition and Plasma Processing

Ion fluxes and energies in inductively coupled radio-frequency discharges containing C 2 F 6 and c - C 4 F 8

Experimental comparison of rotational and gas kinetic temperatures in and He- discharges

Ion compositions and energies in inductively coupled plasmas containing SF 6

Spectroscopic determination of carbon dimer densities in and plasmas

C 2 column densities in H2/Ar/CH4 microwave plasmas

Ion compositions and energies in inductively coupled plasmas containing SF sub(6 )

Spectroscopic determination of carbon dimer densities in Ar-H{sub 2}-CH{sub 4} and Ar-H{sub 2}-C{sub 60} plasmas

An experimental comparison of rotational temperature and gas kinetic temperature in a H\+v\2\-v\ discharge

UV/VUV high sensitivity absorption spectroscopy

C{sub 2} swan band emission intensity as a function of C{sub 2} density

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