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Surfactant Adsorption on Single-Crystal Silicon Surfaces in TMAH Solution: Orientation-Dependent Adsorption Detected by In Situ Infrared Spectroscopy

Journal of microelectromechanical systems, 2009-12, Vol.18 (6), p.1345-1356

2009

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IEEE_Xplore

Analytical Solution of the Continuous Cellular Automaton for Anisotropic Etching

Journal of microelectromechanical systems, 2008-04, Vol.17 (2), p.410-431

2008

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IEEE_Xplore

Ellipsometry study of the adsorbed surfactant thickness on Si{1 1 0} and Si{1 0 0} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH

Sensors and actuators. A. Physical., 2009-12, Vol.156 (2), p.334-341

2009

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Anisotropic wet chemical etching of crystalline silicon: atomistic Monte-Carlo simulations and experiments

Applied surface science, 2001-07, Vol.178 (1), p.7-26

2001

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Anisotropic Etching of Silicon as a Tool for Creating Injection Molding Tooling Surfaces

Journal of microelectromechanical systems, 2006-12, Vol.15 (6), p.1671-1680

2006

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IEEE_Xplore

Implementation and evaluation of the Level Set method: Towards efficient and accurate simulation of wet etching for microengineering applications

Computer physics communications, 2013-10, Vol.184 (10), p.2299-2309

2013

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Octree-based, GPU implementation of a continuous cellular automaton for the simulation of complex, evolving surfaces

Computer physics communications, 2011-03, Vol.182 (3), p.628-640

2011

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Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions

Sensors and actuators. A. Physical., 2010, Vol.157 (1), p.91-95

2010

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Discrete and continuous cellular automata for the simulation of propagating surfaces

Sensors and actuators. A. Physical., 2009-10, Vol.155 (1), p.98-112

2009

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Octree-search Kinetic Monte Carlo

Sensors and actuators. A. Physical., 2010-04, Vol.159 (1), p.64-68

2010

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Atomistic simulations of surface coverage effects in anisotropic wet chemical etching of crystalline silicon

Applied surface science, 2002-12, Vol.202 (3), p.160-182

2002

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Simulation of microloading and ARDE in DRIE

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015, p.1255-1258

2015

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Continuous Cellular Automaton for the simulation of the surface morphology on any silicon orientation Si in anisotropic etching

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, 2009, p.747-750

2009

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IEEE_Xplore

An improved anisotropic wet etching process for the fabrication of silicon mems structures using a single etching mask

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008, p.327-330

2008

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IEEE_Xplore

Surfactant in TMAH for new shapes of silicon MEMS components; Its orientation dependent adsorption detected by infrared spectroscopy

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, 2009, p.751-754

2009

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IEEE_Xplore

Octree-search kinetic monte carlo algorithm for the simulation of complex 3D MEMS structures

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008, p.323-326

2008

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IEEE_Xplore

A Continuous Cellular Automaton for the Atomistic Simulation of Evolving Surface in Anisotropic Etching

2008 Fourth International Conference on Natural Computation, 2008, Vol.7, p.402-406

2008

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IEEE_Xplore

Adsorbed surfactant thickness on: A Si wafer dominating etching properties of TMAH solution

2009 International Symposium on Micro-NanoMechatronics and Human Science, 2009, p.48-52

2009

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IEEE_Xplore

A Universal Parameter for Silicon Anisotropic Etching Inalkaline Solutions

19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, p.318-321

2006

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IEEE_Xplore

Exploring the activation energy during nanoscale structural evolution in wet etching

Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004, 2004, p.127-132

2004

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IEEE_Xplore

Chapter Twenty Four - Wet Etching of Silicon

Handbook of Silicon Based MEMS Materials and Technologies, 2010, p.375-407

2010

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Sex-sorted bovine spermatozoa and DNA damage: II. Dynamic features

Theriogenology, 2011-01, Vol.75 (2), p.206-211

2011

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Sex-sorted bovine spermatozoa and DNA damage: I. Static features

Theriogenology, 2011-01, Vol.75 (2), p.197-205

2011

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Distribution of carnation viruses in the shoot tip: Exclusion from the shoot apical meristem

Physiological and molecular plant pathology, 2006-07, Vol.69 (1), p.43-51

2006

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Detection of Melon necrotic spot virus in water samples and melon plants by molecular methods

Journal of virological methods, 2003-11, Vol.113 (2), p.87-93

2003

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Surfactant Adsorption on Single-Crystal Silicon Surfaces in TMAH Solution: Orientation-Dependent Adsorption Detected by In Situ Infrared Spectroscopy

Analytical Solution of the Continuous Cellular Automaton for Anisotropic Etching

Ellipsometry study of the adsorbed surfactant thickness on Si{1 1 0} and Si{1 0 0} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH

Anisotropic wet chemical etching of crystalline silicon: atomistic Monte-Carlo simulations and experiments

Anisotropic Etching of Silicon as a Tool for Creating Injection Molding Tooling Surfaces

Implementation and evaluation of the Level Set method: Towards efficient and accurate simulation of wet etching for microengineering applications

Octree-based, GPU implementation of a continuous cellular automaton for the simulation of complex, evolving surfaces

Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions

Discrete and continuous cellular automata for the simulation of propagating surfaces

Octree-search Kinetic Monte Carlo

Atomistic simulations of surface coverage effects in anisotropic wet chemical etching of crystalline silicon

Simulation of microloading and ARDE in DRIE

Continuous Cellular Automaton for the simulation of the surface morphology on any silicon orientation Si in anisotropic etching

An improved anisotropic wet etching process for the fabrication of silicon mems structures using a single etching mask

Surfactant in TMAH for new shapes of silicon MEMS components; Its orientation dependent adsorption detected by infrared spectroscopy

Octree-search kinetic monte carlo algorithm for the simulation of complex 3D MEMS structures

A Continuous Cellular Automaton for the Atomistic Simulation of Evolving Surface in Anisotropic Etching

Adsorbed surfactant thickness on: A Si wafer dominating etching properties of TMAH solution

A Universal Parameter for Silicon Anisotropic Etching Inalkaline Solutions

Exploring the activation energy during nanoscale structural evolution in wet etching

Chapter Twenty Four - Wet Etching of Silicon

Sex-sorted bovine spermatozoa and DNA damage: II. Dynamic features

Sex-sorted bovine spermatozoa and DNA damage: I. Static features

Distribution of carnation viruses in the shoot tip: Exclusion from the shoot apical meristem

Detection of Melon necrotic spot virus in water samples and melon plants by molecular methods

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