UB Paderborn / Katalog / Suche / in CDI

Sortiert nach

Einfacher Volltextzugriff von (fast) überall

Installieren Sie die LibKey Nomad-Browsererweiterung und erhalten Sie von vielen Webseiten einfachen Zugriff auf lizenzierte Volltexte oder Open Access Publikationen. Mehr erfahren...

Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications

Journal of micromechanics and microengineering, 2009-12, Vol.19 (12), p.125011-125011 (18)

2009

Volltextzugriff (PDF)

Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

Journal of micromechanics and microengineering, 2011-12, Vol.21 (12), p.125008

2011

Volltextzugriff (PDF)

An atomistic introduction to anisotropic etching

Journal of micromechanics and microengineering, 2007-04, Vol.17 (4), p.S1-S26

2007

Volltextzugriff (PDF)

Level set implementation for the simulation of anisotropic etching: application to complex MEMS micromachining

Journal of micromechanics and microengineering, 2013-07, Vol.23 (7), p.75017-10

2013

Volltextzugriff (PDF)

Evolutionary determination of kinetic Monte Carlo rates for the simulation of evolving surfaces in anisotropic etching of silicon

Journal of micromechanics and microengineering, 2012-08, Vol.22 (8), p.85020-12

2012

Volltextzugriff (PDF)

Implementation and evaluation of the Level Set method: Towards efficient and accurate simulation of wet etching for microengineering applications

Computer physics communications, 2013-10, Vol.184 (10), p.2299-2309

2013

Volltextzugriff (PDF)

Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures

New journal of physics, 2007-12, Vol.9 (12), p.436-436

2007

Volltextzugriff (PDF)

Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

Journal of micromechanics and microengineering, 2011-12, Vol.21 (12), p.125007

2011

Volltextzugriff (PDF)

Etched profile control in anisotropic etching of silicon by TMAH+Triton

Journal of micromechanics and microengineering, 2012-06, Vol.22 (6), p.65013-9

2012

Volltextzugriff (PDF)

Faster and exact implementation of the continuous cellular automaton for anisotropic etching simulations

Journal of micromechanics and microengineering, 2011-02, Vol.21 (2), p.025021

2011

Volltextzugriff (PDF)

Evolutionary continuous cellular automaton for the simulation of wet etching of quartz

Journal of micromechanics and microengineering, 2012-02, Vol.22 (2), p.25021-14

2012

Volltextzugriff (PDF)

Apparent activation energy during surface evolution by step formation and flow

New journal of physics, 2006-11, Vol.8 (11), p.269-269

2006

Volltextzugriff (PDF)

Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(1 1 0)

Journal of micromechanics and microengineering, 2007-04, Vol.17 (4), p.S27-S37

2007

Volltextzugriff (PDF)

Evidence for faster etching at the mask-substrate interface: atomistic simulation of complex cavities at the micron-/submicron-scale by the continuous cellular automaton

Journal of micromechanics and microengineering, 2016-04, Vol.26 (4), p.45013-45022

2016

Volltextzugriff (PDF)

First-principles calculations of Cu adsorption on an H-terminated Si surface

Physical review. B, Condensed matter and materials physics, 2007-08, Vol.76 (7), Article 075315

2007

Volltextzugriff (PDF)

Octree-based, GPU implementation of a continuous cellular automaton for the simulation of complex, evolving surfaces

Computer physics communications, 2011-03, Vol.182 (3), p.628-640

2011

Volltextzugriff (PDF)

Reconstructing the 3D etch rate distribution of silicon in anisotropic etchants using data from vicinal {1 0 0}, {1 1 0} and {1 1 1} surfaces

Journal of micromechanics and microengineering, 2011-10, Vol.21 (10), p.105018-17

2011

Volltextzugriff (PDF)

Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions

Sensors and actuators. A. Physical., 2010, Vol.157 (1), p.91-95

2010

Volltextzugriff (PDF)

Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution

Journal of micromechanics and microengineering, 2011-01, Vol.21 (1), p.015008

2011

Volltextzugriff (PDF)

Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton

Journal of micromechanics and microengineering, 2010-01, Vol.20 (1), p.015019-015019 (11)

2010

Volltextzugriff (PDF)

Surface morphology during anisotropic wet chemical etching of crystalline silicon

New journal of physics, 2003-07, Vol.5, p.100-100

2003

Volltextzugriff (PDF)

Discrete and continuous cellular automata for the simulation of propagating surfaces

Sensors and actuators. A. Physical., 2009-10, Vol.155 (1), p.98-112

2009

Volltextzugriff (PDF)

Evolutionary Kinetic Monte Carlo: Atomistic Rates of Surface-Mediated Processes from Surface Morphologies

Journal of physical chemistry. C, 2014-06, Vol.118 (22), p.11636-11648

2014

Volltextzugriff (PDF)

Atomistic methods for the simulation of evolving surfaces

Journal of micromechanics and microengineering, 2008-05, Vol.18 (5), p.055029-055029 (17)

2008

Volltextzugriff (PDF)

Simulating anisotropic etching of silicon in any etchant: evolutionary algorithm for the calibration of the continuous cellular automaton

Journal of micromechanics and microengineering, 2011-06, Vol.21 (6), p.065017

2011

Volltextzugriff (PDF)

1 – 25 von 331

Suche als RSS-Feed

Suchergebnisse filtern

Filter anzeigen

Nur zeigen

Geprüft (Peer-Review)
(274)
Mit Volltextzugriff
(241)

Publikationsform

Sprache

1 weiteren anzeigen...

Weniger anzeigen...

Erscheinungsjahr

n.n

Thema

Science & Technology
(205)
Life Sciences & Biomedicine
(148)
Animals
(85)
Humans
(79)
Male
(69)
Physics
(45)
Physical Sciences
(44)
Female
(43)
Technology
(40)
Reproductive Biology
(31)
Engineering
(29)
Engineering, Electrical & Electronic
(29)
Biological And Medical Sciences
(28)
Dna Fragmentation
(28)
Science & Technology - Other Topics
(26)
Exact Sciences And Technology
(25)
Physics, Applied
(25)
Adult
(24)
Genetics & Heredity
(24)
Nanoscience & Nanotechnology
(24)

15 weitere anzeigen...

Weniger anzeigen...

Zeitschrift / Serie

5 weitere anzeigen...

Weniger anzeigen...

Menü

Weitere Dienste

Einstellungen

Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications

Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

An atomistic introduction to anisotropic etching

Level set implementation for the simulation of anisotropic etching: application to complex MEMS micromachining

Evolutionary determination of kinetic Monte Carlo rates for the simulation of evolving surfaces in anisotropic etching of silicon

Implementation and evaluation of the Level Set method: Towards efficient and accurate simulation of wet etching for microengineering applications

Step flow-based cellular automaton for the simulation of anisotropic etching of complex MEMS structures

Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

Etched profile control in anisotropic etching of silicon by TMAH+Triton

Faster and exact implementation of the continuous cellular automaton for anisotropic etching simulations

Evolutionary continuous cellular automaton for the simulation of wet etching of quartz

Apparent activation energy during surface evolution by step formation and flow

Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(1 1 0)

Evidence for faster etching at the mask-substrate interface: atomistic simulation of complex cavities at the micron-/submicron-scale by the continuous cellular automaton

First-principles calculations of Cu adsorption on an H-terminated Si surface

Octree-based, GPU implementation of a continuous cellular automaton for the simulation of complex, evolving surfaces

Reconstructing the 3D etch rate distribution of silicon in anisotropic etchants using data from vicinal {1 0 0}, {1 1 0} and {1 1 1} surfaces

Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions

Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution

Orientation-dependent surface morphology of crystalline silicon during anisotropic etching using a continuous cellular automaton

Surface morphology during anisotropic wet chemical etching of crystalline silicon

Discrete and continuous cellular automata for the simulation of propagating surfaces

Evolutionary Kinetic Monte Carlo: Atomistic Rates of Surface-Mediated Processes from Surface Morphologies

Atomistic methods for the simulation of evolving surfaces

Simulating anisotropic etching of silicon in any etchant: evolutionary algorithm for the calibration of the continuous cellular automaton

Suchergebnisse filtern