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Strain, stress, and mechanical relaxation in fin-patterned Si/SiGe multilayers for sub-7 nm nanosheet gate-all-around device technology

Applied physics letters, 2018-01, Vol.112 (5)

2018

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Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices

Microscopy and microanalysis, 2018-08, Vol.24 (S1), p.8-9

2018

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Nanobeam Diffraction and Geometric Phase Analysis for Strain Measurements in Si/SiGe Nanosheet Structures

Microscopy and microanalysis, 2016-07, Vol.22 (S3), p.1528-1529

2016

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Elastic Relaxation of Strained Silicon on Insulator (sSOI) Fins: Nanobeam Diffraction (NBD) and Simulations

Microscopy and microanalysis, 2015-08, Vol.21 (S3), p.1967-1968

2015

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Strain Quantification Analysis of Epitaxial SiGe on SOI by Nanobeam Diffraction (NBD)

Microscopy and microanalysis, 2014-08, Vol.20 (S3), p.1070-1071

2014

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Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET

2017 Symposium on VLSI Technology, 2017, p.T230-T231

2017

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Inline monitoring of SiGe strain relaxed buffers (SRBs) using high-resolution X-ray diffraction: AM: Advanced metrology

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2016, p.44-49

2016

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Off-axis electron holography with a dual-lens imaging system and its usefulness in 2-D potential mapping of semiconductor devices

Ultramicroscopy, 2004-11, Vol.101 (2-4), p.63-72

2004

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Precession Electron Diffraction (PED) Strain Measurements in Stacked Nanosheet Structures

Microscopy and microanalysis, 2019-08, Vol.25 (S2), p.2018-2019

2019

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Quantitative Electron Energy Loss Spectroscopy (EELS) Analysis of Flowable CVD Oxide for Shallow Trench Isolation of finFET Integration

Microscopy and microanalysis, 2017-07, Vol.23 (S1), p.1462-1463

2017

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Mechanistic insights into metal-mediated electroless copper plating employing hypophosphite as a reducing agent

IBM journal of research and development, 1993-03, Vol.37 (2), p.107-116

1993

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Efficient synthesis, redox characteristics, and electronic structure of a tetravalent tris(cyclopentadienyl)cerium alkoxide complex

Organometallics, 1988-11, Vol.7 (11), p.2360-2364

1988

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Cofacial assembly of partially oxidized metallomacrocycles as an approach to controlling lattice architecture in low-dimensional molecular "metals". Probing band structure-counterion interactions in conductive [M(phthalocyaninato)O]n macromolecules using nitrosonium oxidants

Journal of the American Chemical Society, 1986-11, Vol.108 (24), p.7595-7608

1986

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Electrochemical properties of a molecular assembly comprised of multiple, identical interactive redox centers. Voltammetric characterization of .mu.-oxo-(tetra-tert-butylphthalocyaninato)silicon

Journal of the American Chemical Society, 1991-02, Vol.113 (5), p.1610-1618

1991

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Cyclic voltammetric study of organoactinide compounds of uranium(IV) and neptunium(IV). Ligand effects on the M(IV)/M(III) couple

Inorganic chemistry, 1988-07, Vol.27 (15), p.2747-2748

1988

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Electrochemical reduction and reoxidation accompanied by reversible geometric isomerization. Electrochemistry of [Rh(μ-t-Bu2P)(CO)2]2. Isolation and X-ray crystal structure of [N(n-Bu)4]2+[Rh(μ-t-Bu2P)(CO)2]22

Journal of the American Chemical Society, 1985, Vol.107 (4), p.888-897

1985

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Electron Holography with Variable Magnification for Semiconductor Device Characterization

Microscopy and microanalysis, 2005-08, Vol.11 (S02), p.564-565

2005

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Molecular metals with widely tunable band filling. Response of the collective properties of a phthalocyanine molecular metal to drastic excursions in partial oxidation state and charge-compensating counterions

Journal of the American Chemical Society, 1989-07, Vol.111 (14), p.5271-5284

1989

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Highly conductive metallomacrocyclic assemblies. Synthetic approaches to molecular metals with variable band-filling

Synthetic metals, 1986-07, Vol.15 (2), p.115-128

1986

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Correlations between band structure and electrochemical properties for the electrically conductive .mu.-oxo(tetra-tert-butylphthalocyaninato)silicon polymer

Journal of physical chemistry (1952), 1991-11, Vol.95 (23), p.9584-9589

1991

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Electrochemistry of cofacial phthalocyanine polymers: What can we learn about how molecular metal collective properties respond to wide variations in band filling?

Synthetic metals, 1989-03, Vol.29 (2), p.15-24

1989

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Molecular metals with widely tunable band filling. Structure/stoichiometry/counterion relationships in the electrochemistry of a cofacially joined polymeric phthalocyanine metal

Journal of the American Chemical Society, 1989-07, Vol.111 (14), p.5259-5271

1989

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Widely tunable band filling in a molecular metal. Chemical and physical consequences of electrochemically doping a cofacially joined metallomacrocyclic assembly

Journal of physical chemistry (1952), 1986-10, Vol.90 (21), p.4917-4920

1986

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Conductive polymers based upon rigid-rod ultrahigh-modulus macromolecules. Electrochemical doping of poly(p-phenylenebenzobisthiazole-2,6-diyl) (PBT)

Macromolecules, 1988-07, Vol.21 (7), p.2295-2297

1988

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Search for neutron emission from deuterium-loaded palladium

Physical review. C, Nuclear physics, 1989-07, Vol.40 (1), p.1-R2

1989

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Strain, stress, and mechanical relaxation in fin-patterned Si/SiGe multilayers for sub-7 nm nanosheet gate-all-around device technology

Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices

Nanobeam Diffraction and Geometric Phase Analysis for Strain Measurements in Si/SiGe Nanosheet Structures

Elastic Relaxation of Strained Silicon on Insulator (sSOI) Fins: Nanobeam Diffraction (NBD) and Simulations

Strain Quantification Analysis of Epitaxial SiGe on SOI by Nanobeam Diffraction (NBD)

Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET

Inline monitoring of SiGe strain relaxed buffers (SRBs) using high-resolution X-ray diffraction: AM: Advanced metrology

Off-axis electron holography with a dual-lens imaging system and its usefulness in 2-D potential mapping of semiconductor devices

Precession Electron Diffraction (PED) Strain Measurements in Stacked Nanosheet Structures

Quantitative Electron Energy Loss Spectroscopy (EELS) Analysis of Flowable CVD Oxide for Shallow Trench Isolation of finFET Integration

Mechanistic insights into metal-mediated electroless copper plating employing hypophosphite as a reducing agent

Efficient synthesis, redox characteristics, and electronic structure of a tetravalent tris(cyclopentadienyl)cerium alkoxide complex

Cofacial assembly of partially oxidized metallomacrocycles as an approach to controlling lattice architecture in low-dimensional molecular "metals". Probing band structure-counterion interactions in conductive [M(phthalocyaninato)O]n macromolecules using nitrosonium oxidants

Electrochemical properties of a molecular assembly comprised of multiple, identical interactive redox centers. Voltammetric characterization of .mu.-oxo-(tetra-tert-butylphthalocyaninato)silicon

Cyclic voltammetric study of organoactinide compounds of uranium(IV) and neptunium(IV). Ligand effects on the M(IV)/M(III) couple

Electrochemical reduction and reoxidation accompanied by reversible geometric isomerization. Electrochemistry of [Rh(μ-t-Bu2P)(CO)2]2. Isolation and X-ray crystal structure of [N(n-Bu)4]2+[Rh(μ-t-Bu2P)(CO)2]22

Electron Holography with Variable Magnification for Semiconductor Device Characterization

Molecular metals with widely tunable band filling. Response of the collective properties of a phthalocyanine molecular metal to drastic excursions in partial oxidation state and charge-compensating counterions

Highly conductive metallomacrocyclic assemblies. Synthetic approaches to molecular metals with variable band-filling

Correlations between band structure and electrochemical properties for the electrically conductive .mu.-oxo(tetra-tert-butylphthalocyaninato)silicon polymer

Electrochemistry of cofacial phthalocyanine polymers: What can we learn about how molecular metal collective properties respond to wide variations in band filling?

Molecular metals with widely tunable band filling. Structure/stoichiometry/counterion relationships in the electrochemistry of a cofacially joined polymeric phthalocyanine metal

Widely tunable band filling in a molecular metal. Chemical and physical consequences of electrochemically doping a cofacially joined metallomacrocyclic assembly

Conductive polymers based upon rigid-rod ultrahigh-modulus macromolecules. Electrochemical doping of poly(p-phenylenebenzobisthiazole-2,6-diyl) (PBT)

Search for neutron emission from deuterium-loaded palladium

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