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Microelectronic engineering, 2018-08, Vol.195, p.36-40
2018
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The European physical journal. B, Condensed matter physics, 2000-05, Vol.15 (1), p.41-50
2000
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- Physical Sciences
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- 68.55.-A Thin Film Structure And Morphology
- 68.65.+g Low-Dimensional Structures : Structure, And Nonelectronic Properties
- 75.70.-I Magnetic Films And Multilayers
- Abrasives
- Applied Sciences
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- Balance
- Chemical Mechanical Planarization
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- Condensed Matter: Structure, Mechanical And Thermal Properties
- Correlation Analysis
- Cross-Disciplinary Physics: Materials Science; Rheology
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