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Young's modulus, Poisson's ratio and failure properties of tetrahedral amorphous diamond-like carbon for MEMS devices

Journal of micromechanics and microengineering, 2005-04, Vol.15 (4), p.728-735

2005

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Finite-element modeling of nanoindentation

Journal of applied physics, 1999-02, Vol.85 (3), p.1460-1474

1999

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Diamond and Amorphous Carbon MEMS

MRS bulletin, 2001-04, Vol.26 (4), p.309-311

2001

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Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond

Applied physics letters, 1997-12, Vol.71 (26), p.3820-3822

1997

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Experimental demonstration of a laterally deformable optical nanoelectromechanical system grating transducer

Optics letters, 2004-06, Vol.29 (11), p.1182

2004

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Temperature dependence of the mechanical properties of tetrahedrally coordinated amorphous carbon thin films

Applied physics letters, 2005-10, Vol.87 (16), p.161915-161915-3

2005

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In vivo evaluation of tetrahedral amorphous carbon

Biomaterials, 2005-02, Vol.26 (5), p.465-473

2005

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Fluctuation microscopy studies of medium-range ordering in amorphous diamond-like carbon films

Applied physics letters, 2004-04, Vol.84 (15), p.2823-2825

2004

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Mechanical dissipation in tetrahedral amorphous carbon

Journal of applied physics, 2005-01, Vol.97 (2), p.023517-023517-10

2005

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Stress relaxation and thermal evolution of film properties in amorphous carbon

Journal of electronic materials, 1997-09, Vol.26 (9), p.1021-1029

1997

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Ion-assisted pulsed laser deposition of cubic boron nitride films

Journal of applied physics, 1994-09, Vol.76 (5), p.3088-3101

1994

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Thermal stability of amorphous carbon films grown by pulsed laser deposition

Applied physics letters, 1996-03, Vol.68 (12), p.1643-1645

1996

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On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition

Journal of materials research, 1994-11, Vol.9 (11), p.2925-2938

1994

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Mechanical dissipation at elevated temperatures in tetrahedral amorphous carbon oscillators

Diamond and related materials, 2006-02, Vol.15 (2), p.309-312

2006

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The Genesis Solar-Wind Collector Materials

Space science reviews, 2003-01, Vol.105 (3-4), p.535-560

2003

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Micromechanical testing of MEMS materials

Journal of materials science, 2003-10, Vol.38 (20), p.4081-4086

2003

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Performance of amorphous diamond RF MEMS capacitive switch

Electronics letters, 2004-01, Vol.40 (1), p.43-44

2004

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Amorphous-tetrahedral diamondlike carbon layered structures resulting from film growth energetics

Applied physics letters, 1998-08, Vol.73 (6), p.759-761

1998

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Electron emission induced modifications in amorphous tetrahedral diamondlike carbon

Applied physics letters, 1998-05, Vol.72 (18), p.2244-2246

1998

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Characterization of electron emission from planar amorphous carbon thin films using in situ scanning electron microscopy

Applied physics letters, 1997-04, Vol.70 (15), p.1995-1997

1997

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Microstructure of cubic boron nitride thin films grown by ion-assisted pulsed laser deposition

Journal of applied physics, 1994-07, Vol.76 (1), p.295-303

1994

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Resist substrate studies for LIGA microfabrication with application to a new anodized aluminum substrate

Journal of micromechanics and microengineering, 2005-09, Vol.15 (9), p.1700-1712

2005

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Electron field emission from amorphous tetrahedrally bonded carbon films

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1996-05, Vol.14 (3), p.1719-1722

1996

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Anomalous behavior of nuclear spin-lattice relaxation rates in YBa2Cu3O7 below Tc

Physical review letters, 1991-01, Vol.66 (1), p.108-111

1991

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Finite-element modeling of nanoindentation for evaluating mechanical properties of MEMS materials

Surface & coatings technology, 1998-05, Vol.103, p.268-275

1998

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Young's modulus, Poisson's ratio and failure properties of tetrahedral amorphous diamond-like carbon for MEMS devices

Finite-element modeling of nanoindentation

Diamond and Amorphous Carbon MEMS

Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond

Experimental demonstration of a laterally deformable optical nanoelectromechanical system grating transducer

Temperature dependence of the mechanical properties of tetrahedrally coordinated amorphous carbon thin films

In vivo evaluation of tetrahedral amorphous carbon

Fluctuation microscopy studies of medium-range ordering in amorphous diamond-like carbon films

Mechanical dissipation in tetrahedral amorphous carbon

Stress relaxation and thermal evolution of film properties in amorphous carbon

Ion-assisted pulsed laser deposition of cubic boron nitride films

Thermal stability of amorphous carbon films grown by pulsed laser deposition

On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition

Mechanical dissipation at elevated temperatures in tetrahedral amorphous carbon oscillators

The Genesis Solar-Wind Collector Materials

Micromechanical testing of MEMS materials

Performance of amorphous diamond RF MEMS capacitive switch

Amorphous-tetrahedral diamondlike carbon layered structures resulting from film growth energetics

Electron emission induced modifications in amorphous tetrahedral diamondlike carbon

Characterization of electron emission from planar amorphous carbon thin films using in situ scanning electron microscopy

Microstructure of cubic boron nitride thin films grown by ion-assisted pulsed laser deposition

Resist substrate studies for LIGA microfabrication with application to a new anodized aluminum substrate

Electron field emission from amorphous tetrahedrally bonded carbon films

Anomalous behavior of nuclear spin-lattice relaxation rates in YBa2Cu3O7 below Tc

Finite-element modeling of nanoindentation for evaluating mechanical properties of MEMS materials

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